LAM RESEARCH 50020R Series Modules: 50020R-10 810-013872-108 48-8-16 PS/AUX 00-88060-004 281-500463-9 208-500463-2 NODE TYPE –

Technical Dossier

Product Details And Specifications

LAM RESEARCH 50020R Series: Comprehensive Module Range and Technical Overview

The LAM RESEARCH 50020R series represents a family of power supply and node-type interface modules deployed across LAM Research etch and deposition platforms, including the Versys, Kiyo, and Flex product lines. These modules are embedded in process chambers and equipment controllers at semiconductor fabs, flat-panel display manufacturers, and advanced packaging facilities worldwide. The 50020R architecture provides regulated auxiliary power distribution and node-level communication between the equipment controller and chamber subsystems. Due to the long operational lifecycles of semiconductor capital equipment—often 10 to 20 years—the 50020R series remains in active demand for maintenance, retrofit, and emergency replacement across installed bases in Asia, North America, and Europe.

The specific unit covered by this listing—50020R-10 810-013872-108 48-8-16 PS/AUX 00-88060-004 281-500463-9 208-500463-2—is a node-type power supply auxiliary module. It carries multiple cross-reference part numbers (810-013872-108, 00-88060-004, 281-500463-9, 208-500463-2), reflecting LAM Research's internal revision and assembly tracking system. The 48-8-16 designation indicates the module's I/O or power rail configuration within the node architecture.

The Evolution of 50020R Architecture

LAM Research's node-type module architecture evolved alongside the transition from proprietary VME-based equipment controllers to distributed I/O and embedded PC-based control platforms. Early 50020R variants were designed for the Rainbow and TCP etch systems of the 1990s, where centralized power distribution was managed through backplane-mounted auxiliary boards. As LAM migrated to the Versys and Kiyo platforms in the 2000s, the 50020R family was adapted to support higher-density I/O configurations and improved EMI shielding requirements for RF-intensive etch environments.

The multi-part-number convention (e.g., 810-013872-108 alongside 281-500463-9 and 208-500463-2) reflects LAM's practice of assigning assembly-level, sub-assembly-level, and revision-level identifiers to the same physical module. Compatibility between revisions is not always guaranteed; engineers sourcing replacement units must verify the full part number string against the equipment's bill of materials (BOM) or field service documentation. The 50020R series is now considered mature-to-end-of-life by LAM Research, meaning OEM new-build availability is limited and aftermarket sourcing is the primary procurement channel for most fabs.

50020R Full Catalog & Functionalities (SKU List)

The following SKUs represent documented modules within the LAM RESEARCH 50020R and closely associated node/power supply families. Each entry reflects a distinct assembly or revision with a defined functional role within LAM etch and CVD equipment platforms.

50020R-10 810-013872-108 48-8-16 PS/AUX 00-88060-004 281-500463-9 208-500463-2: Node-type auxiliary power supply module; multi-reference assembly for Versys/Kiyo platforms.
50020R-10: Base revision of the 50020R node power supply; auxiliary rail distribution for chamber subsystems.
810-013872-108: LAM assembly-level part number for the 50020R-10 PS/AUX node board.
810-013872-100: Earlier revision of the 810-013872 assembly; used in prior-generation etch tool configurations.
810-013872-101: Intermediate revision; incorporates updated capacitor specification for improved thermal stability.
00-88060-004: Sub-assembly cross-reference for the 50020R-10 node module; tracks PCB-level revision.
00-88060-001: Original sub-assembly revision; found in early Versys Metal and Versys Oxide installations.
281-500463-9: Component-level part number assigned to the 50020R-10 auxiliary power node assembly.
281-500463-1: First-generation component reference for the 500463 power node family.
208-500463-2: Secondary cross-reference number; used in LAM field service and spare parts ordering systems.
208-500463-1: Predecessor cross-reference; associated with earlier 48-rail node configurations.
50020R-20: Extended I/O variant of the 50020R node family; supports higher channel-count configurations.
50020R-30: High-density node module; designed for multi-chamber cluster tool architectures.
50020R-40: Revised power architecture variant; incorporates updated DC-DC conversion topology.
50020R-50: Final production revision of the 50020R series; enhanced EMI filtering for RF etch environments.
810-049266-101: Related LAM node power board; functionally equivalent in select Kiyo platform configurations.
810-049266-102: Revised version of the 810-049266 node assembly; updated for Flex series compatibility.

Sourcing Hard-to-Find & Obsolete 50020R Parts

The 50020R series has entered end-of-life status with LAM Research's OEM spare parts program. New-build units are no longer manufactured, and OEM inventory is depleted at most authorized distributors. DriveKNMS maintains a dedicated inventory of tested 50020R modules sourced through controlled decommissioning of retired semiconductor equipment, direct acquisition from fab excess inventory programs, and established broker networks specializing in LAM Research capital equipment spares.

For customers operating equipment beyond the OEM support window, DriveKNMS provides lifecycle extension services including: verified functional testing against LAM Research equipment specifications, cross-reference validation across all known part number variants (810-series, 00-series, 281-series, 208-series), and documentation of test results for fab qualification records. Emergency same-day quotation is available for critical tool-down situations. Long-term consignment and buffer stock programs are available for high-volume fabs with recurring 50020R demand.

Quality Control for the 50020R Range

The 50020R PS/AUX node module requires specialized test procedures due to its role in distributing regulated auxiliary power across the equipment node bus. DriveKNMS applies the following verification protocol to all 50020R units prior to shipment:

Visual and mechanical inspection: PCB examined for capacitor bulge, solder joint fatigue, connector pin damage, and conformal coating integrity. All multi-part-number labels verified against the unit's physical markings.
Power rail verification: All DC output rails (as specified by the 48-8-16 configuration) measured under load conditions using calibrated bench power supplies and electronic loads.
Node communication bus test: Where applicable, the module's communication interface is exercised using LAM-compatible test fixtures to verify signal integrity on the node bus.
Thermal cycling: Units subjected to controlled thermal cycling to identify latent failures in solder joints and passive components common in aged semiconductor equipment modules.
Burn-in: Extended powered operation under nominal load conditions to screen for early-life failures before shipment.
Final documentation: Each unit ships with a test report recording measured parameters, inspector ID, and test date for fab incoming quality control records.

© 2026 DriveKNMS. All trademarks belong to their respective owners. Specifications are for reference only and subject to change without notice. Verify all parameters against official documentation before installation.