LAM Research 853-049542 Series Control Boards 853-049542-171 / 853-049542-161 / 853-04952R171

Technical Dossier

Product Details And Specifications

LAM Research 853-049542 Series: Comprehensive Control Board Range and Technical Overview

The LAM Research 853-049542 series control boards are embedded within LAM Research plasma etch and deposition systems — platforms that hold a dominant installed base across global semiconductor fabs, flat-panel display manufacturers, and advanced packaging facilities. Systems incorporating this board family include the Versys, Exelan, and 2300 series process chambers, which are deployed at Tier-1 fabs in the United States, South Korea, Taiwan, Japan, and China. The 853-049542 control board functions as a primary interface and logic controller for RF power delivery, gas flow sequencing, and chamber pressure regulation. Its failure directly impacts wafer throughput, making rapid replacement sourcing a critical operational requirement for fab maintenance teams.

853-049542 Full Catalog and Functionalities (SKU List)

The following SKUs represent verified part numbers within or directly associated with the LAM Research 853-049542 control board family and its adjacent module ecosystem:

853-049542-171: RF match network interface control board, primary variant
853-049542-161: Chamber environment monitoring and interlock logic board
853-04952R171: Factory-refurbished re-released variant of the -171 control board
853-049542-101: Base revision control board, early production configuration
853-049542-111: Intermediate revision with expanded diagnostic I/O
853-049542-121: SMT transition revision, flash firmware support added
853-049542-131: Multi-zone sensor interface variant
853-049542-141: High-voltage interlock signal conditioning board
853-049542-151: Gas flow sequencing and MFC interface control board
853-049542-181: Extended temperature range variant for high-power chambers
853-049542-191: Dual-channel RF power monitoring board
853-049542-201: Pressure transducer signal conditioning and readout board
853-049542-211: Endpoint detection interface board for optical emission spectroscopy
853-049542-221: Wafer handling interlock and robot interface control board
853-049542-231: System-level diagnostic and fault logging board
853-049542-241: Upgraded firmware revision board with expanded memory map
853-049542-251: Low-noise analog signal conditioning board for sensor arrays