Applied Materials FL Series Flash Lamps: FL2004 (P/N 1006146, 0190-17311) & FL2006 (P/N 1007454, 0190-29887, 700009835)

Technical Dossier

Product Details And Specifications

Applied Materials FL Series Flash Lamps: Comprehensive Module Range and Technical Overview

The Applied Materials FL Series flash lamps — specifically the FL2004 and FL2006 — are xenon-filled, high-intensity discharge lamps engineered for use in semiconductor wafer processing equipment, primarily within rapid thermal processing (RTP) and ion implantation systems. These components are installed across high-volume fabs globally, including facilities engaged in logic, memory, and power device manufacturing. The FL2004 and FL2006 are load-bearing consumable parts within Applied Materials platforms such as the Radiance and Centura RTP chambers, where lamp uniformity and spectral output directly affect wafer thermal budget control. Their deployment spans critical process nodes in facilities operated by leading IDMs and foundries across Asia, North America, and Europe.

The Evolution of FL Series Architecture

Applied Materials introduced the FL Series flash lamp architecture as part of its transition from resistance-based heating to photon-based rapid thermal annealing in the late 1990s. Early RTP systems used tungsten-halogen lamps operating in continuous-wave mode; the FL Series represented a shift to pulsed xenon discharge technology, enabling sub-second anneal cycles with precise energy delivery measured in J/cm².

The FL2004 (P/N 1006146 / 0190-17311) was among the first standardized lamp geometries qualified for 200mm wafer chambers. Its successor, the FL2006 (P/N 1007454 / 0190-29887 / 700009835), introduced an extended arc length and revised electrode geometry to support 300mm chamber configurations and higher pulse repetition rates. Both generations share the same base gas fill (xenon at controlled partial pressure) and quartz envelope material (synthetic fused silica, UV-grade), but differ in electrode spacing, trigger voltage requirements, and rated pulse energy.

Compatibility considerations: FL2004 and FL2006 are not interchangeable without chamber recalibration. Substitution requires verification of the lamp driver board firmware version, reflector geometry, and water-cooling manifold port alignment. Systems running legacy process recipes calibrated to FL2004 spectral output will require re-qualification if migrated to FL2006 hardware.

FL Series Full Catalog & Functionalities (SKU List)

The following part numbers represent the verified FL Series and directly associated consumable/spare components used within Applied Materials RTP and related platforms. Each entry reflects a distinct part number as referenced in Applied Materials field service documentation and industry procurement databases.

FL2004: Xenon flash lamp, 200mm RTP chamber, standard arc geometry, P/N 1006146
0190-17311: OEM part number cross-reference for FL2004; used in Radiance RTP systems
FL2006: Xenon flash lamp, 300mm RTP chamber, extended arc, higher pulse energy rating
1007454: Primary OEM part number for FL2006 lamp assembly
0190-29887: Alternate P/N for FL2006; referenced in Centura RTP BOM revisions
700009835: Consolidated spare part number for FL2006 used in post-2010 service kits
0190-09325: Lamp reflector assembly, compatible with FL2004 chamber configuration
0190-20736: Lamp reflector assembly, compatible with FL2006 300mm chamber
0190-35672: Lamp trigger board, FL Series compatible, controls pulse initiation voltage
0190-40112: Water-cooling manifold seal kit, FL2004/FL2006 chamber
0190-22481: Lamp socket assembly, FL Series, quartz-to-metal interface
0190-17894: Power supply module, FL Series lamp driver, 200mm platform
0190-28563: Power supply module, FL Series lamp driver, 300mm platform
0190-11047: Quartz window assembly, RTP chamber, UV-grade fused silica
0190-33901: Lamp end-of-life sensor kit, FL Series, optical feedback module
0190-15228: Chamber liner, RTP, compatible with FL2004 and FL2006 lamp arrays
0190-44780: Lamp array harness, FL2006, 300mm Centura RTP
0190-09871: Pyrometer calibration target, FL Series RTP chamber
0190-26340: Gas distribution plate, RTP chamber, FL Series compatible

Sourcing Hard-to-Find & Obsolete FL Series Parts

The FL2004 has been formally discontinued by Applied Materials and is no longer available through standard OEM channels. The FL2006 remains in limited production but lead times from the OEM exceed 16–24 weeks for non-contract customers. DriveKNMS maintains a dedicated inventory of both FL2004 and FL2006 lamps sourced from decommissioned equipment, certified refurbishment programs, and authorized distributor excess stock.

For fabs operating legacy 200mm lines with no planned migration, FL2004 lifecycle extension is a primary procurement concern. DriveKNMS provides: verified new-old-stock (NOS) FL2004 units with full traceability documentation; tested-functional FL2006 assemblies with burn-in data; cross-reference matching for all known P/N variants (1006146, 0190-17311, 1007454, 0190-29887, 700009835); and emergency same-week dispatch for critical tool-down situations.

All shipments include a certificate of conformance (CoC) and, where applicable, original OEM packaging with intact date codes.

Quality Control for the FL Series Range

Flash lamps present specific inspection challenges due to their consumable nature and sensitivity to handling-induced micro-fractures in the quartz envelope. DriveKNMS applies the following test protocol to all FL Series units prior to dispatch:

Visual inspection: 10x magnification examination of quartz envelope for crazing, devitrification, or electrode erosion beyond OEM wear limits. Dimensional verification: Arc length, outer diameter, and electrode gap measured against OEM engineering drawings for FL2004 and FL2006 geometries. Electrical continuity: Electrode resistance and trigger electrode integrity verified using calibrated LCR meter. Pulse test: Where test fixtures are available, lamps are subjected to a controlled low-energy pulse sequence to confirm ignition reliability and spectral output consistency. Packaging: Each lamp is individually wrapped in anti-static foam and shipped in a rigid outer carton with shock indicators to prevent transit damage to the quartz envelope.