Products / Brooks / 5964 Series
Brooks 5964 Series

BROOKS 5964C4KALA5KA 5964C4KAHT5KA 5964C2MAM15KD Mass Flow Controller – 5964 Series

Model: 5964C4KALA5KA 5964C4KAHT5KA 5964C2MAM15KD

Brand Brooks
Series 5964 Series
Model 5964C4KALA5KA 5964C4KAHT5KA 5964C2MAM15KD
RFQ-ready model route Obsolete and surplus sourcing Export follow-up by model list

Product Overview

Commercial availability is handled through direct RFQ, model verification and export-oriented follow-up rather than public cart checkout.

Datasheet Preview

Datasheet Preview

Use attached product manuals when available. If the manual is not public yet, request the full file directly through RFQ.

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Commercial Path

Use This Page To Confirm The Model, Then Move To RFQ

Product pages on DRIVEKNMS are designed to verify model, brand and series first, then move the buyer into one clean quotation path.

Technical Dossier

Product Details And Specifications

BROOKS 5964C4KALA5KA / 5964C4KAHT5KA / 5964C2MAM15KD Mass Flow Controller: Supply Continuity Strategy for Scarce Semiconductor Process Equipment

The BROOKS 5964 Series Mass Flow Controller is a precision gas flow management device widely deployed in semiconductor fabrication, chemical vapor deposition (CVD), and specialty gas handling systems. As legacy process equipment ages and OEM production cycles wind down, sourcing verified units of the 5964C4KALA5KA, 5964C4KAHT5KA, and 5964C2MAM15KD has become a measurable procurement risk for fab managers and MRO buyers alike. This page is designed to give procurement teams a clear-eyed view of availability, cost implications, and qualification criteria — not a sales pitch.

Procurement Specifications

Brand BROOKS Instrument
Model / Part Numbers 5964C4KALA5KA | 5964C4KAHT5KA | 5964C2MAM15KD
Series 5964
Product Category Thermal Mass Flow Controller (MFC)
Primary Application Semiconductor CVD / Etch / Diffusion process gas control
Compatible Industries Semiconductor Fab, Photovoltaic Manufacturing, Specialty Chemicals, R&D Labs
Country of Origin United States
Inventory Status Limited Surplus / Refurbished Stock — subject to availability confirmation
Lead Time 3–15 business days depending on stock location and inspection requirements
Warranty 12 months from shipment date
Condition New surplus / Tested & Certified Refurbished (stated at time of quotation)

Cost Optimization & TCO Analysis

Procurement managers evaluating the BROOKS 5964 series face a classic Total Cost of Ownership (TCO) dilemma: the OEM list price for a new-production equivalent — if available — typically runs 3–5× the cost of a verified surplus unit. Factor in the hidden costs of unplanned downtime (semiconductor tool idle time can exceed $10,000/hour in high-volume fabs), and the calculus shifts decisively toward securing a qualified spare inventory buffer.

Spare Parts Turnover Rate: For process-critical MFCs like the 5964 series, industry benchmarks suggest maintaining a minimum 1:4 spare-to-installed ratio for tools running 24/7. Failure to do so statistically increases mean-time-to-repair (MTTR) by 40–70% when a unit fails mid-process run.

Where DriveKNMS reduces your TCO:

  • Competitive surplus pricing — typically 30–60% below OEM new-production MSRP
  • Pre-shipment functional testing eliminates incoming inspection delays on your end
  • Consolidated multi-SKU sourcing reduces your vendor count and administrative overhead
  • Flexible MOQ — single-unit RFQ accepted, volume pricing available for 5+ units

Risk note for buyers: Counterfeit and non-tested MFCs circulate in the gray market. Always request calibration certificates and test reports. DriveKNMS provides documentation upon request — if a supplier cannot produce these, treat it as a disqualifying factor.

Quality Compliance & Logistics

Every unit shipped by DriveKNMS undergoes a documented pre-shipment inspection process. We do not ship untested stock for process-critical instrumentation.

  • Warranty: 12 months from confirmed shipment date, covering functional failure under normal operating conditions
  • Export Documentation: Full commercial invoice, packing list, and certificate of origin issued for all international shipments — compliant with customs requirements in the EU, US, Southeast Asia, and Middle East
  • Payment: T/T (wire transfer), PayPal, Western Union, and LC accepted; multi-currency invoicing available (USD, EUR, CNY)
  • Logistics Partners: DHL Express, FedEx International Priority, UPS — with tracking provided at time of dispatch
  • Packaging: ESD-safe anti-static packaging for all electronic and precision instrumentation components
  • Typical Transit Time: 3–7 business days to most major industrial hubs globally

Why Procurement Managers Choose DriveKNMS

We operate as a specialized industrial spare parts sourcing network, not a general distributor. This distinction matters for procurement teams with strict vendor qualification requirements.

  • Global Sourcing Network: Access to verified surplus inventories across North America, Europe, and Asia — enabling us to locate units that standard distributors have long since discontinued
  • Part Number Cross-Reference: Our technical team actively validates part number equivalencies and flags known substitution errors before shipment — reducing the risk of receiving an incompatible unit
  • Financial Compliance: We issue formal proforma invoices, support purchase order workflows, and can accommodate net-30 terms for qualified institutional buyers
  • Audit Trail: Full traceability documentation available for ISO-certified facilities and regulated industries
  • Responsive RFQ: Most quote requests receive a response within 4 business hours during working days (UTC+8)

FAQ

Q: What are your payment terms?
A: Standard terms are 100% T/T in advance for first-time orders. Net-30 terms are available for pre-qualified institutional buyers upon credit review. We accept USD, EUR, and CNY.

Q: What does the 12-month warranty cover?
A: The warranty covers functional failure of the unit under normal operating conditions. It does not cover damage caused by improper installation, process contamination, or operation outside rated specifications. Warranty claims are processed within 5 business days of receiving the returned unit.

Q: Do you offer volume discounts?
A: Yes. Tiered pricing applies for orders of 3+ units. Contact us with your full BOM or spare parts list for a consolidated quote — multi-line orders typically yield better per-unit pricing.

Q: What is your return policy?
A: DOA (Dead on Arrival) claims must be raised within 7 days of receipt with photographic evidence and a test report. Approved returns are replaced or credited. We do not accept returns for buyer's remorse or incorrect part selection — verify your part number before ordering.

Q: Are these units new or refurbished?
A: Stock condition (new surplus vs. tested refurbished) is explicitly stated in the quotation. We do not mix conditions within a single order without buyer consent.

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