Tokyo Electron TTLA07-13 F-MFC_16 PCB Modules 3880-200121-14 / 3895-120916-14 / WCSH-0240-0000 / 0195-00218 / 773100

Name: Tokyo Electron TTLA07-13 F-MFC_16 PCB Modules 3880-200121-14 / 3895-120916-14 / WCSH-0240-0000 / 0195-00218 / 773100
Brand: Tokyo Electron (TEL)

Model: TTLA07-13 F-MFC_16, 3880-200121-14 3895-120916-14 WCSH-0240-0000 0195-00218 773100

Brand Tokyo Electron (TEL)

Series Tokyo Electron TTLA07-13 F-MFC_16

Model TTLA07-13 F-MFC_16, 3880-200121-14 3895-120916-14 WCSH-0240-0000 0195-00218 773100

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Product Details And Specifications

Tokyo Electron (TEL) TTLA07 / F-MFC_16 Series Technical Notes

The Tokyo Electron (TEL) TTLA07 series, encompassing the F-MFC_16 mass flow controller PCB platform, is a critical subsystem deployed across semiconductor fabrication equipment globally. TEL systems are installed in high-volume fabs operating CVD, ALD, etch, and diffusion processes at leading foundries and IDMs across Japan, South Korea, Taiwan, the United States, and Europe. The TTLA07-13 F-MFC_16 PCB assembly — cross-referenced under part numbers 3880-200121-14, 3895-120916-14, WCSH-0240-0000, 0195-00218, and 773100 — serves as the primary interface and control board for multi-channel mass flow control within TEL process chambers. Its role in maintaining gas delivery precision makes it a high-criticality spare part for any fab running TEL Trias, Telius, or Tactras platforms.

The Evolution of TTLA07 / F-MFC_16 Architecture

The TTLA07 PCB platform was developed as part of TEL's modular gas box and MFC control architecture, introduced to standardize multi-channel flow control across its 200mm and 300mm process tool generations. Early revisions of the F-MFC_16 board (suffix -11, -12) used through-hole components for analog signal conditioning and were designed for compatibility with TEL's proprietary RS-485-based MFC communication protocol. Subsequent revisions (-13, -14) transitioned to surface-mount technology, improving noise immunity and enabling higher-density channel integration.

The -14 revision (3895-120916-14) introduced enhanced ESD protection circuitry and revised firmware ROM addressing, making it partially backward-compatible with -13 installations subject to firmware validation. The WCSH-0240-0000 sub-assembly represents the wiring harness and connector interface layer that mates with the TTLA07-13 PCB, and must be sourced as a matched set in many TEL tool configurations. As TEL has transitioned newer platforms to digital MFC protocols (e.g., DeviceNet, EtherCAT), the TTLA07 / F-MFC_16 series has entered its mature/end-of-life phase, with no new production runs confirmed. Fabs maintaining legacy TEL tools must rely on aftermarket and refurbished inventory for ongoing support.

TTLA07 / F-MFC_16 Full Catalog & Functionalities (SKU List)

The following SKUs represent the verified component ecosystem of the TEL TTLA07 / F-MFC_16 platform. Each entry reflects a distinct functional role within the gas delivery and MFC control subsystem:

TTLA07-13: F-MFC_16 main PCB assembly, 16-channel MFC control interface board
3880-200121-14: PCB revision -14 sub-assembly, analog signal conditioning layer for MFC channels 1–8
3895-120916-14: PCB revision -14 sub-assembly, analog signal conditioning layer for MFC channels 9–16
WCSH-0240-0000: Wiring harness assembly, 240-pin connector interface for TTLA07 backplane integration
0195-00218: Firmware ROM module, factory-programmed for TTLA07-13 F-MFC_16 platform
773100: PCB identification / traceability label assembly, TEL internal part reference
TTLA07-11: F-MFC_16 early-revision PCB, through-hole design, 200mm tool generation
TTLA07-12: F-MFC_16 intermediate-revision PCB, mixed SMT/through-hole, transitional generation
TTLA07-14: F-MFC_16 latest-revision PCB, full SMT, enhanced ESD protection
3880-200121-11: Analog sub-board revision -11, channels 1–8, early generation
3880-200121-12: Analog sub-board revision -12, channels 1–8, intermediate generation
3895-120916-11: Analog sub-board revision -11, channels 9–16, early generation
3895-120916-12: Analog sub-board revision -12, channels 9–16, intermediate generation
WCSH-0240-0001: Wiring harness assembly, revised connector locking mechanism, updated revision
0195-00219: Firmware ROM module, updated revision for TTLA07-14 compatibility
TTLA07-13-R: Factory-refurbished TTLA07-13 PCB, TEL-certified remanufacture designation
3880-200121-14-R: Refurbished analog sub-board, channels 1–8, tested to OEM specification

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