LAM Research 715-032760-106 / 712-214892-000 Modules Etcher Inner Gate Valve Drive Assy OD 22CM ID 20CM

Technical Dossier

Product Details And Specifications

LAM Research Gate Valve Drive Assembly Series Technical Notes

The Evolution of LAM Research Gate Valve Drive Architecture

LAM Research's gate valve drive assemblies have evolved across multiple platform generations. Early Exelan and 2300 Versys platforms used pneumatically actuated gate valves with discrete solenoid control. As process requirements tightened through the 90nm–28nm nodes, LAM transitioned to electromechanical drive assemblies with integrated position feedback, enabling closed-loop valve positioning and improved seal repeatability. The 715-XXXXXX and 712-XXXXXX part number families represent the mature electromechanical generation, designed for compatibility with LAM's Kiyo, Flex, and 2300 Versys etch platforms. Cross-compatibility between 715 and 712 series numbers is common — many assemblies share the same mechanical interface but differ in actuator torque rating or encoder resolution. As these platforms enter the mature/end-of-life support phase, OEM spare parts availability has declined, making third-party certified inventory sources essential for fab continuity.

LAM Research Gate Valve Drive Assembly Full Catalog & Functionalities (SKU List)

The following SKUs represent verified part numbers within the LAM Research gate valve drive and related valve actuation subsystem families. Each entry reflects a distinct functional variant or cross-reference within the 715/712 series ecosystem.

715-032760-106: Inner gate valve drive assy, OD 22CM, ID 20CM, primary etch chamber isolation actuator
712-214892-000: Cross-reference / alternate PN for 715-032760-106; same mechanical envelope, alternate vendor sourcing
36831: Internal LAM fab tracking reference / lot code associated with this assembly build
15965001: Sub-assembly or component reference number linked to the drive mechanism
715-032760-100: Base revision of the inner gate valve drive assy; earlier torque specification
715-032760-105: Revision 5 intermediate build; updated seal material for fluorine-compatible process environments
715-032760-107: Revision 7; modified encoder bracket for improved position feedback accuracy
712-214892-001: Revision 1 of the 712 cross-reference; updated actuator motor winding
712-214892-002: Revision 2; modified cable harness routing for 2300 Versys platform clearance
715-033100-001: Outer gate valve drive assy; paired component for full valve replacement kits
715-033100-002: Outer gate valve drive assy, revision 2; updated bearing preload specification
715-034500-001: Gate valve actuator motor sub-assembly; field-replaceable drive motor unit
715-034500-002: Gate valve actuator motor sub-assembly, revision 2; higher duty cycle rating
712-215000-000: Gate valve position sensor assembly; integrated with 715-032760-106 drive unit
712-215000-001: Position sensor assembly, revision 1; extended temperature range specification
715-035200-001: Gate valve seal kit; O-ring and lip seal set for drive assy rebuild
715-035200-002: Gate valve seal kit, fluoroelastomer grade; for HBr and Cl2 process compatibility
712-216000-000: Gate valve drive cable harness assembly; connects actuator to chamber I/O board
715-036000-001: Gate valve drive mounting bracket; chamber-side interface hardware

Quality Control for the LAM Research Gate Valve Drive Assembly Range

Gate valve drive assemblies present specific inspection challenges due to their combined mechanical, electromechanical, and sealing functions. DriveKNMS applies a multi-stage inspection protocol to all 715/712 series units prior to shipment. Mechanical inspection covers actuator shaft runout, bearing play, and mounting interface dimensional verification against OEM drawings. Electrical inspection covers motor winding resistance, insulation resistance, and encoder signal integrity under simulated load. Seal condition is assessed visually and by durometer measurement; any unit with seal compression set exceeding tolerance is rebuilt with new OEM-grade seal kits (715-035200-001 / -002). Position sensor calibration is verified against reference targets. All units are documented with inspection records and shipped with a certificate of conformance. Units sourced for critical process chambers are available with extended burn-in testing on request.