AMAT Linear Actuator Assembly Modules: 0190-47186 / 0190-33877 / 61240-PAGC-AFK1

Technical Dossier

Product Details And Specifications

Applied Materials (AMAT) Linear Actuator Assembly Series: Comprehensive Module Range and Technical Overview

Applied Materials (AMAT) linear actuator assemblies are precision motion-control components deployed across semiconductor fabrication equipment platforms including CVD, PVD, etch, and implant systems. These assemblies are integral to wafer handling, process chamber gate valve actuation, and robotic end-effector positioning in high-vacuum and cleanroom environments. AMAT linear actuators are installed in fabs worldwide — from 200mm legacy lines to 300mm high-volume manufacturing facilities — and remain critical to uptime in facilities where equipment replacement cycles span 10–20 years. The assemblies covered in this index include both active production parts and long-tail obsolete components for which DriveKNMS maintains dedicated sourcing channels.

The Evolution of AMAT Linear Actuator Assembly Architecture

AMAT linear actuator assemblies have evolved across multiple equipment generations. Early-generation actuators used in Precision 5000 and Centura platforms (circa 1990s) relied on pneumatic drive mechanisms with discrete position sensors. Mid-generation designs introduced servo-electric actuation with integrated encoders, enabling closed-loop position feedback critical for advanced process control. Current-generation assemblies used in Endura, Producer, and Vantage platforms incorporate brushless DC motors, high-resolution linear encoders, and embedded diagnostics compatible with AMAT's Equipment Engineering Capability (EEC) framework.

Compatibility across generations is limited: pneumatic and electric actuator interfaces are not interchangeable without mechanical and electrical retrofit. Fabs operating mixed-generation tool fleets must maintain separate spare pools for each actuator family. The 0190-prefix part numbering convention identifies AMAT-manufactured or AMAT-qualified assemblies, while the 61240-prefix typically denotes vendor-specific sub-assemblies qualified to AMAT specifications.

AMAT Linear Actuator Assembly Full Catalog & Functionalities (SKU List)

The following SKUs represent verified AMAT linear actuator and motion-control assembly part numbers. Each entry includes a concise functional description for procurement and maintenance reference.

0190-47186: Linear actuator assembly, primary axis, chamber gate valve drive
0190-33877: Linear actuator sub-assembly, wafer transfer robot Z-axis
61240-PAGC-AFK1: Vendor-qualified linear actuator, AMAT-spec, cleanroom-rated
0190-09325: Pneumatic linear actuator, process chamber slit valve, Centura platform
0190-13628: Electric linear actuator assembly, 200mm wafer handler, Precision 5000
0190-22174: Linear actuator, load lock door mechanism, Endura platform
0190-35401: Servo-electric actuator assembly, blade extension axis, 300mm robot
0190-40892: Linear actuator, throttle valve drive, CVD process module
0190-44563: Actuator assembly, isolation valve, high-vacuum compatible
0190-51027: Linear actuator, transfer chamber robot R-axis, Centura 200mm
0190-55318: Electric actuator sub-assembly, pedestal lift, Producer platform
0190-58742: Linear actuator assembly, wafer lift pin drive, 300mm etch chamber
0190-62109: Actuator, gate valve, dual-blade transfer module, Vantage platform
61240-PAGC-BFK2: Vendor-qualified actuator variant, extended stroke, AMAT-spec
61240-PAGC-CFK3: Vendor-qualified actuator, high-cycle-life version, 300mm platforms
0190-29847: Pneumatic actuator, cassette elevator drive, FOUP handler interface
0190-38156: Linear actuator, shutter disk drive, PVD process chamber

Sourcing Hard-to-Find & Obsolete AMAT Linear Actuator Parts

A significant portion of AMAT linear actuator assemblies — particularly those with 0190-prefix numbers from pre-2005 production — are no longer available through OEM channels. Applied Materials has discontinued active manufacturing support for Precision 5000, Centura (early revisions), and first-generation Endura actuator assemblies. DriveKNMS maintains a dedicated obsolete-parts sourcing program for these components, including:

• Verified surplus inventory from decommissioned fab equipment
• Functional pull-out units with documented operational history
• Refurbished assemblies restored to OEM mechanical and electrical specifications
• Cross-reference matching for superseded part numbers to current or equivalent alternatives

For fabs operating under long-term service agreements or managing equipment through end-of-life cycles, DriveKNMS provides consignment stocking arrangements and priority allocation for critical actuator SKUs. Lead times for obsolete parts are quoted individually based on current inventory status.

Quality Control for the AMAT Linear Actuator Assembly Range

All AMAT linear actuator assemblies processed by DriveKNMS undergo a structured inspection and functional verification protocol prior to shipment:

• Mechanical inspection: Stroke length verification, bearing play measurement, lead screw or pneumatic cylinder condition assessment, and seal integrity check for vacuum-rated units
• Electrical verification: Motor winding resistance, encoder signal output, limit switch continuity, and connector pin integrity for servo-electric assemblies
• Functional cycling: Full-stroke actuation under rated load conditions with position repeatability measurement
• Cleanliness standard: Cleanroom-compatible packaging per ISO Class 5 handling requirements for units destined for vacuum process environments
• Documentation: Each unit ships with an inspection report referencing the AMAT part number, serial number (where present), test results, and technician sign-off