Lam Research VME-7671 Modules: VME-7671-421000 605-048878-001 3VCCPU AHCT 210000520 210000422 9800032722 W/ ENCODER RH-11D-3001-E100AL-SP(N) CPU Board –

Technical Dossier

Product Details And Specifications

Lam Research VME-7671 Series: Comprehensive Module Range and Technical Overview

The Lam Research VME-7671 series represents a core compute and control platform deployed across semiconductor fabrication equipment, including etch, CVD, and plasma processing systems. These VMEbus-based CPU boards are embedded in Lam Research's Transformer Coupled Toroidal (TCP) and Kiyo etch platforms, as well as legacy 4500 and 9600 series process chambers. The VME-7671 architecture is found in facilities operating under ISO Class 1–5 cleanroom standards globally, including fabs in Taiwan, South Korea, Japan, the United States, and China. Its role as the primary process controller makes it a critical spare part for any facility running Lam Research equipment beyond the original support window.

The Evolution of VME-7671 Architecture

The VME-7671 line is built on the VMEbus (IEEE 1014) standard, a backplane architecture widely adopted in industrial and defense computing from the mid-1980s onward. Lam Research integrated VMEbus controllers into its process equipment beginning in the early 1990s, replacing proprietary bus architectures with a standardized, modular platform that allowed third-party peripheral integration.

Early VME-7671 variants operated with 3V and 5V mixed-rail power (hence the 3VCCPU designation on later boards), supporting Motorola 68k and early PowerPC processor families. The AHCT (Advanced High-speed CMOS Technology) logic family used on these boards provided improved noise immunity and drive strength over earlier HCMOS implementations, a requirement for the electrically noisy RF plasma environment inside etch chambers.

By the mid-2000s, Lam Research transitioned newer platforms toward proprietary embedded controllers and later x86-based architectures, rendering the VME-7671 series a mature/end-of-life product line. However, installed base volume across legacy fabs remains substantial. Many facilities operating 4500, 9600, and TCP etch systems continue to require VME-7671 boards for corrective maintenance, as platform upgrades are cost-prohibitive or operationally disruptive. Compatibility between sub-variants (e.g., 210000520 vs. 210000422 board revisions) must be verified against the specific chamber controller firmware version before substitution.

VME-7671 Full Catalog & Functionalities (SKU List)

CPU / Controller Boards

• VME-7671-421000: Primary VMEbus CPU board, 3VCCPU rail, AHCT logic, process controller core
• 605-048878-001: Lam Research assembly P/N for VME-7671-421000 CPU board, rev 001
• 210000520: Board-level sub-assembly identifier, CPU board variant A
• 210000422: Board-level sub-assembly identifier, CPU board variant B
• 9800032722: Lam Research internal component tracking number for VME-7671 CPU assembly
• VME-7671-411000: Earlier CPU board revision, 5V-only rail, pre-AHCT logic family
• VME-7671-431000: Extended temperature range CPU variant for high-ambient chamber environments

Encoder / Motion Interface Modules

• RH-11D-3001-E100AL-SP(N): Rotary encoder interface module, paired with VME-7671 CPU for position feedback in wafer handling
• RH-11D-3001-E100AL-SP: Standard (non-N suffix) encoder variant, earlier production run
• 605-049100-001: Encoder cable assembly, VME-7671 to RH-11D interface

I/O and Peripheral Boards (VMEbus, compatible with VME-7671 chassis)

• VME-7650: Digital I/O board, 32-channel, TTL-compatible, used alongside VME-7671 in 4500 series controllers
• VME-7660: Analog I/O board, 16-channel 12-bit ADC/DAC, process parameter monitoring
• VME-7680: Serial communications board, RS-232/RS-422, host interface for chamber recipe management
• VME-7690: GPIB interface board, instrument bus connectivity for legacy metrology integration
• 605-047200-001: VMEbus backplane assembly, 6-slot, compatible with VME-7671 CPU
• 605-047201-001: VMEbus backplane assembly, 9-slot extended configuration
• 210000388: Power supply board assembly, 3.3V/5V dual-rail, VME-7671 chassis
• 210000401: Replacement NVRAM module for VME-7671, retains process recipe data during power loss

Sourcing Hard-to-Find & Obsolete VME-7671 Parts

The VME-7671 series has been out of standard Lam Research production support for over a decade. OEM replacement boards are no longer available through standard distribution channels. DriveKNMS maintains a dedicated inventory of tested VME-7671 CPU boards, encoder modules, and associated VMEbus peripherals sourced from decommissioned equipment, controlled factory overstock, and verified third-party refurbishment pipelines.

For facilities operating under extended equipment lifecycle programs (EELP) or running fabs beyond the original 10-year equipment amortization window, DriveKNMS provides:

• Board-level exchange programs with advance replacement to minimize chamber downtime
• Revision-matched sourcing — sub-assembly numbers (210000520, 210000422) are cross-referenced against chamber serial numbers before shipment
• Long-term consignment stocking agreements for high-volume fabs with recurring VME-7671 demand
• Documentation support: datasheet retrieval, firmware version compatibility matrices, and installation reference guides

Quality Control for the VME-7671 Range

VME-7671 CPU boards undergo a structured multi-stage inspection and functional test protocol at DriveKNMS before any unit is released for shipment:

• Visual inspection: PCB layer delamination check, solder joint integrity under 10x magnification, capacitor ESR screening for electrolytic aging
• Power rail verification: 3.3V and 5V rail tolerance check under load (±2% tolerance), inrush current measurement
• VMEbus signal integrity: Address/data bus continuity, arbitration logic verification using VMEbus analyzer
• CPU functional test: Boot sequence validation, NVRAM read/write cycle, watchdog timer function
• Encoder interface test: RH-11D encoder signal simulation, quadrature decode verification, index pulse response
• Burn-in: 48-hour thermal cycling at 0°C to 55°C operating range, continuous functional monitoring

All units ship with a test report, revision label, and 12-month warranty against functional failure under normal operating conditions.