Applied Materials AL203 0200-09429 V10PFT03DX2 853-200977-002: Window AL203 Coated BWCVD –

Technical Dossier

Product Details And Specifications

Applied Materials AL203 Series: Comprehensive Module Range and Technical Overview

The Applied Materials AL203 series represents a critical component family within the semiconductor capital equipment ecosystem, specifically engineered for Chemical Vapor Deposition (CVD) and related thin-film deposition platforms. AL203-designated parts — including coated process windows, chamber liners, and dielectric components — are deployed across high-volume manufacturing fabs operating 200mm and 300mm wafer processes globally. These components are integral to Applied Materials' Producer, Centura, and Endura platform chambers, which are installed in logic, memory, and advanced packaging fabs operated by TSMC, Samsung, Intel, SK Hynix, and Micron. The AL203 coating (aluminum oxide, Al₂O₃) provides plasma-resistant, chemically inert surfaces that extend chamber component lifetimes under aggressive fluorine and chlorine chemistries. Installed base spans semiconductor fabs across the United States, Taiwan, South Korea, Japan, and China, with tens of thousands of units in active service across mature and leading-edge nodes.

The Evolution of AL203 Architecture

Applied Materials introduced aluminum oxide (Al₂O₃) coated chamber components as a response to accelerating plasma erosion rates in high-density plasma CVD and ALD processes during the late 1990s and early 2000s. Early-generation AL203 parts were produced via thermal spray coating on aluminum substrates, offering moderate plasma resistance suitable for oxide and nitride deposition. As process chemistries became more aggressive — particularly with the adoption of high-k dielectrics (HfO₂, Al₂O₃ ALD) and fluorine-based cleans — Applied Materials transitioned to denser, higher-purity Al₂O₃ coatings applied via BWCVD (Blanket Wafer CVD) and advanced plasma spray techniques.

The V10PFT03DX2 variant designation indicates a specific platform-generation fit, with dimensional tolerances and coating thickness specifications matched to Producer GT and Centura chamber configurations. The 853-200977-002 assembly number cross-references the Applied Materials internal BOM, confirming this is a second-revision assembly with updated coating uniformity specifications. Compatibility considerations are critical: AL203 windows are not interchangeable across chamber generations without engineering review, as RF coupling characteristics and thermal expansion coefficients differ between platform variants. End-of-life for original OEM supply of several AL203 sub-variants has been confirmed, making third-party sourcing and refurbishment the primary supply channel for installed base maintenance.

AL203 Full Catalog & Functionalities (SKU List)

The following SKUs represent the core AL203 series component range across Applied Materials CVD and etch platforms. Each part is classified by function:

Process Windows & Dielectric Liners

• 0200-09429 / V10PFT03DX2 / 853-200977-002: Window, AL203 coated, BWCVD; plasma-facing dielectric window for Producer/Centura CVD chambers.
• 0200-09430: Window, AL203 coated, 200mm chamber variant; alternate dimensional spec for high-density plasma chambers.
• 0200-09431: Window, AL203 coated, 300mm platform; extended diameter for Centura 300mm process modules.
• 0200-35391: Liner, AL203 coated, chamber body; cylindrical liner protecting chamber sidewalls in fluorine-chemistry environments.
• 0200-35392: Liner, AL203 coated, upper; top-section chamber liner for Producer GT modules.
• 0200-40123: Dome, AL203 coated, quartz substrate; upper dome assembly with AL203 overcoat for plasma uniformity.

Showerhead & Gas Distribution Components

• 0200-09500: Showerhead, AL203 coated, 200mm; gas distribution faceplate with AL203 plasma-resistant coating.
• 0200-09501: Showerhead, AL203 coated, 300mm; high-uniformity gas distribution for 300mm Centura chambers.
• 0200-09502: Blocker plate, AL203 coated; secondary gas distribution element upstream of showerhead.
• 0200-09503: Baffle, AL203 coated; flow-conditioning insert for uniform precursor distribution.

Edge Ring & Focus Ring Components

• 0200-20100: Edge ring, AL203 coated, 200mm; wafer edge confinement ring for etch uniformity control.
• 0200-20101: Focus ring, AL203 coated, 300mm; electrostatic chuck peripheral ring for plasma confinement.
• 0200-20102: Confinement ring, AL203 coated; plasma confinement assembly for Producer HT modules.

Chamber Body & Structural Components

• 0200-30010: Chamber body insert, AL203 coated; structural insert protecting chamber body from plasma erosion.
• 0200-30011: Slit valve door, AL203 coated; wafer transfer port door with plasma-resistant coating.
• 0200-30012: Pumping plate, AL203 coated; exhaust-side plate controlling gas flow symmetry in CVD chambers.
• 0200-30013: Lid, AL203 coated, chamber top; upper chamber closure with integrated AL203 coating for process isolation.
• 0200-30014: Susceptor shield, AL203 coated; protective shroud around wafer susceptor assembly.

Sourcing Hard-to-Find & Obsolete AL203 Parts

A significant portion of the AL203 component catalog has transitioned to end-of-life (EOL) or limited-availability status through Applied Materials' OEM supply chain. Production fabs operating legacy Producer, Centura, and Endura platforms — particularly those running 130nm to 28nm node processes — face extended lead times of 26–52 weeks for new OEM parts, or outright discontinuation notices. DriveKNMS maintains a dedicated inventory of AL203 series components sourced through certified secondary market channels, including decommissioned fab equipment, controlled refurbishment programs, and direct manufacturer surplus. All AL203 parts in DriveKNMS inventory are catalogued by OEM part number, assembly revision, and coating condition grade. For obsolete AL203 variants where new stock is unavailable, DriveKNMS offers refurbishment services including AL203 recoating to OEM-equivalent specifications, dimensional inspection per Applied Materials engineering drawings, and functional validation prior to shipment. Lifecycle extension support is available for the full AL203 range, enabling fabs to defer capital equipment replacement and maintain process continuity on installed platforms.

Quality Control for the AL203 Range

AL203 coated components present specific inspection challenges due to the thin-film nature of the aluminum oxide coating and the precision dimensional tolerances required for chamber fit. DriveKNMS applies a multi-stage quality control protocol to all AL203 parts:

• Visual & Dimensional Inspection: Each component is inspected under controlled lighting for coating delamination, micro-cracking, particulate contamination, and mechanical damage. Critical dimensions — including window thickness, flatness, and edge chamfer geometry — are verified against OEM specifications using calibrated metrology equipment.
• Coating Integrity Assessment: AL203 coating thickness and adhesion are evaluated using non-destructive methods. Parts exhibiting coating erosion below minimum thickness thresholds are routed to recoating rather than direct resale.
• Cleanliness Verification: All AL203 components are cleaned in a controlled environment to semiconductor-grade cleanliness standards (Class 100 / ISO 5 equivalent) prior to packaging. Particle counts are verified per SEMI standard protocols.
• Functional Compatibility Check: Part numbers and revision codes are cross-referenced against Applied Materials BOM databases to confirm platform compatibility before shipment. Assembly numbers (e.g., 853-200977-002) are verified to match the customer's chamber configuration.
• Packaging & Traceability: Each AL203 component is individually packaged in anti-static, cleanroom-compatible materials with full traceability documentation including part number, serial/lot number, inspection date, and technician certification.

For sourcing inquiries, availability checks, or technical consultation on Applied Materials AL203 series components:

• Email: sale@driveknms.com
• WhatsApp: +86 18359293191
• Web: driveknms.com

© 2026 DriveKNMS. All trademarks belong to their respective owners. Specifications are for reference only and subject to change without notice. Verify all parameters against official documentation before installation.