JUSUNG 15KLD02Z Chamber Unit Modules: 30895004 P30895004 4022.437.11211

Technical Dossier

Product Details And Specifications

JUSUNG Engineering 15KLD02Z Series: Comprehensive Chamber Unit Module Range and Technical Overview

The JUSUNG Engineering 15KLD02Z Chamber Unit is a precision process module deployed in atomic layer deposition (ALD) and chemical vapor deposition (CVD) semiconductor fabrication equipment. JUSUNG Engineering, headquartered in Gwangmyeong, South Korea, is a Tier-1 OEM supplying process chambers and related sub-assemblies to leading wafer fabs across East Asia, Southeast Asia, and Europe. The 15KLD02Z chamber unit and its associated part numbers — 30895004, P30895004, and 4022.437.11211 — represent a critical mechanical and process interface component within JUSUNG's cluster tool architecture.

These modules are installed in high-volume production environments including DRAM fabs, NAND flash facilities, and logic foundries. Their role in maintaining process gas isolation, substrate temperature uniformity, and vacuum integrity makes them a long-lifecycle spare part with sustained global demand well beyond the original equipment warranty period.

The Evolution of 15KLD02Z Chamber Unit Architecture

JUSUNG's chamber unit design has evolved across multiple equipment generations. Early-generation JUSUNG ALD systems (circa 2005–2012) used single-wafer chamber configurations with discrete mechanical sealing assemblies. The 15KLD02Z series reflects a mid-to-late generation design incorporating integrated gas distribution, improved thermal management interfaces, and standardized bolt patterns compatible with JUSUNG's Eureka and Covanta platform cluster tools.

Cross-generation compatibility is a known engineering constraint: the 15KLD02Z is dimensionally and functionally specific to its designated platform generation. Substitution with earlier or later chamber unit revisions requires engineering validation. DriveKNMS maintains cross-reference records for superseded and successor part numbers to support accurate sourcing decisions.

As JUSUNG has transitioned portions of its product line to next-generation ALD platforms, the 15KLD02Z and its associated assemblies have entered a mature/end-of-active-production phase. Long-term maintenance support — including refurbished, tested-used, and new-old-stock (NOS) units — is the primary supply channel for this part family.

15KLD02Z Full Catalog & Functionalities (SKU List)

The following SKUs represent the documented part number ecosystem associated with JUSUNG chamber unit assemblies, process module sub-components, and related spare parts within the same equipment generation. Each entry reflects a distinct functional role within the chamber or cluster tool architecture.

30895004 / P30895004 / 4022.437.11211 / 15KLD02Z: Primary chamber unit assembly; process isolation and substrate interface module.
30895001: Chamber lid assembly; upper process enclosure for single-wafer ALD chamber.
30895002: Chamber body lower section; base flange and pumping port interface.
30895003: Chamber liner insert; replaceable process-wetted surface component.
30895005: Heater block assembly; substrate pedestal with embedded resistive heating element.
30895006: Lift pin mechanism assembly; wafer transfer interface within chamber unit.
30895007: Gas inlet manifold; showerhead or injector interface for precursor delivery.
30895008: Purge gas distribution ring; inert gas curtain assembly for chamber isolation.
30895009: Chamber O-ring seal kit; elastomer sealing set for lid and body interface.
30895010: Thermocouple feedthrough assembly; temperature sensing interface for process control.
30895011: RF electrode assembly (where applicable); plasma-enhanced ALD process interface.
30895012: Exhaust baffle plate; flow uniformity component in pumping path.
30895013: Chamber cooling block; water-cooled thermal management interface for chamber wall.
30895014: Valve seat assembly; isolation valve interface between chamber and transfer module.
30895015: Pressure sensor port adapter; MKS or equivalent gauge mounting interface.
30895016: Chamber window assembly; optical access port for endpoint or pyrometry.
30895017: Substrate clamp ring; mechanical wafer retention for high-temperature process steps.

Sourcing Hard-to-Find & Obsolete 15KLD02Z Parts

DriveKNMS operates as a specialist distributor for semiconductor equipment spare parts with a focus on JUSUNG Engineering modules that are no longer available through standard OEM channels. For the 15KLD02Z chamber unit and associated assemblies, DriveKNMS maintains inventory sourced from:

• Decommissioned fab equipment buyouts (tested-used, fully documented)
• Authorized surplus from equipment integrators and EPC contractors
• New-old-stock (NOS) from regional JUSUNG service depots
• Refurbished units with full dimensional and functional restoration

All sourced units are cross-referenced against JUSUNG's internal part number revision history. Where a direct replacement is unavailable, DriveKNMS provides engineering-validated alternative part numbers and compatibility notes at no additional charge.

Quality Control for the 15KLD02Z Range

Chamber unit modules present specific inspection requirements due to their process-wetted surfaces, precision-machined sealing faces, and thermal cycling history. DriveKNMS applies the following inspection protocol to all 15KLD02Z units prior to shipment:

• Dimensional verification: Critical sealing surfaces, bolt circle patterns, and flange flatness measured against OEM drawings.
• Surface condition assessment: Visual and tactile inspection of all process-wetted surfaces for deposition buildup, corrosion, or mechanical damage.
• Seal groove inspection: O-ring grooves checked for wear, scoring, and dimensional conformance.
• Leak integrity test: Helium leak check or pressure decay test on all sealed interfaces where applicable.
• Thermal interface check: Heater block and thermocouple feedthrough continuity and insulation resistance verified.
• Cleanliness protocol: Ultrasonic cleaning and cleanroom-compatible packaging for all units destined for active fab environments.