Balzers PVD300 Compact Full Range Gauge Modules: FL-9496 BGG26000 E-E15004080 16-144558-00

Technical Dossier

Product Details And Specifications

Balzers PVD300 Series: Comprehensive Module Range and Technical Overview

The Balzers PVD300 series compact full range gauges are precision vacuum measurement instruments manufactured by Balzers (now Pfeiffer Vacuum), headquartered in Liechtenstein/Switzerland. These gauges are deployed across global heavy industry sectors including semiconductor fabrication, chemical processing plants, nuclear facilities, oil refineries, and thin-film PVD/CVD coating systems. The PVD300 platform combines Pirani and cold cathode (Penning) measurement principles into a single compact sensor head, enabling continuous pressure measurement from atmospheric pressure down to ultra-high vacuum ranges (typically 5×10⁻⁴ to 1×10⁻⁹ mbar). Their robust stainless steel construction and compatibility with aggressive process gases have made them a standard reference instrument in long-cycle industrial vacuum systems worldwide.

The Evolution of PVD300 Architecture

The PVD300 lineage originates from Balzers AG's vacuum instrumentation division, which was absorbed into Pfeiffer Vacuum Technology AG following the 1996 merger. Early-generation Balzers full range gauges (PKR series predecessors) used analog signal outputs and required dedicated Balzers gauge controllers such as the TPG series. The PVD300 generation introduced a standardized connector interface and improved EMC shielding, making it compatible with third-party PLC and DCS control systems via 0–10V or 4–20mA analog outputs.

As the PVD300 series entered its mature/end-of-life phase, Pfeiffer Vacuum introduced the PKR 251 and PKR 361 as direct functional replacements. However, a significant installed base of PVD300 units remains in service across legacy vacuum systems where full system replacement is not economically viable. DriveKNMS specializes in sourcing both new-old-stock (NOS) and refurbished PVD300 units to support these long-term maintenance requirements.

Key compatibility considerations: PVD300 gauges use a proprietary 9-pin D-sub connector pinout that differs from the later PKR 251 standard. Retrofit adaptors are available but require controller firmware verification before installation.

PVD300 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified models within the Balzers PVD300 compact full range gauge series and associated controller/accessory ecosystem. Each entry reflects a distinct part number with defined functional scope:

FL-9496 (BGG26000 / E-E15004080 / 16-144558-00): Compact full range gauge sensor head, combined Pirani + cold cathode, stainless steel flange, standard process connection.
BGG 26 000: Base gauge head assembly, PVD300 platform, KF16 flange, measurement range 5×10⁻⁴ to 1000 mbar.
BGG 26 001: PVD300 gauge head, KF25 flange variant, extended process compatibility.
BGG 26 010: PVD300 gauge head with integrated temperature compensation circuit.
BGG 26 020: High-corrosion-resistance variant, PTFE-coated internal surfaces, for aggressive gas environments.
E-E15004080: OEM cross-reference part number for FL-9496, used in Balzers coating system documentation.
16-144558-00: System-level assembly reference number, maps to PVD300 gauge in Balzers PVD system BOM.
TPG 300: Dual-channel gauge controller, compatible with PVD300 sensor heads, RS-232 interface.
TPG 261: Single-channel gauge controller, analog output 0–10V, DIN rail mount, PVD300 compatible.
TPG 262: Dual-channel version of TPG 261, supports two PVD300 heads simultaneously.
PKR 251: Modern replacement for PVD300, full range gauge, KF16/KF25 flange, 4–20mA output.
PKR 361: High-accuracy full range gauge, replacement for PVD300 in precision applications.
IKR 050: Cold cathode gauge, used alongside PVD300 in UHV system configurations.
TPR 280: Pirani gauge, used as companion sensor in PVD300-based multi-gauge systems.
Cable 10 m (PVD300): Shielded signal cable assembly, 9-pin D-sub, 10-meter length, for PVD300 to TPG controller.
Flange Adaptor KF16-KF25: Stainless steel centering ring adaptor for PVD300 flange interface conversion.

Sourcing Hard-to-Find & Obsolete PVD300 Parts

The Balzers PVD300 series has been officially discontinued by Pfeiffer Vacuum. Standard distribution channels no longer carry new stock. DriveKNMS maintains a dedicated inventory of new-old-stock (NOS), tested-used, and refurbished PVD300 gauge heads and associated controllers sourced from decommissioned vacuum systems, equipment auctions, and authorized surplus channels globally.

For facilities operating legacy Balzers coating systems, ion implanters, or vacuum furnaces where PVD300 gauges are integrated into the machine's original wiring harness and controller architecture, direct replacement with a PKR 251 requires signal conditioning verification. DriveKNMS provides pre-shipment compatibility documentation upon request to support engineering review before procurement.

All sourced PVD300 units are catalogued by flange type, connector condition, and measurement range verification status. Lead times for confirmed NOS stock are typically 3–7 business days ex-warehouse.

Quality Control for the PVD300 Range

PVD300 compact full range gauges present specific QC challenges due to their dual-sensor architecture. The Pirani filament element is susceptible to contamination from process gas residues, while the cold cathode electrode assembly can exhibit high-voltage leakage after extended service in humid or particulate-laden environments.

DriveKNMS applies the following test protocol to all PVD300 units prior to shipment: (1) Visual inspection of flange sealing surface and O-ring groove for mechanical damage. (2) Continuity and insulation resistance test on all 9 connector pins per Balzers wiring specification. (3) Functional test under controlled vacuum conditions using a calibrated TPG 300 controller — measurement range verification from 1×10⁻³ mbar to 100 mbar. (4) Cold cathode high-voltage ignition test to confirm Penning discharge initiation below 1×10⁻² mbar. (5) 24-hour burn-in at stable vacuum to confirm signal stability and absence of drift. Units failing any stage are either refurbished to specification or quarantined and not offered for sale.