Agilent Varian Rotary Vacuum Pump Modules: 949-9335S001 / S7900 / 162383 RFSM-1 / S9500 / 162672 RFSM-2

Technical Dossier

Product Details And Specifications

Agilent Varian Rotary Vacuum Pump Series: Comprehensive Module Range and Technical Overview

The Agilent Varian rotary vacuum pump product line — encompassing the DS, SD, SH, IDP, TriScroll, and legacy Varian-branded RFSM/S-series — represents one of the most widely deployed vacuum generation platforms in global heavy industry. These pumps are installed across semiconductor fabrication facilities, chemical processing plants, nuclear research laboratories, petroleum refineries, and pharmaceutical manufacturing environments. The series covers ultimate pressures from 1×10⁻³ Torr (two-stage oil-sealed) down to 5×10⁻³ Torr (dry scroll), with pumping speeds ranging from 1.5 m³/h to over 65 m³/h. The Leroy Somer motor integration (as found in the 949-9335S001 / S7900 / S9500 platform) provides IEC-standard three-phase induction drive with IP55 protection, making these units suitable for Zone 2 hazardous area deployment when paired with appropriate ATEX enclosures.

The Evolution of Varian Rotary Vacuum Pump Architecture

Varian Associates (acquired by Agilent Technologies in 1999, vacuum division subsequently spun off as Agilent Vacuum Products, later rebranded under the Agilent umbrella) developed its rotary vane and rotary piston vacuum pump lines through three distinct architectural generations. The first generation (pre-1985) used cast-iron stator bodies with mineral oil lubrication and manual gas ballast valves — represented by the SD-90, SD-200, and SD-300 series. The second generation (1985–2000) introduced aluminum alloy stator construction, integrated oil mist eliminators, and the RFSM (Rotary Flange-Sealed Motor) configuration, which eliminated external shaft seals by integrating the motor rotor directly into the pump shaft — the 162383 RFSM-1 and 162672 RFSM-2 are canonical second-generation units. The third generation (2000–present) transitioned to dry scroll technology (IDP-3, IDP-7, IDP-15) and oil-free diaphragm designs for semiconductor-grade cleanliness requirements. The S7900 and S9500 designations refer to Leroy Somer motor frame codes used in the second-generation RFSM platform, indicating 7.9 kW and 9.5 kW motor ratings respectively. Compatibility between generations is limited: RFSM-1 and RFSM-2 motor-pump assemblies are not interchangeable with IDP-series scroll elements. Operators maintaining legacy second-generation installations must source original RFSM assemblies or commission certified remanufacturing.

Varian Rotary Vacuum Pump Full Catalog & Functionalities (SKU List)

The following SKUs represent verified models within the Agilent Varian rotary vacuum pump and associated motor-drive ecosystem. Each entry reflects a distinct functional role within the vacuum generation or motor-drive subsystem:

