MKS 51A12TCD2BA075 Pressure Transducer – Obsolete Baratron Spare Part
MKS Instruments 51A12TCD2BA075 is listed for Baratron RFQ review. Confirm quantity, condition and destination before quotation.
Technical Dossier
RFQ support for obsolete parts: Send the model number, required quantity and destination so DriveKNMS can confirm sourcing options before quotation.
| Parameter | Detail |
|---|---|
| Manufacturer | MKS Instruments |
| Part Number | 627BX01MDC4B |
| Series | Baratron 627B |
| Type | Capacitance Manometer – Absolute Pressure Transducer |
| Measurement Principle | Capacitance diaphragm gauge (CDG) |
| Country of Origin | United States |
| Discontinuation Status | Discontinued / Obsolete – No longer in active MKS production |
| Compatible Systems | Semiconductor CVD/PVD/Etch chambers; legacy vacuum process tools from Applied Materials, Lam Research, Novellus, and equivalent OEM platforms using MKS Baratron pressure control loops |
| Interface | Analog output (consult unit label for exact voltage range) |
Note: Electrical parameters such as full-scale range, output signal, and supply voltage are unit-specific and encoded in the part number suffix. DriveKNMS will confirm exact specifications against physical unit markings prior to shipment. No parameters are assumed or fabricated.
The MKS Baratron 627B series was the pressure measurement standard across an entire generation of semiconductor process equipment. Its capacitance diaphragm sensing technology delivered the sub-Torr accuracy and long-term stability that process engineers built their recipes around. When MKS transitioned its product line, facilities running tools qualified on 627B-series transducers faced a hard choice: requalify the process with a new sensor — a months-long effort involving process of record changes, yield validation, and regulatory documentation — or source the original part.
For most operations, requalification is not a viable option during active production. The 627BX01MDC4B is not interchangeable with modern successors without engineering intervention. Its mechanical interface, output signal characteristics, and thermal behavior are matched to the tool's existing wiring, PLC input cards, and process recipes. Substituting a different sensor without full revalidation introduces process drift risk that is unacceptable in yield-sensitive environments.
Facilities that have extended the life of their legacy vacuum tools by 5 to 10 years beyond the OEM's support window consistently cite one strategy: maintaining a dedicated inventory of critical wear and failure-prone components. The 627BX01MDC4B, as a diaphragm-based sensor exposed to corrosive process gases, is among the highest-priority components to hold in reserve. A single unit in storage eliminates the risk of an unplanned tool-down event that cannot be resolved through any standard procurement channel.
DriveKNMS applies a 5-step quality assurance protocol to all obsolete and legacy components before dispatch review:
Condition grade (New Surplus, Refurbished, or Tested Used) is disclosed explicitly on every order confirmation. No unit is shipped without a documented condition statement.
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