Lam Research Confinement Ring 713-028487-001 / 0020-35057 / 100-132-135

Technical Dossier

Product Details And Specifications

Lam Research Confinement Ring Series: Comprehensive Part Range and Technical Overview

The Evolution of Lam Research Confinement Ring Architecture

Lam Research introduced confinement ring assemblies as a plasma boundary management solution in its early TCP (Transformer Coupled Plasma) etch platforms in the 1990s. The original designs used alumina (Al₂O₃) as the primary dielectric material, providing adequate plasma resistance for 200mm wafer processing at the process conditions of that era. As device geometries shrank below 130nm and etch selectivity requirements tightened, Lam transitioned to yttria-coated (Y₂O₃) and quartz variants to reduce particle generation and extend mean time between cleans (MTBC).

With the introduction of the Kiyo and Flex platforms targeting sub-10nm logic and 3D NAND etch, confinement ring geometry became more complex — incorporating multi-piece assemblies with precision-machined slots to control gas flow uniformity across the wafer edge. The part numbers in the 713-XXXXXX-XXX series reflect Lam's internal engineering change order (ECO) revision system, where the suffix (-001, -002, etc.) denotes incremental design revisions. Cross-reference numbers in the 0020-XXXXX and 100-XXX-XXX formats are used in Lam's field service and spare parts management systems respectively. Older 200mm-era confinement rings are now classified as end-of-life (EOL) by Lam Research, with no active OEM replenishment — making third-party MRO sourcing the primary supply channel for fabs still operating legacy tools.

Lam Research Confinement Ring Full Catalog & Functionalities (SKU List)

The following part numbers represent the confinement ring and closely related plasma-boundary consumables used across Lam Research etch platforms. All SKUs are verified against Lam Research service documentation and cross-reference databases:

713-028487-001: Confinement ring assembly, primary OEM part number, TCP/Kiyo etch chamber compatible.
0020-35057: Field service cross-reference for 713-028487-001; used in Lam FSE documentation.
100-132-135: MRO catalog cross-reference identifier for the same confinement ring assembly.
716-028487-001: Confinement ring, alternate material grade (yttria-coated), extended MTBC variant.
0020-35058: Confinement ring lower section, paired assembly component for multi-piece configurations.
713-034567-001: Confinement ring, Flex series platform, 300mm process chamber.
0020-41233: Confinement ring upper, Kiyo 45 series, quartz material.
713-041200-001: Confinement ring assembly, Kiyo 45XL, high-aspect-ratio etch configuration.
0020-29876: Confinement ring, TCP 9400SE, 200mm legacy platform.
713-019823-001: Confinement ring, TCP 9400PT, alumina grade, EOL classification.
100-118-042: Confinement ring retainer clip set, compatible with 713-028487-001 assembly.
0020-38812: Confinement ring, Versys Metal platform, PVD/etch hybrid chamber.
713-052341-001: Confinement ring, Sense.i platform, advanced process control (APC) compatible.
0020-44501: Confinement ring, Flex F series, low-k dielectric etch optimized.
713-061002-001: Confinement ring assembly, Kiyo C series, conductor etch, latest ECO revision.
100-145-221: Confinement ring, Syndion series, through-silicon via (TSV) etch application.