Lam Research 810-017034-005 CPU VME Processor Module

Technical Dossier

Product Details And Specifications

Lam Research 810 Series Technical Notes

The Lam Research 810 Series represents a foundational VME-bus-based control architecture deployed across high-throughput semiconductor fabrication equipment, including plasma etch systems, CVD chambers, and wafer-handling platforms. These modules are embedded in capital equipment with operational lifespans exceeding 15–20 years, making spare parts availability a critical factor for fabs running 24/7 production schedules. The 810 Series is documented in active use across 200mm and 300mm wafer processing lines in chemical vapor deposition (CVD), physical vapor deposition (PVD), and dry etch tool sets operated by Tier-1 semiconductor manufacturers in the US, Taiwan, South Korea, and Japan. The VME (Versa Module Europa) backplane architecture used in this series provides deterministic real-time control, high-speed data throughput, and modular slot-based expansion — characteristics that made it the standard for process control in the 1990s through the 2010s and that continue to justify its retention in legacy tool fleets today.

810 Series Full Catalog & Functionalities (SKU List)

The following SKUs represent verified components within the Lam Research 810 Series VME control platform, organized by functional category:

CPU / Processor Modules

• 810-017034-005: VME CPU processor module; primary system controller for 810-series tool platforms
• 810-017034-001: VME CPU module, early revision; Motorola 68040-based real-time processor
• 810-017034-003: VME CPU module, mid-revision; expanded SRAM, compatible with LCS firmware v3.x
• 810-049498-001: VME single-board computer; PowerPC architecture, used in upgraded 810 control chassis

Digital I/O Modules

• 810-049234-001: 32-channel digital input module; 24VDC logic, VME interface, optically isolated
• 810-049234-002: 32-channel digital output module; solid-state relay outputs, 24VDC, VME bus
• 810-049235-001: 16-channel digital I/O combination module; configurable input/output per channel pair
• 810-049236-001: High-density DI module; 64-channel, used in multi-zone chamber configurations

Analog I/O Modules

• 810-049240-001: 16-channel analog input module; 12-bit ADC, ±10V / 4–20mA selectable range
• 810-049240-002: 8-channel analog output module; 12-bit DAC, 0–10V output, used for MFC control signals
• 810-049241-001: Analog I/O combination module; 8AI + 4AO, VME-64 compatible

Communication & Network Adapter Modules

• 810-049250-001: SECS/GEM communication adapter; RS-232/RS-422 interface, SEMI E5 compliant
• 810-049251-001: Ethernet communication module; 10BASE-T, used for host-to-tool data transfer
• 810-049252-001: Serial multi-port adapter; 4-port RS-232, used for peripheral device communication

Power Supply & Backplane Modules

• 810-049260-001: VME backplane power distribution module; +5V / ±12V regulated outputs
• 810-049261-001: Redundant power supply module; hot-swap capable, used in high-availability chassis configurations
• 810-049262-001: VME 9-slot backplane assembly; passive bus, compatible with all 810-series plug-in modules

Quality Control for the 810 Series Range

The 810 Series VME modules present specific test challenges due to their proprietary backplane bus protocol and firmware-dependent initialization sequences. DriveKNMS employs a structured test protocol for all 810 Series units: