CYBOR 25823 Series Pumps 25823-18, 25823-T4-18, 5026-00 B1

Technical Dossier

Product Details And Specifications

CYBOR 25823 Series: Comprehensive Pump Range and Technical Overview

The Evolution of CYBOR 25823 Series Architecture

The CYBOR 25823 platform was developed to address the precision dispensing requirements of sub-micron photolithography processes. Early variants in the series utilized single-diaphragm actuation with mechanical pressure regulation, suitable for i-line and early KrF resist chemistries. As process nodes advanced, CYBOR introduced the T4 sub-series (e.g., 25823-T4-18), incorporating a four-diaphragm tandem architecture that delivers significantly reduced pressure ripple — a critical parameter for defect-sensitive ArF and EUV resist coat steps.

CYBOR 25823 Series Full Catalog & Functionalities (SKU List)

The following SKUs represent the documented range of the CYBOR 25823 platform. Models are classified by pump architecture and assembly type:

Single-Diaphragm Pump Bodies

• 25823-18: Single-diaphragm photoresist pump, 18mm stroke, PTFE wetted path, standard pneumatic actuation
• 25823-12: Single-diaphragm pump, 12mm stroke, reduced dead volume, for low-volume dispense steps
• 25823-24: Single-diaphragm pump, 24mm stroke, high-volume resist coat applications
• 25823-06: Compact single-diaphragm unit, 6mm stroke, developer and rinse chemical service
• 25823-30: Extended-stroke single-diaphragm pump for high-viscosity resist formulations

T4 Tandem Four-Diaphragm Sub-Series

• 25823-T4-18: Four-diaphragm tandem pump, 18mm stroke, ultra-low pulsation, ArF/EUV resist service
• 25823-T4-12: Four-diaphragm tandem, 12mm stroke, precision low-volume dispense, KrF and ArF tracks
• 25823-T4-24: Four-diaphragm tandem, 24mm stroke, high-throughput coat modules
• 25823-T4-06: Four-diaphragm tandem, 6mm stroke, developer chemical service with pulsation control

Integrated Assembly & Module Configurations

• 5026-00 B1: Pump body and valve block integrated assembly, B1 revision, for OEM dispense module integration
• 5026-00 B2: Revised B2 assembly with updated inlet check valve geometry for improved priming
• 5026-01: Extended manifold assembly, dual-outlet configuration for split-dispense track layouts
• 5026-02: Compact manifold assembly, single-outlet, for space-constrained dispense arm positions

Replacement & Rebuild Components

• 25823-DK-18: Diaphragm rebuild kit for 25823-18 and 25823-T4-18, includes PTFE diaphragm, O-rings, and check valve seats
• 25823-DK-12: Diaphragm rebuild kit for 25823-12 and 25823-T4-12 variants
• 25823-CV-SET: Check valve ball and seat set, compatible across all 25823 single and T4 pump bodies
• 25823-BODY-PFA: PFA pump body replacement for applications requiring higher chemical purity than standard PTFE

Quality Control for the CYBOR 25823 Series Range

The 25823 Series presents specific quality verification requirements due to its diaphragm-based fluid path and precision valve geometry. DriveKNMS applies the following test protocol to all 25823 units prior to shipment:

• Diaphragm integrity test: Pneumatic pressure hold at rated actuation pressure; diaphragm inspected for micro-cracking, delamination, and PTFE fatigue
• Check valve seat leak test: Inlet and outlet check valves tested for back-flow under static pressure; acceptance criterion is zero measurable leak at rated differential pressure
• Stroke volume verification: Pump cycled at rated frequency; dispense volume per stroke measured against OEM specification tolerance (typically ±2%)
• Wetted surface inspection: Internal PTFE/PFA surfaces inspected for chemical staining, particulate contamination, and surface degradation
• Pneumatic actuation test: Solenoid and pneumatic control interface verified for correct open/close timing and absence of internal leakage
• T4 tandem synchronization check (T4 sub-series only): Four-diaphragm phase timing verified to confirm pulsation cancellation performance meets specification