MKS Baratron Pressure Transducers: 1350-01083 852B61PCA2GC 0100-01692 0100-20458 P5/6X86 SBC M9313-00126 960560-G4B

Technical Dossier

Product Details And Specifications

MKS Baratron Series: Comprehensive Module Range and Technical Overview

The MKS Baratron capacitance manometer series is one of the most widely deployed pressure measurement technologies in global heavy industry. Installed across semiconductor fabs, chemical processing plants, nuclear facilities, and petroleum refineries, Baratron transducers provide absolute, gauge, and differential pressure measurements with high accuracy and long-term stability. Their all-metal sensor construction and temperature-controlled sensor head make them the reference standard for process-critical pressure monitoring in corrosive and high-purity environments. The series spans measurement ranges from 0.001 Torr to 1000 Torr, covering the full spectrum from high-vacuum to near-atmospheric process conditions.

The Evolution of Baratron Architecture

MKS Instruments introduced the Baratron capacitance manometer in the 1960s as a primary pressure standard for vacuum science. The original 122A series established the core operating principle: a tensioned Inconel diaphragm deflects under differential pressure, altering the capacitance between the diaphragm and fixed electrodes. This signal is conditioned by an onboard ASIC to produce a linear analog output.

Through successive generations, MKS expanded the Baratron platform to address evolving process requirements. The 120 and 122 series provided the foundational analog output (0–10 VDC or 4–20 mA). The 600 series introduced heated sensor heads (45°C, 100°C, 150°C) to prevent condensation of reactive process gases. The 800 series added RS-232 and DeviceNet digital interfaces for integration with distributed control systems (DCS). The 900 series (including the 901P, 902, 910) extended the platform to Pirani and combination gauges for wider pressure range coverage. The 1350 and 0100 sub-series represent application-specific OEM configurations, factory-calibrated for integration into specific process tool platforms including Applied Materials, Lam Research, and Tokyo Electron equipment. Compatibility across generations is maintained through standardized 15-pin D-sub and MKS Type 274 connectors, though firmware and calibration data are not interchangeable between series generations without recalibration.

Baratron Full Catalog & Functionalities (SKU List)

The following SKUs represent verified, commonly deployed Baratron configurations across semiconductor and industrial process applications. SKUs are organized by functional category.

OEM / Tool-Specific Configurations

1350-01083: OEM Baratron, 10 Torr full scale, heated 45°C, 15-pin D-sub, AMAT tool-specific calibration.
852B61PCA2GC: Capacitance manometer assembly, 1 Torr FS, 100°C heated head, dual-range output, process gas compatible.
0100-01692: OEM pressure transducer, 100 Torr FS, unheated, 0–10 VDC output, Lam Research platform.
0100-20458: OEM Baratron, 10 Torr FS, 45°C heated, analog output, CVD chamber pressure control.
M9313-00126: Replacement Baratron assembly, 1000 Torr FS, gauge type, stainless wetted parts, 4–20 mA output.
960560-G4B: OEM capacitance manometer, 0.1 Torr FS, 150°C heated, high-purity wetted surfaces, ALD process tool.

Standard Catalog — Absolute Pressure (Heated)

MKS 627D: Heated Baratron, 10 Torr FS, 45°C, 15-pin D-sub, 0–10 VDC, general semiconductor process.
MKS 628B: Heated Baratron, 1000 Torr FS, 100°C, stainless diaphragm, CVD/PECVD applications.
MKS 631A: Differential Baratron, 10 Torr FS, 45°C, dual-port, etch process pressure balance.
MKS 622B: Unheated Baratron, 1000 Torr FS, 0–10 VDC, general industrial vacuum monitoring.
MKS 626B: Heated Baratron, 100 Torr FS, 100°C, corrosion-resistant Inconel diaphragm, HF-compatible.
MKS 629B: High-accuracy Baratron, 10 Torr FS, 0.12% FS accuracy, 45°C, research-grade process control.

Digital Interface / DCS-Integrated Models

MKS 870B: Baratron with RS-232 interface, 1–1000 Torr selectable range, DCS/SCADA integration.
MKS 872B: DeviceNet-enabled Baratron, 10 Torr FS, 45°C, fieldbus-ready for distributed I/O systems.
MKS 910DualTrans: Combination Pirani/Baratron, 0.001 Torr–1000 Torr, single instrument full-range coverage.
MKS 925 MicroPirani: Solid-state Pirani gauge, 1×10⁻⁵ to 1000 Torr, RS-485 Modbus output, roughing pump monitoring.
MKS 901P: Piezo/Pirani combination, 1×10⁻⁴ to 1500 Torr, compact form factor, load lock and foreline monitoring.

P5/6X86 SBC (Single Board Computer — Controller Platform)

P5/6X86 SBC: Embedded single-board computer used in MKS multi-channel pressure controller platforms (e.g., 247C, 651C); x86 architecture, ISA bus, interfaces with Baratron analog outputs for closed-loop pressure control. Not a pressure transducer; classified as controller hardware within the Baratron ecosystem.

Sourcing Hard-to-Find & Obsolete Baratron Parts

A significant portion of the Baratron catalog — particularly OEM-specific part numbers such as 1350-01083, 0100-01692, 0100-20458, and 960560-G4B — has been discontinued by MKS Instruments or is available only through authorized OEM channels with extended lead times of 16–52 weeks. DriveKNMS maintains a dedicated inventory of tested surplus and refurbished Baratron units sourced from decommissioned semiconductor fabs and process tool buybacks globally.

For end-of-life tool support, DriveKNMS provides cross-reference matching between obsolete OEM part numbers and current MKS catalog equivalents, including calibration range verification and connector compatibility assessment. Units are available with optional recalibration to NIST-traceable standards. Minimum order quantities do not apply to spare parts sourcing requests.

Quality Control for the Baratron Range

Baratron capacitance manometers require specialized test procedures due to their precision diaphragm assemblies and heated sensor head electronics. DriveKNMS applies the following protocol to all Baratron units prior to shipment:

1. Leak integrity test: Each unit is helium leak-tested at the process port and electrical feedthrough to <1×10⁻⁹ atm·cc/sec.
2. Zero offset verification: Output at full vacuum (<1×10⁻⁵ Torr) is verified against factory zero specification (±0.02% FS).
3. Span calibration check: Full-scale output is verified at a known reference pressure using a primary standard (MKS 690A or equivalent).
4. Heater circuit continuity: For heated models (45°C, 100°C, 150°C), heater resistance and thermal cutout function are verified.
5. Output linearity sweep: Analog output is swept across 10%, 25%, 50%, 75%, and 100% of full scale and compared against factory calibration data.
6. Connector and cable inspection: 15-pin D-sub and MKS Type 274 connectors are inspected for pin integrity and dielectric resistance.

Units failing any parameter are quarantined for repair or returned to supplier. Test records are retained for 5 years and available upon request.