Model: 0190-47186 0190-33877 61240-PAGC-AFK1
Product Overview
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Commercial Path
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Technical Dossier
Applied Materials (AMAT) linear actuator assemblies are precision motion-control components deployed across semiconductor fabrication equipment platforms including CVD, PVD, etch, and implant systems. These assemblies are integral to wafer handling, process chamber gate valve actuation, and robotic end-effector positioning in high-vacuum and cleanroom environments. AMAT linear actuators are installed in fabs worldwide — from 200mm legacy lines to 300mm high-volume manufacturing facilities — and remain critical to uptime in facilities where equipment replacement cycles span 10–20 years. The assemblies covered in this index include both active production parts and long-tail obsolete components for which DriveKNMS maintains dedicated sourcing channels.
AMAT linear actuator assemblies have evolved across multiple equipment generations. Early-generation actuators used in Precision 5000 and Centura platforms (circa 1990s) relied on pneumatic drive mechanisms with discrete position sensors. Mid-generation designs introduced servo-electric actuation with integrated encoders, enabling closed-loop position feedback critical for advanced process control. Current-generation assemblies used in Endura, Producer, and Vantage platforms incorporate brushless DC motors, high-resolution linear encoders, and embedded diagnostics compatible with AMAT's Equipment Engineering Capability (EEC) framework.
Compatibility across generations is limited: pneumatic and electric actuator interfaces are not interchangeable without mechanical and electrical retrofit. Fabs operating mixed-generation tool fleets must maintain separate spare pools for each actuator family. The 0190-prefix part numbering convention identifies AMAT-manufactured or AMAT-qualified assemblies, while the 61240-prefix typically denotes vendor-specific sub-assemblies qualified to AMAT specifications.
The following SKUs represent verified AMAT linear actuator and motion-control assembly part numbers. Each entry includes a concise functional description for procurement and maintenance reference.
0190-47186: Linear actuator assembly, primary axis, chamber gate valve drive
0190-33877: Linear actuator sub-assembly, wafer transfer robot Z-axis
61240-PAGC-AFK1: Vendor-qualified linear actuator, AMAT-spec, cleanroom-rated
0190-09325: Pneumatic linear actuator, process chamber slit valve, Centura platform
0190-13628: Electric linear actuator assembly, 200mm wafer handler, Precision 5000
0190-22174: Linear actuator, load lock door mechanism, Endura platform
0190-35401: Servo-electric actuator assembly, blade extension axis, 300mm robot
0190-40892: Linear actuator, throttle valve drive, CVD process module
0190-44563: Actuator assembly, isolation valve, high-vacuum compatible
0190-51027: Linear actuator, transfer chamber robot R-axis, Centura 200mm
0190-55318: Electric actuator sub-assembly, pedestal lift, Producer platform
0190-58742: Linear actuator assembly, wafer lift pin drive, 300mm etch chamber
0190-62109: Actuator, gate valve, dual-blade transfer module, Vantage platform
61240-PAGC-BFK2: Vendor-qualified actuator variant, extended stroke, AMAT-spec
61240-PAGC-CFK3: Vendor-qualified actuator, high-cycle-life version, 300mm platforms
0190-29847: Pneumatic actuator, cassette elevator drive, FOUP handler interface
0190-38156: Linear actuator, shutter disk drive, PVD process chamber
A significant portion of AMAT linear actuator assemblies — particularly those with 0190-prefix numbers from pre-2005 production — are no longer available through OEM channels. Applied Materials has discontinued active manufacturing support for Precision 5000, Centura (early revisions), and first-generation Endura actuator assemblies. DriveKNMS maintains a dedicated obsolete-parts sourcing program for these components, including:
All AMAT linear actuator assemblies processed by DriveKNMS undergo a structured inspection and functional verification protocol prior to shipment:
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