949-9335S001: Complete rotary vacuum pump assembly with integrated Leroy Somer motor, second-generation RFSM platform, primary OEM part number for S7900/S9500 motor-pump units.
162383 RFSM-1: Rotary Flange-Sealed Motor assembly, first RFSM variant, direct-drive configuration, suits DS-102 and DS-202 pump bodies.
162672 RFSM-2: Rotary Flange-Sealed Motor assembly, second RFSM variant, revised bearing preload specification, suits DS-302 and SD-90 pump bodies.
S7900: Leroy Somer motor frame designation, 7.9 kW, 3-phase, 50/60 Hz, IP55, used in RFSM-1 motor-pump integration.
S9500: Leroy Somer motor frame designation, 9.5 kW, 3-phase, 50/60 Hz, IP55, used in RFSM-2 motor-pump integration.
DS-102: Two-stage rotary vane pump, 5.5 m³/h pumping speed, ultimate pressure 3×10⁻³ Torr, oil-sealed, single-phase motor option.
DS-202: Two-stage rotary vane pump, 11 m³/h pumping speed, ultimate pressure 3×10⁻³ Torr, oil-sealed, standard industrial workhorse.
DS-302: Two-stage rotary vane pump, 17 m³/h pumping speed, ultimate pressure 3×10⁻³ Torr, oil-sealed, heavy-duty chemical process variant.
SD-90: Single-stage rotary piston pump, 90 m³/h pumping speed, ultimate pressure 5×10⁻² Torr, suited for rough vacuum backing applications.
SD-200: Single-stage rotary piston pump, 200 m³/h pumping speed, ultimate pressure 5×10⁻² Torr, large-volume process chamber evacuation.
SD-300: Single-stage rotary piston pump, 300 m³/h pumping speed, ultimate pressure 5×10⁻² Torr, industrial-scale backing pump.
IDP-3: Dry scroll pump, 3 m³/h pumping speed, oil-free, ultimate pressure 5×10⁻³ Torr, semiconductor-grade clean vacuum.
IDP-7: Dry scroll pump, 7 m³/h pumping speed, oil-free, ultimate pressure 5×10⁻³ Torr, analytical instrument backing.
IDP-15: Dry scroll pump, 15 m³/h pumping speed, oil-free, ultimate pressure 5×10⁻³ Torr, load-lock and transfer chamber service.
TriScroll 300: Three-stage dry scroll pump, 8.5 m³/h pumping speed, ultimate pressure 1×10⁻² Torr, corrosive gas handling variant available.
TriScroll 600: Three-stage dry scroll pump, 17 m³/h pumping speed, ultimate pressure 1×10⁻² Torr, high-throughput process tool backing.
949-9310: Oil mist eliminator assembly, compatible with DS-102/DS-202/DS-302, reduces pump exhaust contamination to <5 mg/m³.
949-9320: Gas ballast valve kit, field-retrofit for DS-series pumps, prevents oil emulsification in condensable vapor service.
949-9330: Shaft seal rebuild kit, RFSM-1/RFSM-2 compatible, includes O-rings, lip seals, and bearing retainer hardware.

Sourcing Hard-to-Find & Obsolete Varian Rotary Vacuum Pump Parts

The second-generation RFSM platform (162383 RFSM-1, 162672 RFSM-2, 949-9335S001) reached end-of-production status with Agilent's vacuum division restructuring. OEM new-old-stock (NOS) inventory is exhausted through standard distribution channels. DriveKNMS maintains a dedicated lifecycle extension program for this platform, sourcing verified surplus units from decommissioned semiconductor fabs, petrochemical plant overhauls, and research institution equipment disposals. All units are catalogued by OEM part number, motor frame code (S7900, S9500), and RFSM variant (RFSM-1, RFSM-2) prior to listing. For operators requiring long-term maintenance supply agreements covering DS-102 through SD-300 pump bodies and associated RFSM motor assemblies, DriveKNMS provides multi-year blanket purchase order arrangements with guaranteed unit availability and fixed pricing.

Quality Control for the Varian Rotary Vacuum Pump Range

Each Agilent Varian rotary vacuum pump unit processed by DriveKNMS undergoes a structured inspection and functional verification protocol specific to the RFSM motor-pump architecture. Motor insulation resistance is measured at 500 VDC (minimum 100 MΩ acceptance threshold) for the Leroy Somer S7900 and S9500 frames. Pump ultimate pressure is verified using a calibrated Pirani/Penning combination gauge to confirm performance at or below the OEM-specified ultimate pressure for the relevant DS or SD model. Oil seal integrity is confirmed via 30-minute continuous run at ultimate pressure with exhaust mist measurement. RFSM flange-to-pump-body concentricity is checked with a dial indicator (tolerance: ±0.02 mm) to prevent premature bearing failure. Gas ballast valve function and oil level sight glass integrity are verified prior to packaging. Units failing any parameter are quarantined for remanufacturing or parts recovery — no non-conforming units are offered for resale.