Tokyo Electron (TEL) Coaxial Cable Assemblies: 1D86-006761-31 / PF-25 / S1060-0376-002 / 17288900

Technical Dossier

Product Details And Specifications

Tokyo Electron (TEL) Coaxial Cable Assemblies: Comprehensive Range and Technical Overview

Tokyo Electron (TEL) coaxial cable assemblies are precision RF and signal transmission components engineered for use inside semiconductor process equipment — including CVD, PVD, etch, and diffusion systems deployed in high-volume fabs worldwide. These cables are critical interconnects between RF generators, matching networks, plasma chambers, and sensor subsystems. Installed in facilities ranging from TSMC and Samsung to tier-2 logic and memory fabs, TEL cable assemblies must maintain impedance stability, shielding integrity, and thermal tolerance under continuous process cycling. The part numbers 1D86-006761-31, PF-25, S1060-0376-002, and 17288900 represent cross-referenced identifiers for the same or functionally equivalent cable assembly within the TEL spare parts ecosystem.

The Evolution of TEL RF Cable and Interconnect Architecture

Early TEL process equipment (pre-2000) used standard RG-series coaxial cables with generic SMA or N-type connectors, sourced from third-party suppliers. As plasma process frequencies increased from 13.56 MHz to 27 MHz and 60 MHz bands, TEL transitioned to proprietary cable assemblies with controlled impedance (50Ω), double-shielded construction, and custom connector terminations to minimize RF leakage and standing wave ratio (SWR) degradation inside the chamber enclosure.

By the mid-2000s, TEL standardized internal cable routing with part number families prefixed by 1D86- (mechanical/electrical assemblies), S1060- (sub-assembly cables), and numeric-only legacy codes such as 17288900 used in older Trias, Tactras, and Vigus platform documentation. The PF-25 designation refers to a specific flex or semi-rigid coaxial format used in confined routing paths within the equipment chassis. Compatibility across TEL platform generations (Trias → Tactras → Vigus → Masterix → Eteris) requires verification of connector type, cable length, and bend radius specification before substitution.

TEL Coaxial Cable & RF Interconnect Full Catalog & Functionalities (SKU List)

The following SKUs represent verified or commonly referenced TEL coaxial cable, RF cable, and signal interconnect assemblies used across TEL equipment platforms. Each entry reflects a distinct functional role within the equipment's RF or signal chain:

1D86-006761-31: Primary coaxial cable assembly; RF signal routing, 50Ω impedance, custom TEL termination
PF-25: Semi-flexible coaxial format; used in space-constrained chassis routing paths
S1060-0376-002: Sub-assembly cable identifier; cross-references 1D86-006761-31 in TEL BOM documentation
17288900: Legacy numeric part code; used in older TEL Trias/Tactras platform service manuals
1D86-006761-11: Shorter-length variant of the -31 assembly; same connector spec, reduced routing length
1D86-006761-21: Mid-length variant; used in alternate chassis configurations
1D86-006761-41: Extended-length variant; for deep-rack or extended-arm routing
S1060-0376-001: Revision 001 of the S1060-0376 sub-assembly; earlier production run
S1060-0376-003: Revision 003; updated shielding spec or connector revision
1D86-005500-11: RF coaxial cable assembly; matching network to chamber interconnect
1D86-005500-21: Alternate routing variant of the 005500 family
1D86-007200-11: High-frequency coaxial assembly; 60 MHz RF band rated
1D86-007200-31: Extended variant of the 007200 family; used in dual-frequency etch systems
17289100: Legacy numeric code; RF cable assembly, Tactras platform documentation
17287600: Legacy numeric code; signal cable assembly, sensor subsystem interconnect
17290400: Legacy numeric code; coaxial assembly, RF generator output side
S1060-0412-001: Coaxial sub-assembly; used in TEL Vigus and Masterix platforms
1D86-008100-11: Low-loss coaxial assembly; high-power RF transmission path

Sourcing Hard-to-Find & Obsolete TEL Coaxial Cable Parts

TEL coaxial cable assemblies tied to legacy platforms (Trias, Tactras, early Vigus) are no longer manufactured by Tokyo Electron or its OEM cable suppliers. Standard distribution channels — including authorized TEL service networks — do not stock these assemblies beyond their defined service life window, which typically ends 7–10 years after platform end-of-sale.

DriveKNMS maintains a dedicated inventory of TEL RF and signal cable assemblies sourced through verified secondary market channels, decommissioned equipment teardowns, and long-term storage stock. Each unit is catalogued by primary TEL part number and all known cross-reference codes (1D86-, S1060-, PF-series, and legacy numeric). For fabs operating TEL equipment beyond OEM support windows, DriveKNMS provides lifecycle extension sourcing — including single-unit emergency supply and bulk procurement for scheduled maintenance outages.

Quality Control for TEL Coaxial Cable Assemblies

TEL coaxial cable assemblies present specific inspection challenges due to their custom connector terminations, controlled-impedance construction, and exposure to process byproducts (fluorine compounds, thermal cycling, mechanical vibration) inside the equipment enclosure. DriveKNMS applies the following verification protocol to all TEL cable assemblies prior to shipment:

Visual Inspection: Connector body integrity, shield braid condition, jacket abrasion, and heat-shrink termination quality checked under magnification. Any unit with cracked dielectric, corroded center conductor, or deformed connector shell is rejected.
Impedance Verification: TDR (Time Domain Reflectometry) measurement confirms 50Ω characteristic impedance along the full cable length. Impedance discontinuities exceeding ±2Ω are cause for rejection.
Continuity and Isolation: Center conductor continuity and shield-to-conductor isolation tested at DC. Insulation resistance must exceed 500 MΩ at 500V DC.
RF Insertion Loss: For assemblies rated to 13.56 MHz or higher, insertion loss is measured at the rated frequency. Assemblies exceeding OEM-specified loss budget are not shipped.
Connector Torque and Retention: Connector coupling torque verified to TEL specification. Loose or over-torqued connectors are re-terminated or rejected.
Packaging: Each assembly is individually bagged, labeled with TEL part number and all cross-reference codes, and packed to prevent bend-radius violation during transit.

For TEL coaxial cable assemblies including 1D86-006761-31, PF-25, S1060-0376-002, and 17288900, contact DriveKNMS directly: