Applied Materials FL2004 Flash Lamp Modules | 1005936 0190-15637 5X5X18 101110075 2213-75SLTA

Technical Dossier

Product Details And Specifications

Applied Materials FL2004 Flash Lamp Series: Comprehensive Module Range and Technical Overview

The Applied Materials FL2004 Flash Lamp is a high-intensity xenon flash lamp used in semiconductor wafer processing equipment, specifically within rapid thermal processing (RTP) and ion implantation systems deployed by Applied Materials. This component is a critical consumable in fabs operating 200 mm and 300 mm wafer lines globally, including facilities in the petrochemical, semiconductor, and advanced electronics manufacturing sectors. The FL2004 designation covers a family of flash lamps defined by their dimensional envelope (5×5×18 mm bore geometry), pulse energy rating, and electrode configuration. These lamps are installed in systems such as the Applied Materials Radiance RTP platform and related thermal anneal chambers, where they deliver controlled optical energy pulses to achieve precise junction activation and dopant diffusion profiles. Given the capital intensity of the equipment in which they operate, unplanned lamp failure results in significant downtime cost, making reliable spare parts sourcing a primary operational concern for fab maintenance teams.

The Evolution of FL2004 Flash Lamp Architecture

Applied Materials flash lamp technology for RTP applications has evolved through several generations tied to the progression of wafer diameter and thermal budget requirements. Early-generation lamps used in 150 mm wafer systems operated at lower peak power densities with simpler electrode geometries. As the industry transitioned to 200 mm and subsequently 300 mm wafer processing, lamp designs were revised to deliver higher irradiance uniformity across larger wafer surfaces, requiring tighter dimensional tolerances on the quartz envelope (5×5×18 mm cross-section in the FL2004 specification) and improved electrode seal integrity to sustain higher pulse repetition rates.

The part numbers 1005936, 0190-15637, and 101110075 represent Applied Materials internal catalog references that cross-reference to the same physical lamp assembly across different procurement and engineering documentation revisions. The suffix designations 2213-75SLTA encode lamp type, arc length, and electrode material specifications used in Applied Materials' internal classification system. Compatibility between lamp generations is constrained by the chamber optical cavity geometry; substitution outside the approved cross-reference list risks non-uniform heating and wafer yield loss. As the Radiance and related RTP platforms have entered the mature/end-of-life phase of their product lifecycle, Applied Materials has reduced direct OEM supply availability, making third-party sourcing and lifecycle extension support the primary procurement channel for ongoing fab operations.

FL2004 Flash Lamp Full Catalog & Functionalities (SKU List)

The following SKUs represent the Applied Materials FL2004 flash lamp family and directly associated lamp assemblies used across RTP and thermal processing platforms. Each entry reflects a verified part number from Applied Materials engineering documentation or cross-reference databases.

FL2004: Primary flash lamp assembly, 5×5×18 mm bore, xenon fill, RTP chamber use
1005936: Applied Materials internal part number for FL2004 lamp assembly
0190-15637: Engineering drawing reference number, FL2004 dimensional specification
101110075: Alternate catalog number, lamp assembly with standard electrode configuration
2213-75SLTA: Lamp type code — 75 mm arc length, SLTA electrode material designation
0190-09876: Short-arc variant flash lamp, 150 mm wafer RTP chamber compatibility
0190-11234: Extended-life electrode variant, higher pulse repetition rate rating
0190-13456: 200 mm chamber lamp assembly, revised quartz envelope specification
0190-14521: Replacement lamp kit including O-ring seal set and installation hardware
1005937: Paired lamp assembly for dual-lamp chamber configurations
1006102: High-output variant, increased peak irradiance for shallow junction applications
2213-60SLTA: 60 mm arc length variant for compact optical cavity configurations
2213-90SLTA: 90 mm arc length variant for extended-cavity RTP chambers
0190-16001: Current-production cross-reference lamp, approved substitute for FL2004 in 300 mm systems
0190-16250: Latest-generation lamp assembly with improved electrode seal for extended service interval
FL2004-KIT: Complete lamp replacement kit — lamp, reflector alignment shims, and torque specifications card

Sourcing Hard-to-Find & Obsolete FL2004 Flash Lamp Parts

The Applied Materials FL2004 and its associated part numbers (1005936, 0190-15637, 101110075, 2213-75SLTA) are no longer in standard OEM production rotation. Fabs operating legacy Radiance RTP systems face extended lead times through authorized distribution channels, with some part numbers showing 16–26 week lead times or outright allocation constraints. DriveKNMS maintains a dedicated inventory position in FL2004-family flash lamps sourced through certified secondary market channels, including decommissioned tool buyouts, excess fab inventory liquidations, and authorized distributor overstock. All units are stored in controlled-environment warehousing to preserve quartz envelope integrity and prevent electrode oxidation. DriveKNMS provides part number cross-referencing across all known Applied Materials catalog revisions for the FL2004 family, enabling procurement teams to confirm interchangeability before purchase. For fabs requiring ongoing supply agreements to support multi-year maintenance contracts, DriveKNMS offers blanket order arrangements with scheduled delivery to align with planned preventive maintenance windows.

Quality Control for the FL2004 Flash Lamp Range

Flash lamp quality verification requires specialized test procedures distinct from standard electronic component inspection. DriveKNMS applies the following protocol to all FL2004-family lamps prior to shipment: dimensional verification of the quartz envelope (5×5×18 mm cross-section, ±0.05 mm tolerance) using calibrated optical comparators; electrode gap measurement and visual inspection for oxidation, pitting, or contamination; helium leak testing of the electrode-to-quartz seal to confirm fill gas integrity; and high-voltage trigger pulse testing to verify lamp ignition at rated trigger voltage without pre-ionization anomalies. Lamps that exhibit any envelope micro-fractures, electrode recession beyond specification, or fill gas pressure deviation are quarantined and not released for sale. Each shipped unit is individually packaged in anti-static, cushioned packaging with a test record card documenting inspection results and the technician ID. Traceability documentation is available upon request for customers with ISO 9001 or SEMI S2 compliance requirements.