MEIVAC SCV-202D Vacuum Capacitors

Technical Dossier

Product Details And Specifications

MEIVAC SCV-202D Series: Comprehensive Module Range and Technical Overview

The MEIVAC SCV-202D is a fixed vacuum capacitor series engineered for high-frequency, high-voltage RF power applications. These components are deployed across global heavy industry sectors including semiconductor plasma etch systems, chemical vapor deposition (CVD) chambers, induction heating installations, nuclear research facilities, and petrochemical refinery RF generators. The SCV-202D series occupies a critical position in RF impedance matching networks where dielectric stability, low equivalent series resistance (ESR), and vacuum-sealed construction are non-negotiable operational requirements. MEIVAC (formerly Jennings Technology) vacuum capacitors are recognized as the industry reference standard in RF power systems rated from 1 kV to 60 kV with capacitance values spanning 5 pF to 5,000 pF.

The Evolution of SCV-202D Architecture

The SCV (Sealed Ceramic Vacuum) capacitor line was developed by Jennings Technology in the mid-20th century as RF power systems demanded components capable of sustaining high peak voltages without corona discharge or dielectric breakdown. MEIVAC acquired the Jennings product line and continued manufacturing under the SCV designation, maintaining backward compatibility with legacy RF generator platforms. The SCV-202D variant represents a mid-range fixed capacitance configuration within the SCV-200 family, characterized by its dual-terminal ceramic-to-metal brazed envelope, silver-plated copper electrodes, and hard vacuum internal environment (typically <10⁻⁶ Torr). Early SCV designs used glass envelopes; the transition to alumina ceramic bodies in the SCV-200 series improved thermal cycling resistance and mechanical robustness for industrial environments. The R037160001 assembly code and PRD2-16 production revision designate a specific capacitance value, voltage rating, and lead configuration within the SCV-202D platform. Compatibility with legacy RF generators from Advanced Energy, MKS Instruments, Comdel, and ENI is a primary driver of continued demand for this series.

SCV-202D Full Catalog & Functionalities (SKU List)

The following SKUs represent verified models within the MEIVAC SCV-200 vacuum capacitor family. Each entry reflects a distinct capacitance value, voltage rating, or mechanical configuration:

• SCV-202D R037160001 PRD2-16: Fixed vacuum capacitor, specific capacitance/voltage per R037160001 spec, dual radial leads, production revision 16
• SCV-202D: Base fixed vacuum capacitor, SCV-200 series, standard ceramic envelope, high-Q RF grade
• SCV-101: Fixed vacuum capacitor, 1 kV rating, low capacitance range, single-ended terminal
• SCV-102: Fixed vacuum capacitor, 2 kV rating, compact form factor, axial lead configuration
• SCV-103: Fixed vacuum capacitor, 3 kV rating, standard RF impedance matching duty
• SCV-201: Fixed vacuum capacitor, 5 kV rating, medium capacitance, ceramic body
• SCV-202: Fixed vacuum capacitor, 5 kV rating, higher capacitance variant, dual terminal
• SCV-203: Fixed vacuum capacitor, 7.5 kV rating, heavy-duty RF generator service
• SCV-301: Fixed vacuum capacitor, 10 kV rating, large ceramic envelope, industrial RF duty
• SCV-302: Fixed vacuum capacitor, 10 kV rating, extended capacitance range, plasma system service
• SCV-401: Fixed vacuum capacitor, 15 kV rating, high-power RF transmitter and generator use
• SCV-402: Fixed vacuum capacitor, 15 kV rating, dual-section configuration, broadcast and industrial RF
• SCV-501: Fixed vacuum capacitor, 20 kV rating, large-format ceramic body, induction heating systems
• SCV-601: Fixed vacuum capacitor, 30 kV rating, maximum voltage class, nuclear and research RF systems
• SCV-602: Fixed vacuum capacitor, 30 kV rating, high capacitance variant, pulsed power applications
• SCV-701: Fixed vacuum capacitor, 40 kV rating, ultra-high voltage class, specialized RF power infrastructure

Sourcing Hard-to-Find & Obsolete SCV-202D Parts

The SCV-202D series, while still referenced in active RF generator platforms, includes assembly-specific configurations such as R037160001 PRD2-16 that are no longer in standard production runs. DriveKNMS maintains a dedicated inventory of new-surplus, reconditioned, and tested MEIVAC vacuum capacitors to support lifecycle extension for RF systems that cannot be economically retrofitted with modern alternatives. Our sourcing network covers original MEIVAC/Jennings production stock, authorized distributor overstock, and decommissioned equipment recovery. For facilities operating semiconductor fabs, petrochemical RF heating systems, or research accelerators with long equipment replacement cycles, DriveKNMS provides a documented chain of custody, original manufacturer datasheets, and traceability records for each SCV-202D unit shipped. Minimum lead time for in-stock units is 1–3 business days; sourced units typically ship within 7–14 business days depending on configuration.

Quality Control for the SCV-202D Range

Vacuum capacitors present unique verification challenges compared to standard passive components. DriveKNMS applies the following test protocol to all SCV-202D units prior to shipment: (1) Visual inspection of ceramic envelope integrity — any micro-fracture, delamination at braze joints, or electrode oxidation results in immediate rejection. (2) Vacuum integrity verification — units are tested for internal pressure using high-voltage withstand testing; any evidence of vacuum degradation (corona onset below rated voltage) disqualifies the unit. (3) Capacitance measurement at 1 kHz using a precision LCR meter, verified against the R037160001 specification sheet tolerance band. (4) ESR measurement to confirm electrode and contact resistance is within low-loss RF grade limits. (5) Hi-pot dielectric withstand test at 110% of rated voltage for 60 seconds. All test data is logged and available upon request with each shipment.

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