Model: 3/4 7 STG S2-48 WO/ 1 IN R114 300S0042-03 85401 TURBOVAC 50 220WATTS 20360207
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Technical Dossier
The Leybold TURBOVAC 50 is a compact turbomolecular vacuum pump engineered for high-vacuum applications across semiconductor fabrication, analytical instrumentation, coating systems, research accelerators, and industrial leak detection. With an ultimate pressure below 1 × 10⁻⁸ mbar and a pumping speed of approximately 50 L/s for nitrogen, the TURBOVAC 50 occupies a critical position in the mid-range turbomolecular segment. It is deployed globally in chemical vapor deposition (CVD) reactors, mass spectrometers, electron microscopes, and thin-film deposition chambers. The series has accumulated significant installed-base volume in European and Asian semiconductor fabs, making long-term spare parts availability a primary operational concern for maintenance engineers.
Leybold introduced the TURBOVAC 50 as part of its compact turbomolecular pump family, succeeding earlier belt-driven designs with a fully magnetically suspended or hybrid-bearing rotor architecture. The S2-48 rotor designation (7-stage, 48 mm blade diameter) defines the core aerodynamic assembly. Early production units (pre-2000) used ceramic ball bearings on the fore-vacuum side combined with a permanent-magnet radial bearing on the high-vacuum side. Mid-generation units introduced improved rotor blade geometry for enhanced compression ratios on light gases (H₂, He). The 300S0042-03 assembly revision reflects a third-generation stator winding configuration optimized for 220 W drive power at 50/60 Hz input via the companion TURBOTRONIK NT 10/50 or NT 151 frequency converter. Units bearing the date code 20360207 indicate a 2023 Q1 production batch under Leybold's current manufacturing standard. Compatibility with predecessor TURBOVAC 50 housings is maintained at the DN 63 ISO-K flange interface, though electronic drive units are not backward-compatible with pre-NT-series controllers without an adapter harness.
The following SKUs represent the verified TURBOVAC 50 product family and associated components. Each entry reflects a distinct functional role within the pump system:
300S0042-03 (85401): 7-stage S2-48 rotor assembly, 220 W, 3/4 in fore-vacuum port, current production revision 03 — the primary listing SKU for this page.
300S0042-01: First-revision stator/rotor assembly, 200 W nominal, superseded by -03 revision; still serviceable with NT 10 controller.
300S0042-02: Intermediate revision with modified bearing preload; compatible with TURBOTRONIK NT 50.
85400: TURBOVAC 50 bare pump unit, 110 V / 60 Hz configuration, North American market variant.
85401: TURBOVAC 50 bare pump unit, 220 V / 50 Hz configuration, standard European/Asian market variant (matches this listing).
85402: TURBOVAC 50 with integrated fore-vacuum isolation valve, DN 25 KF outlet.
85410: TURBOVAC 50 with water cooling jacket for high-throughput process applications.
85420: TURBOVAC 50 with Profibus interface module for remote monitoring integration.
200 906 V02: Replacement hybrid bearing set (fore-vacuum side), compatible with all S2-48 rotor variants.
200 907 V01: Permanent-magnet radial bearing cartridge, high-vacuum side, TURBOVAC 50/50S.
200 908 V01: Rotor blade assembly, 7-stage, S2-48, balanced to ISO 1940 G1.0.
200 909 V02: Stator winding assembly, 220 W, revision 02/03 compatible.
200 910 V01: Fore-vacuum port adapter, 3/4 in NPT to DN 25 KF, stainless steel.
NT 10/50: TURBOTRONIK frequency converter, 100–240 V AC input, RS-232 interface, primary drive unit for TURBOVAC 50.
NT 151: TURBOTRONIK frequency converter, rack-mount format, analog setpoint input, for OEM integration.
200 920 V01: Venting valve assembly, DN 16 KF, normally closed, 24 V DC solenoid.
200 925 V01: Vibration isolation mount set (4 pcs), M6 thread, for benchtop installations.
200 930 V01: Inlet screen / particle filter, DN 63 ISO-K, 100-mesh stainless steel.
Each TURBOVAC 50 unit processed by DriveKNMS undergoes a structured verification protocol specific to turbomolecular pump mechanics and electronics. Rotor dynamic balance is verified on a calibrated spin-test rig; axial and radial runout must remain within ±2 µm of OEM specification. Bearing condition is assessed via vibration signature analysis at 10%, 50%, and 100% rated speed. Stator winding insulation resistance is measured at 500 V DC (minimum 100 MΩ). Ultimate pressure performance is validated on a calibrated test stand using a calibrated ionization gauge; acceptance criterion is ≤ 5 × 10⁻⁸ mbar after 30-minute stabilization. The TURBOTRONIK NT drive unit is bench-tested for correct ramp-up profile, over-temperature shutdown, and RS-232 communication integrity. Units failing any parameter are quarantined for component-level repair before re-test. Final units are shipped with a test certificate documenting measured ultimate pressure, peak rotor speed (rpm), and bearing vibration amplitude.
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