Lam Research 715-130079-008 PS60-010-L2 CFP-BP-8 Holder – Obsolete Semiconductor Spare Part

Technical Dossier

Product Details And Specifications

Lam Research 715-130079-008 PS60-010-L2 CFP-BP-8 Holder – Obsolete Semiconductor Spare Part

RFQ support for obsolete parts: Send the model number, required quantity and destination so DriveKNMS can confirm sourcing options before quotation.

Technical Specifications

Note: Electrical and dimensional parameters are not published here to prevent misapplication. Contact our technical team for full datasheet verification before ordering.

Solving the Discontinued Hardware Crisis

Lam Research's PS60-series process modules were deployed extensively across 200mm and early 300mm fabs during a period when semiconductor manufacturing was scaling aggressively. Many of those tools remain in production today — running mature nodes for power devices, MEMS, compound semiconductors, and specialty analog ICs where process re-qualification on a new platform is prohibitively expensive.

The CFP-BP-8 holder assembly is a structural and alignment-critical component within the chamber. Its function is not cosmetic: it maintains the positional integrity of process-facing hardware. Wear, corrosion, or mechanical failure of this part directly affects process uniformity, which in a production environment translates to yield loss before the tool even goes into alarm.

How to extend your Lam Research legacy tool life by 5–10 years:

Condition & Reliability Assurance

Every 715-130079-008 unit that leaves DriveKNMS goes through a structured 5-step inspection protocol before dispatch review:

Key Features for System Maintenance

• Drop-in replacement: The 715-130079-008 is a direct OEM-equivalent. No chamber modification, no new fixturing, no process re-qualification required.
• No re-programming required: This is a mechanical component. Swapping it does not affect recipe parameters, RF matching, or gas delivery calibration.
• Avoids engineering retrofit costs: Using the correct OEM part number eliminates the engineering hours and process risk associated with adapting a non-equivalent component.
• Supports extended tool life: Keeping this part available on the shelf is the single most cost-effective action a maintenance team can take to protect a PS60-series tool investment.
• Traceable sourcing: DriveKNMS provides sourcing documentation on request, supporting your internal audit and equipment qualification records.