Model: 50020R-10 810-002895-232 0041-81423 C2088 HC-SFS202
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Commercial Path
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Technical Dossier
The LAM RESEARCH HC-SFS202 Node Rocker Valve is a precision pneumatic control component deployed across LAM Research etch and CVD (Chemical Vapor Deposition) process chambers. LAM Research Corporation, headquartered in Fremont, California, USA, is a Tier-1 OEM supplier to global semiconductor fabs including TSMC, Samsung, SK Hynix, and Micron. The HC-SFS202 series rocker valve assemblies are integral to gas delivery and process isolation subsystems within LAM Kiyo, Flex, and Versys platform tools. These valves regulate ultra-high-purity (UHP) gas flow paths in environments requiring sub-atmospheric pressure control, corrosion resistance to halogen-based chemistries (Cl₂, HBr, NF₃), and cycle lifetimes exceeding 10 million actuations. Their deployment spans 200mm and 300mm wafer process tools across chemical etch, plasma strip, and ALD (Atomic Layer Deposition) modules in fabs operating 24/7 across Asia, North America, and Europe.
LAM Research's node rocker valve architecture has evolved through multiple platform generations. Early-generation valves deployed on the TCP (Transformer Coupled Plasma) and Rainbow etch platforms used single-solenoid actuation with manual position feedback. The transition to the Kiyo and Flex platforms introduced dual-solenoid redundancy, integrated position sensors, and PTFE-lined flow bodies compatible with aggressive halogen chemistries. The HC-SFS202 designation reflects the current-generation SFS (Solenoid-actuated Flow Switch) architecture, incorporating a rocker mechanism that provides positive shutoff with low dead volume — a critical parameter in ALD and ALE (Atomic Layer Etch) applications where gas pulse sequencing must be controlled to millisecond precision. Compatibility across platform generations requires attention to port sizing (VCR vs. Swagelok), solenoid voltage (24VDC vs. 110VAC), and connector pinout (M12 vs. Molex). Obsolete early-generation equivalents include the 0041-81423 and C2088 assemblies, which share the same rocker body but differ in solenoid coil specification and body material (anodized aluminum vs. PVDF).
The following SKUs represent verified LAM RESEARCH part numbers associated with the HC-SFS202 Node Rocker Valve series and its direct cross-reference equivalents. Parts are classified by functional role within the gas delivery and process isolation subsystem:
Node Rocker Valve Assemblies (Primary)
Each HC-SFS202 series rocker valve processed by DriveKNMS undergoes a structured inspection and functional test protocol specific to the solenoid-actuated rocker mechanism and UHP gas service requirements. Incoming inspection covers body integrity (no porosity, no corrosion pitting), solenoid coil resistance measurement (±5% of OEM specification), and seal condition assessment (PTFE seats and Kalrez O-rings). Functional testing includes pneumatic leak-down at 150% of rated working pressure (helium leak test to 1×10⁻⁹ atm·cc/s), solenoid actuation cycle test (minimum 500 cycles), and position sensor output verification (4–20mA or discrete NPN/PNP per part variant). Parts that have been remanufactured or rebuilt are re-tested to the same protocol and shipped with a DriveKNMS Certificate of Conformance (CoC) and full test data sheet.
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