Swagelok 6LV High Purity Diaphragm Valve: 0051-89074 6LV-BN8BW6-DU-C 1M 684-040774-001 6.0 OD 3300-02261 —

Technical Dossier

Product Details And Specifications

Swagelok 6LV Series: Comprehensive Module Range and Technical Overview

The Swagelok 6LV Series high purity diaphragm valves are a globally deployed fluid control component used in ultra-high-purity (UHP) process systems across semiconductor fabrication, pharmaceutical manufacturing, chemical processing, and specialty gas distribution. Installed in facilities ranging from 300mm wafer fabs in Taiwan and South Korea to petrochemical complexes in the Middle East and Europe, the 6LV series represents Swagelok's core offering for applications requiring zero dead-leg flow paths, minimal particle generation, and full traceability of wetted materials. The series is engineered to meet SEMI F57, ASTM A270, and ASME BPE standards, making it a reference-grade component in process piping specifications globally.

The Evolution of 6LV Architecture

The 6LV series was developed as Swagelok's response to the semiconductor industry's transition to sub-micron process nodes, where conventional valve designs introduced unacceptable levels of particulate contamination and dead volume. Early iterations of the 6LV platform used PTFE diaphragms with manual actuation, targeting 6.0mm OD tubing connections — the dominant tube size in early UHP gas panels. As process complexity increased through the 1990s and 2000s, Swagelok expanded the 6LV range to include pneumatically actuated variants (suffix -DU for double-acting, -SU for spring-return), and introduced body materials including 316L VIM-VAR stainless steel with electropolished internal surfaces (Ra ≤ 0.25 µm) to meet evolving SEMI F57 cleanliness requirements.

The introduction of the BN8BW6 body configuration standardized the 6LV for use in modular surface-mount gas panel assemblies (also known as gas sticks or gas boxes), enabling direct integration with Swagelok's W-series and D-series surface-mount components. The -C suffix denotes a cleaned and packaged configuration per SEMI F57 protocol, with individual bagging, nitrogen purge, and lot-traceable documentation. Compatibility with legacy 6LV installations is maintained across generations, as the port geometry and actuation interface have remained dimensionally stable, allowing direct replacement without panel redesign.

6LV Full Catalog & Functionalities (SKU List)

The following SKUs represent verified, commonly sourced configurations within the Swagelok 6LV series. Each entry reflects a distinct combination of body style, actuation, tubing OD, and cleanliness specification.

Manual Diaphragm Valves — 6.0mm OD

• 6LV-BN8BW6-DU-C: Pneumatic double-acting, 6.0mm OD, SEMI F57 cleaned, surface-mount body
• 6LV-BN8BW6-SU-C: Pneumatic spring-return (NC), 6.0mm OD, SEMI F57 cleaned, surface-mount body
• 6LV-BN8BW6-M-C: Manual actuated, 6.0mm OD, SEMI F57 cleaned, surface-mount body
• 6LV-BN8BW6-DU: Pneumatic double-acting, 6.0mm OD, standard clean, surface-mount body
• 6LV-BN8BW6-SU: Pneumatic spring-return (NC), 6.0mm OD, standard clean, surface-mount body

Inline Body Configurations — 6.0mm OD Tube Fitting

• 6LV-B6-DU-C: Pneumatic double-acting, 6.0mm Swagelok tube fitting ends, SEMI F57 cleaned
• 6LV-B6-SU-C: Pneumatic spring-return, 6.0mm tube fitting ends, SEMI F57 cleaned
• 6LV-B6-M-C: Manual, 6.0mm tube fitting ends, SEMI F57 cleaned
• 6LV-B6-DU: Pneumatic double-acting, 6.0mm tube fitting ends, standard clean
• 6LV-B6-SU: Pneumatic spring-return, 6.0mm tube fitting ends, standard clean

1/4-Inch OD Tube Fitting Variants

• 6LV-B4-DU-C: Pneumatic double-acting, 1/4 in. OD tube fitting, SEMI F57 cleaned
• 6LV-B4-SU-C: Pneumatic spring-return, 1/4 in. OD tube fitting, SEMI F57 cleaned
• 6LV-B4-M-C: Manual, 1/4 in. OD tube fitting, SEMI F57 cleaned
• 6LV-B4-DU: Pneumatic double-acting, 1/4 in. OD tube fitting, standard clean
• 6LV-B4-SU: Pneumatic spring-return, 1/4 in. OD tube fitting, standard clean

Associated Assembly Reference Numbers (this listing)

• 0051-89074: Swagelok internal assembly/order reference number
• 684-040774-001: Customer or OEM cross-reference part number
• 3300-02261: Panel assembly or system-level drawing reference
• 1M: Lot or batch identifier

Sourcing Hard-to-Find & Obsolete 6LV Series Parts

The 6LV series remains in active production as of 2026, but specific configurations — particularly those with legacy OEM cross-reference numbers such as 684-040774-001 and 3300-02261 — are frequently required as direct replacements in installed gas panel systems that cannot be redesigned. These panels are common in semiconductor fabs operating 200mm legacy lines, where the cost of panel replacement far exceeds the cost of sourcing original-specification spare valves.

DriveKNMS maintains a dedicated inventory of 6LV series valves sourced from verified Swagelok distributors and decommissioned UHP system teardowns. All units are cross-referenced against original Swagelok part numbers and OEM assembly drawings before listing. For configurations with extended lead times from the factory — typically 8–16 weeks for cleaned and bagged variants — DriveKNMS provides same-week dispatch from available stock, with full documentation including material certifications (MTRs), cleanliness certificates, and pressure test records where available.

Quality Control for the 6LV Range

Each 6LV series valve processed through DriveKNMS undergoes a structured inspection protocol designed for UHP diaphragm valve characteristics:

• Diaphragm integrity check: Visual and tactile inspection of the PTFE diaphragm for micro-tears, deformation, or chemical staining. Diaphragms showing any surface anomaly are replaced before dispatch.
• Actuation cycle test: Pneumatically actuated units are cycled a minimum of 50 times at rated pilot pressure (typically 60–80 psig) to verify consistent open/close response and absence of stiction.
• Leak test: Helium leak test or nitrogen pressure decay test performed at 1.5× rated working pressure. Acceptance criterion: ≤ 1×10⁻⁹ std cc/sec He for UHP-grade units.
• Port cleanliness verification: Internal wetted surfaces inspected under UV light for particulate contamination. Units destined for SEMI F57 applications are re-cleaned and re-bagged in ISO Class 4 environment if any contamination is detected.
• Dimensional verification: Port geometry and surface-mount interface dimensions verified against Swagelok published drawings to confirm direct fit in target panel assemblies.