Lam Research SI 716 Gate Valve Assembly Modules: SI 716-082039-245 / SI 716-082039-238 / SI 716-082039-262

Technical Dossier

Product Details And Specifications

Lam Research SI 716 Series: Comprehensive Module Range and Technical Overview

The Lam Research SI 716 series Gate Valve Assemblies are precision vacuum isolation components deployed across semiconductor fabrication equipment globally. These assemblies are integral to etch, CVD, and PVD process chambers in high-volume manufacturing environments including 200mm and 300mm wafer fabs. The SI 716 platform is installed in critical process tools at facilities operated by leading IDMs and foundries across the United States, Taiwan, South Korea, Japan, and China. Their role in chamber isolation directly impacts process yield, contamination control, and equipment uptime — making reliable spare parts sourcing a tier-1 maintenance priority.

The Evolution of SI 716 Architecture

The SI 716 gate valve architecture was developed by Lam Research to meet the stringent vacuum integrity requirements of plasma etch and deposition chambers. Early-generation SI 716 assemblies used pneumatic actuation with manual override, designed for integration into Lam's Rainbow and TCP etch platforms. As process nodes scaled below 90nm, the SI 716 series was revised to accommodate higher cycle counts, improved seal materials (FFKM elastomers replacing standard Viton), and tighter dimensional tolerances for 300mm chamber compatibility.

The series spans multiple sub-variants differentiated by gate geometry, actuator stroke length, and flange interface standard (ISO-K, ISO-F, and CF-flanged configurations). Later revisions introduced anodized aluminum body construction to reduce particle generation and improve chemical resistance against halogen-based process gases (Cl₂, HBr, NF₃). The SI 716 series is now in a mature/end-of-life phase for several sub-variants; Lam Research has transitioned newer platforms to updated valve architectures. However, the installed base remains substantial, and lifecycle extension support is the primary sourcing driver for this series.

SI 716 Full Catalog & Functionalities (SKU List)

The following SKUs represent the documented SI 716 series range. Each entry reflects a distinct configuration within the gate valve assembly family:

SI 716-082039-245: Outer gate valve assy, primary chamber isolation, standard stroke
SI 716-082039-238: Outer gate valve assy, alternate seal configuration, reduced-profile variant
SI 716-082039-262: Outer gate valve assy, extended-cycle rated, high-frequency process use
SI 716-082039-201: Gate valve body sub-assembly, ISO-K flange, aluminum body
SI 716-082039-210: Pneumatic actuator assembly, double-acting, 80mm bore
SI 716-082039-215: Gate valve seal kit, FFKM elastomer, full replacement set
SI 716-082039-220: Gate plate sub-assembly, 200mm aperture, anodized finish
SI 716-082039-225: Actuator rod assembly, stainless steel, corrosion-resistant grade
SI 716-082039-230: Position sensor bracket assembly, proximity switch compatible
SI 716-082039-233: Gate valve bonnet sub-assembly, upper chamber interface
SI 716-082039-240: Valve body O-ring kit, process-side seals, Viton grade
SI 716-082039-250: Gate valve assy, CF-flange variant, UHV-compatible configuration
SI 716-082039-255: Actuator cylinder assembly, single-acting, spring-return type
SI 716-082039-260: Gate valve assy, ISO-F flange, 300mm chamber interface
SI 716-082039-270: Solenoid valve sub-assembly, 24VDC, pneumatic control interface
SI 716-082039-275: Gate valve assy, manual override variant, maintenance access configuration
SI 716-082039-280: Valve stem seal assembly, dynamic seal, high-cycle rated

Sourcing Hard-to-Find & Obsolete SI 716 Parts

Multiple sub-variants within the SI 716 series have been discontinued by Lam Research as the platform reaches end-of-life status. OEM lead times for remaining active part numbers frequently exceed 16–26 weeks due to low-volume production scheduling. DriveKNMS maintains a dedicated inventory of SI 716 assemblies and sub-components sourced from decommissioned tools, certified refurbishment programs, and authorized distribution channels.

For obsolete SI 716 configurations, DriveKNMS provides: functional testing against OEM performance specifications, full traceability documentation, and cross-reference matching to identify compatible replacement assemblies where direct replacements are unavailable. Customers operating legacy Lam Research etch tools with SI 716 gate valves can submit their BOM requirements directly for availability confirmation and lead time quotation.

Quality Control for the SI 716 Range

SI 716 gate valve assemblies undergo a structured inspection and functional test protocol prior to shipment. Each unit is subject to: visual inspection of gate plate, body, and actuator surfaces for wear, corrosion, or particle contamination; dimensional verification of flange interfaces and gate aperture geometry; pneumatic actuation cycle testing at rated operating pressure (typically 60–80 PSI); leak-down testing of process-side seals using helium mass spectrometry or pressure decay methods to verify vacuum integrity; and position sensor functionality verification where applicable. Refurbished assemblies are disassembled to sub-component level, cleaned to semiconductor-grade standards, resealed with new elastomer kits, and reassembled to OEM torque specifications before final test.