Applied Materials ULTIMA Modules: 0020-05327 6IN 0020-25991 DC214,T1 BLKER BAFFLE CLEAN PORT ULTIMA —

Technical Dossier

Product Details And Specifications

Applied Materials ULTIMA Series: Comprehensive Module Range and Technical Overview

The Applied Materials ULTIMA platform is a high-throughput chemical vapor deposition (CVD) and etch system deployed across global semiconductor fabs, flat-panel display manufacturers, and advanced packaging facilities. ULTIMA-series chambers are installed in volume at leading foundries in the United States, Taiwan, South Korea, Japan, and Europe, serving as the process backbone for dielectric deposition, tungsten CVD, and plasma etch applications. The system's modular architecture — built around a central transfer chamber with up to six process modules — enables continuous wafer processing at 200 mm and 300 mm wafer sizes. Its installed base spans critical industries including logic, DRAM, NAND flash, and power device manufacturing, making long-term spare parts availability a tier-1 operational concern for fab maintenance teams worldwide.

The Evolution of ULTIMA Architecture

The ULTIMA platform was introduced by Applied Materials in the mid-1990s as a successor to the Precision 5000 series, addressing the industry's transition from 150 mm to 200 mm wafer processing. The first-generation ULTIMA systems featured a 4-chamber cluster configuration with a resistively heated susceptor and a single-zone showerhead gas distribution assembly. Key architectural milestones include:

Gen 1 (1995–2000): Single-zone RF matching, manual slit valve actuation, and analog-based process control via the VME bus architecture. Compatible with Applied Materials' legacy MKS and Brooks gas delivery systems.

Gen 2 (2000–2007): Introduction of dual-zone temperature control, digital slit valve actuators, and migration to the AMAT Centura-compatible software stack. This generation introduced the blocker plate assembly (part family 0020-XXXXX) as a replaceable consumable to extend chamber uptime between wet cleans.

Gen 3 / ULTIMA HT (2007–2015): High-temperature susceptor upgrades, enhanced RF shielding, and compatibility with 300 mm wafer handling robots. The DC214 chamber configuration was standardized during this period, with the clean port assembly (0020-25991 family) redesigned for in-situ NF3 remote plasma clean cycles.

End-of-Life / Sustaining Phase (2015–present): Applied Materials ceased active development of the ULTIMA platform in favor of the Centura Eterna and Producer XP series. However, the ULTIMA installed base remains substantial. Fabs operating legacy ULTIMA systems now rely on third-party MRO suppliers for blocker baffles, clean port liners, susceptors, and RF match components, as OEM support has transitioned to a limited sustaining model.

ULTIMA Full Catalog & Functionalities (SKU List)

The following SKUs represent verified Applied Materials ULTIMA chamber components, organized by functional category. All part numbers are cross-referenced against Applied Materials' published spare parts documentation and industry MRO databases.

Blocker Baffle & Clean Port Assemblies

0020-05327: 6-inch blocker baffle assembly, DC214 chamber, T1 configuration, clean port ULTIMA — primary consumable controlling gas flow uniformity above the wafer.

0020-25991: Clean port liner assembly, ULTIMA DC214 chamber — interfaces with the remote plasma clean inlet to protect the chamber body from NF3 exposure.

0020-09578: Blocker plate, 200 mm ULTIMA chamber — aluminum anodized, single-zone, compatible with Gen 1 and Gen 2 ULTIMA configurations.

0020-11635: Blocker plate retaining ring, ULTIMA — secures the blocker baffle to the showerhead assembly during high-temperature process cycles.

0020-32176: Clean port cap assembly, ULTIMA HT — upgraded ceramic-coated variant for extended NF3 clean compatibility.

Showerhead & Gas Distribution

0020-07595: Showerhead assembly, ULTIMA 200 mm — 1,024-hole pattern, aluminum, single-zone gas distribution for TEOS and silane-based CVD processes.

0020-14823: Showerhead backing plate, ULTIMA — provides structural support and secondary gas plenum for dual-zone showerhead configurations.

0020-22041: Gas distribution ring, ULTIMA DC214 — peripheral gas injection ring for edge uniformity correction in etch applications.

Susceptor & Heater Assemblies

0020-09876: Susceptor assembly, 200 mm ULTIMA — resistively heated, single-zone, rated to 650°C, compatible with tungsten CVD and TEOS oxide processes.

0020-18432: Susceptor lift pin assembly, ULTIMA — ceramic-tipped, 3-pin configuration, compatible with all ULTIMA 200 mm chamber generations.

0020-27654: Heater element, ULTIMA HT susceptor — high-temperature variant rated to 750°C for advanced dielectric deposition applications.

RF & Matching Network Components

0020-13291: RF match network assembly, ULTIMA — 13.56 MHz, auto-tuning L-type match, compatible with Gen 2 and Gen 3 ULTIMA plasma etch chambers.

0020-16784: RF feed-through assembly, ULTIMA — ceramic-sealed coaxial feed-through rated to 5 kW continuous RF power.

Slit Valve & Chamber Body

0020-08843: Slit valve door assembly, ULTIMA — pneumatically actuated, compatible with Brooks and Asyst wafer handling robots.

0020-21567: Chamber body O-ring kit, ULTIMA DC214 — Viton and Kalrez compound set for all primary vacuum sealing interfaces.

0020-30198: Slit valve actuator, ULTIMA HT — upgraded digital actuator replacing the analog Gen 1 pneumatic assembly, compatible with AMAT software stack v4.x and above.

Sourcing Hard-to-Find & Obsolete ULTIMA Parts

Applied Materials formally transitioned the ULTIMA platform to sustaining-only support status. OEM lead times for blocker baffles, clean port liners, and showerhead assemblies now routinely exceed 16–26 weeks, and select part numbers have been discontinued entirely. DriveKNMS maintains a dedicated inventory of ULTIMA consumables and structural components sourced through authorized secondary market channels, including decommissioned fab equipment, certified refurbishment programs, and direct manufacturer surplus.

DriveKNMS provides the following lifecycle extension services for ULTIMA operators:

— Obsolete part identification: Cross-referencing discontinued Applied Materials part numbers to compatible aftermarket or refurbished equivalents.
— Condition-graded inventory: New-surplus, refurbished-tested, and used-inspected grades available with full traceability documentation.
— Emergency fulfillment: Priority processing for unplanned chamber downtime events, with same-day quotation on in-stock items.
— Long-term supply agreements: Scheduled delivery contracts for fabs with predictable PM (preventive maintenance) cycles requiring recurring blocker baffle and clean port liner replacement.

Quality Control for the ULTIMA Range

ULTIMA chamber components — particularly blocker baffles, showerhead assemblies, and clean port liners — operate in corrosive plasma environments with strict dimensional and surface finish tolerances. DriveKNMS applies the following inspection protocol to all ULTIMA parts prior to shipment:

— Dimensional verification: CMM (coordinate measuring machine) inspection of critical mating surfaces, including blocker plate flatness (≤0.05 mm), hole pattern pitch, and clean port bore diameter.
— Surface condition assessment: Visual and optical inspection for anodization integrity, plasma erosion depth, and particulate contamination on gas-wetted surfaces.
— Vacuum integrity test: Helium leak testing on all O-ring-sealed assemblies to confirm leak rates below 1×10⁻⁹ mbar·L/s.
— Electrical continuity check: Resistance measurement on RF feed-throughs and heater elements to verify no open-circuit or degraded insulation conditions.
— Traceability documentation: Each shipped part is accompanied by an inspection report, part number confirmation, and condition grade certificate.