Tokyo Electron PHS120 Z03 9700-9960-06 ATR 9100 901P-11130-0167 Controller Assy

Technical Dossier

Product Details And Specifications

Tokyo Electron (TEL) PHS120 / ATR 9100 Series: Comprehensive Module Range and Technical Overview

The Tokyo Electron (TEL) PHS120 and ATR 9100 series controller assemblies are deployed across high-throughput semiconductor fabrication environments, including CVD, diffusion furnace, and thermal processing systems. These controller modules serve as the primary process sequencing and axis coordination backbone in TEL Vertical Diffusion Furnace (VDF) and related platforms. Installed base spans 200mm and 300mm wafer fabs globally, with active units documented in facilities across Japan, South Korea, Taiwan, the United States, and Europe. The ATR 9100 sub-series specifically governs motion and recipe execution in multi-zone thermal processing chambers, making it a critical long-lifecycle component in facilities that cannot afford unplanned downtime.

The Evolution of PHS120 / ATR 9100 Architecture

The ATR 9100 controller architecture was introduced by Tokyo Electron as part of its second-generation process automation platform, succeeding the earlier ATR 8000 series. The PHS120 designation identifies the physical hardware chassis and backplane standard, while the ATR 9100 firmware and logic layer defines the functional behavior of each module slot.

Early ATR 9100 units (circa late 1990s) used parallel bus communication with proprietary TEL backplane signaling. Mid-generation revisions introduced enhanced serial diagnostics and expanded I/O addressing. The Z03 sub-variant (as in PHS120 Z03 9700-9960-06) denotes a third-revision zone controller board with updated EEPROM addressing and revised thermal compensation logic. Compatibility between Z01, Z02, and Z03 sub-variants is limited to the same ATR 9100 chassis generation; cross-generation substitution requires firmware validation.

As of 2026, the entire PHS120 / ATR 9100 series is in the mature-to-end-of-life phase. Tokyo Electron has ceased volume production of these assemblies. Fabs operating legacy TEL furnace platforms must rely on certified aftermarket suppliers for spare parts, repair, and lifecycle extension support.

PHS120 / ATR 9100 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified components within the TEL PHS120 and ATR 9100 ecosystem, classified by functional role:

Controller & CPU Assemblies

• PHS120 Z03 9700-9960-06 ATR 9100 901P-11130-0167: Zone controller assy, third-revision, primary process sequencing board for ATR 9100 chassis.
• ATR 9100 901P-11100-0142: Main CPU board, ATR 9100 platform, handles recipe execution and axis coordination.
• ATR 9100 901P-11100-0155: Revised CPU assembly with expanded memory addressing for multi-zone recipes.
• PHS120 Z01 9700-9960-02: First-revision zone controller, compatible with early ATR 9100 chassis configurations.
• PHS120 Z02 9700-9960-04: Second-revision zone controller, intermediate firmware, limited cross-compatibility with Z03.

I/O Modules

• ATR 9100 901P-11200-0101: Digital input module, 32-channel, 24VDC, for process interlock and sensor interfacing.
• ATR 9100 901P-11210-0102: Digital output module, 32-channel, relay-isolated, for actuator and valve control.
• ATR 9100 901P-11220-0103: Analog input module, 16-channel, 4–20mA / 0–10V, for thermocouple and pressure sensor data acquisition.
• ATR 9100 901P-11230-0104: Analog output module, 8-channel, for setpoint transmission to zone heater controllers.
• ATR 9100 901P-11240-0110: High-density DI/DO combination module, 16DI/16DO, for compact I/O expansion.

Communication & Network Adapters

• ATR 9100 901P-11300-0201: SECS/GEM communication adapter, enables fab host MES integration via RS-232/RS-422.
• ATR 9100 901P-11310-0202: Ethernet adapter module, 10BASE-T, for supervisory network connectivity.
• ATR 9100 901P-11320-0203: Serial bus interface card, proprietary TEL backplane protocol, required for multi-chassis expansion.

Power Supply Modules

• ATR 9100 901P-11400-0301: Primary DC power supply, 24VDC/10A, for ATR 9100 backplane bus power distribution.
• ATR 9100 901P-11410-0302: Redundant power supply module, hot-swap capable, for high-availability furnace configurations.
• ATR 9100 901P-11420-0303: AC/DC converter board, 100–240VAC input, for international voltage compatibility.

Sourcing Hard-to-Find & Obsolete PHS120 / ATR 9100 Parts

DriveKNMS maintains a dedicated inventory program for end-of-life TEL PHS120 and ATR 9100 components. As Tokyo Electron has discontinued volume production of this series, sourcing genuine replacement assemblies through standard distribution channels is no longer viable for most procurement teams.

DriveKNMS sources verified units through decommissioned fab equipment, certified refurbishment pipelines, and long-term storage inventory. Each unit is cataloged by part number, revision level, and functional test status prior to listing. For obsolete sub-variants such as the Z01 and Z02 zone controllers, DriveKNMS provides cross-reference documentation to identify compatible substitutes within the ATR 9100 ecosystem where direct replacements are unavailable.

Customers operating TEL vertical furnace platforms with active wafer production schedules are advised to establish a standing spare parts agreement to mitigate lead time risk on critical controller assemblies.

Quality Control for the PHS120 / ATR 9100 Range

The ATR 9100 series presents specific test challenges due to its proprietary backplane bus architecture and multi-zone thermal coordination logic. DriveKNMS applies the following verification procedures to all PHS120 / ATR 9100 units prior to shipment:

• Backplane bus continuity test using TEL-compatible backplane simulator to verify slot addressing and signal integrity.
• EEPROM read/write verification to confirm firmware revision and zone parameter storage integrity.
• Functional power-on test under controlled load conditions, validating DC rail stability across all backplane slots.
• I/O channel scan for digital and analog modules, confirming channel isolation and signal accuracy within manufacturer tolerance.
• Visual and microscopic inspection of PCB traces, connector pins, and capacitor condition, with particular attention to electrolytic capacitor aging on units from pre-2005 production runs.
• Burn-in cycle (minimum 48 hours) for CPU and controller assemblies to screen for latent component failures.