LAM RESEARCH HC-SFS202 Node Rocker Valve Modules: 50020R-10 / 810-002895-232 / 0041-81423 / C2088

Technical Dossier

Product Details And Specifications

LAM RESEARCH HC-SFS202 Series: Comprehensive Module Range and Technical Overview

The LAM RESEARCH HC-SFS202 Node Rocker Valve is a precision pneumatic control component deployed across LAM Research etch and CVD (Chemical Vapor Deposition) process chambers. LAM Research Corporation, headquartered in Fremont, California, USA, is a Tier-1 OEM supplier to global semiconductor fabs including TSMC, Samsung, SK Hynix, and Micron. The HC-SFS202 series rocker valve assemblies are integral to gas delivery and process isolation subsystems within LAM Kiyo, Flex, and Versys platform tools. These valves regulate ultra-high-purity (UHP) gas flow paths in environments requiring sub-atmospheric pressure control, corrosion resistance to halogen-based chemistries (Cl₂, HBr, NF₃), and cycle lifetimes exceeding 10 million actuations. Their deployment spans 200mm and 300mm wafer process tools across chemical etch, plasma strip, and ALD (Atomic Layer Deposition) modules in fabs operating 24/7 across Asia, North America, and Europe.

The Evolution of HC-SFS202 Architecture

LAM Research's node rocker valve architecture has evolved through multiple platform generations. Early-generation valves deployed on the TCP (Transformer Coupled Plasma) and Rainbow etch platforms used single-solenoid actuation with manual position feedback. The transition to the Kiyo and Flex platforms introduced dual-solenoid redundancy, integrated position sensors, and PTFE-lined flow bodies compatible with aggressive halogen chemistries. The HC-SFS202 designation reflects the current-generation SFS (Solenoid-actuated Flow Switch) architecture, incorporating a rocker mechanism that provides positive shutoff with low dead volume — a critical parameter in ALD and ALE (Atomic Layer Etch) applications where gas pulse sequencing must be controlled to millisecond precision. Compatibility across platform generations requires attention to port sizing (VCR vs. Swagelok), solenoid voltage (24VDC vs. 110VAC), and connector pinout (M12 vs. Molex). Obsolete early-generation equivalents include the 0041-81423 and C2088 assemblies, which share the same rocker body but differ in solenoid coil specification and body material (anodized aluminum vs. PVDF).

HC-SFS202 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified LAM RESEARCH part numbers associated with the HC-SFS202 Node Rocker Valve series and its direct cross-reference equivalents. Parts are classified by functional role within the gas delivery and process isolation subsystem:

Node Rocker Valve Assemblies (Primary)

• 50020R-10: HC-SFS202 node rocker valve, primary assembly, 24VDC solenoid, VCR fittings
• 810-002895-232: LAM OEM assembly number, HC-SFS202 body with integrated position sensor, 300mm platform
• 0041-81423: Legacy rocker valve assembly, anodized aluminum body, Swagelok fittings, Kiyo etch platform
• C2088: Rocker valve sub-assembly, PVDF body, halogen-service rated, Rainbow/TCP platform
• HC-SFS202: Base model designation, dual-solenoid rocker valve, M12 connector, 24VDC
• 810-002895-001: HC-SFS202 variant, no position sensor, manual reset, 200mm platform
• 810-002895-100: HC-SFS202 with stainless steel body, high-temperature service, CVD module
• 810-002895-200: HC-SFS202 assembly, 110VAC solenoid variant, legacy fab infrastructure
• 0041-81420: Rocker valve body only (no solenoid), field-rebuild service part
• 0041-81421: Solenoid coil assembly, 24VDC, replacement for HC-SFS202 series
• 0041-81422: Position sensor module, integrated feedback, HC-SFS202 compatible
• 0041-81424: Rocker valve seal kit, PTFE/Kalrez, HC-SFS202 and C2088 compatible
• 50020R-11: HC-SFS202 revised assembly, updated solenoid coil, drop-in replacement for 50020R-10
• 50020R-12: HC-SFS202 high-cycle variant, 15M actuation rated, ALD platform service
• 810-002895-300: HC-SFS202 assembly, extended-body configuration, Flex G platform
• 810-002895-400: HC-SFS202 with dual position feedback, safety-rated SIL-2 configuration
• C2088-R: Remanufactured C2088 rocker valve, tested to OEM specification, 200mm etch tools

Sourcing Hard-to-Find & Obsolete HC-SFS202 Parts

The C2088 and 0041-81423 assemblies are confirmed end-of-life (EOL) with LAM Research's OEM supply chain. The 50020R-10 and 810-002895-232 remain in active production but are subject to lead times of 16–26 weeks through standard distribution channels due to semiconductor supply chain constraints. DriveKNMS maintains an independent inventory of both active and obsolete HC-SFS202 series components sourced through certified secondary market channels. All parts are stored in ESD-safe, climate-controlled facilities. For fabs operating legacy TCP, Rainbow, or first-generation Kiyo tools, DriveKNMS provides lifecycle extension support including cross-reference validation, solenoid re-coiling, and body reconditioning services. Customers requiring long-term maintenance agreements (LTMAs) for HC-SFS202 series valves across multi-tool fleets are supported with consignment stocking programs and priority allocation.

Quality Control for the HC-SFS202 Range

Each HC-SFS202 series rocker valve processed by DriveKNMS undergoes a structured inspection and functional test protocol specific to the solenoid-actuated rocker mechanism and UHP gas service requirements. Incoming inspection covers body integrity (no porosity, no corrosion pitting), solenoid coil resistance measurement (±5% of OEM specification), and seal condition assessment (PTFE seats and Kalrez O-rings). Functional testing includes pneumatic leak-down at 150% of rated working pressure (helium leak test to 1×10⁻⁹ atm·cc/s), solenoid actuation cycle test (minimum 500 cycles), and position sensor output verification (4–20mA or discrete NPN/PNP per part variant). Parts that have been remanufactured or rebuilt are re-tested to the same protocol and shipped with a DriveKNMS Certificate of Conformance (CoC) and full test data sheet.