Model: 50020R-10 810-013872-108 48-8-16 PS/AUX 00-88060-004 281-500463-9 208-500463-2
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Technical Dossier
The LAM RESEARCH 50020R series represents a family of power supply and node-type interface modules deployed across LAM Research etch and deposition platforms, including the Versys, Kiyo, and Flex product lines. These modules are embedded in process chambers and equipment controllers at semiconductor fabs, flat-panel display manufacturers, and advanced packaging facilities worldwide. The 50020R architecture provides regulated auxiliary power distribution and node-level communication between the equipment controller and chamber subsystems. Due to the long operational lifecycles of semiconductor capital equipment—often 10 to 20 years—the 50020R series remains in active demand for maintenance, retrofit, and emergency replacement across installed bases in Asia, North America, and Europe.
The specific unit covered by this listing—50020R-10 810-013872-108 48-8-16 PS/AUX 00-88060-004 281-500463-9 208-500463-2—is a node-type power supply auxiliary module. It carries multiple cross-reference part numbers (810-013872-108, 00-88060-004, 281-500463-9, 208-500463-2), reflecting LAM Research's internal revision and assembly tracking system. The 48-8-16 designation indicates the module's I/O or power rail configuration within the node architecture.
LAM Research's node-type module architecture evolved alongside the transition from proprietary VME-based equipment controllers to distributed I/O and embedded PC-based control platforms. Early 50020R variants were designed for the Rainbow and TCP etch systems of the 1990s, where centralized power distribution was managed through backplane-mounted auxiliary boards. As LAM migrated to the Versys and Kiyo platforms in the 2000s, the 50020R family was adapted to support higher-density I/O configurations and improved EMI shielding requirements for RF-intensive etch environments.
The multi-part-number convention (e.g., 810-013872-108 alongside 281-500463-9 and 208-500463-2) reflects LAM's practice of assigning assembly-level, sub-assembly-level, and revision-level identifiers to the same physical module. Compatibility between revisions is not always guaranteed; engineers sourcing replacement units must verify the full part number string against the equipment's bill of materials (BOM) or field service documentation. The 50020R series is now considered mature-to-end-of-life by LAM Research, meaning OEM new-build availability is limited and aftermarket sourcing is the primary procurement channel for most fabs.
The following SKUs represent documented modules within the LAM RESEARCH 50020R and closely associated node/power supply families. Each entry reflects a distinct assembly or revision with a defined functional role within LAM etch and CVD equipment platforms.
50020R-10 810-013872-108 48-8-16 PS/AUX 00-88060-004 281-500463-9 208-500463-2: Node-type auxiliary power supply module; multi-reference assembly for Versys/Kiyo platforms.
50020R-10: Base revision of the 50020R node power supply; auxiliary rail distribution for chamber subsystems.
810-013872-108: LAM assembly-level part number for the 50020R-10 PS/AUX node board.
810-013872-100: Earlier revision of the 810-013872 assembly; used in prior-generation etch tool configurations.
810-013872-101: Intermediate revision; incorporates updated capacitor specification for improved thermal stability.
00-88060-004: Sub-assembly cross-reference for the 50020R-10 node module; tracks PCB-level revision.
00-88060-001: Original sub-assembly revision; found in early Versys Metal and Versys Oxide installations.
281-500463-9: Component-level part number assigned to the 50020R-10 auxiliary power node assembly.
281-500463-1: First-generation component reference for the 500463 power node family.
208-500463-2: Secondary cross-reference number; used in LAM field service and spare parts ordering systems.
208-500463-1: Predecessor cross-reference; associated with earlier 48-rail node configurations.
50020R-20: Extended I/O variant of the 50020R node family; supports higher channel-count configurations.
50020R-30: High-density node module; designed for multi-chamber cluster tool architectures.
50020R-40: Revised power architecture variant; incorporates updated DC-DC conversion topology.
50020R-50: Final production revision of the 50020R series; enhanced EMI filtering for RF etch environments.
810-049266-101: Related LAM node power board; functionally equivalent in select Kiyo platform configurations.
810-049266-102: Revised version of the 810-049266 node assembly; updated for Flex series compatibility.
The 50020R PS/AUX node module requires specialized test procedures due to its role in distributing regulated auxiliary power across the equipment node bus. DriveKNMS applies the following verification protocol to all 50020R units prior to shipment:
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