Kollmorgen ServoDisc Motors 00-S0613-038 / ASML SVG 859-0399-002

Technical Dossier

Product Details And Specifications

Kollmorgen ServoDisc Series Technical Notes

The Kollmorgen ServoDisc series is a family of permanent-magnet DC servo motors engineered for high-precision, high-dynamic-response motion control applications. Characterized by a disc-shaped (pancake) rotor with zero iron in the armature, the ServoDisc design eliminates cogging torque and delivers exceptionally low rotor inertia — properties that made it the preferred drive element in semiconductor lithography equipment, precision positioning stages, and medical imaging systems. The ASML/SVG cross-reference 859-0399-002 confirms deployment in wafer-handling and reticle-stage subsystems within photolithography platforms, where micron-level repeatability is a hard requirement. Across chemical processing, nuclear instrumentation, and precision manufacturing, ServoDisc motors remain embedded in legacy motion architectures that cannot be easily re-engineered, making long-term spare parts availability a critical operational concern.

ServoDisc Full Catalog & Functionalities (SKU List)

The following SKUs represent confirmed members of the Kollmorgen ServoDisc product family, organized by frame size and application class. Each entry reflects a distinct winding, shaft, or feedback configuration.

00-S0613-038: OEM disc motor, ASML/SVG 859-0399-002 cross-ref, precision stage drive
U9M4H: 4 in. frame, high-voltage winding, general-purpose servo axis
U12M4H: 4.7 in. frame, medium inertia, velocity-loop servo
U16M4H: 6.3 in. frame, extended torque range, machine tool feed axis
U9M4: 4 in. frame, standard winding, analog tachometer output
U12M4: 4.7 in. frame, standard winding, analog tachometer output
U16M4: 6.3 in. frame, standard winding, analog tachometer output
E-09-1: Early-series 3.5 in. disc motor, brush-type commutation, low inertia
E-12-1: 4.7 in. early-series, medium torque, brush commutation
M-09-3: M-series 3.5 in. frame, encoder-ready, digital drive compatible
M-12-3: M-series 4.7 in. frame, encoder-ready, digital drive compatible
M-16-3: M-series 6.3 in. frame, high torque, encoder-ready
U9M8H: 4 in. frame, high-voltage 8-pole winding, reduced ripple
U12M8H: 4.7 in. frame, 8-pole high-voltage, precision positioning
U16M8H: 6.3 in. frame, 8-pole high-voltage, heavy-duty servo axis
00-S0512-024: OEM variant, semiconductor equipment application, custom shaft
00-S0714-052: OEM variant, larger frame, extended continuous torque rating