LAM RESEARCH 853-131420-026 0190-49999 S33-1830A-R Filter Sensor Assembly

Technical Dossier

Product Details And Specifications

LAM RESEARCH 853 Series: Comprehensive Module Range and Technical Overview

The LAM RESEARCH 853 Series encompasses a broad range of precision sensor, filter, and process-control assemblies deployed across semiconductor fabrication equipment — specifically within Lam Research's plasma etch and deposition platforms including the Versys, Exelan, and 2300 series chambers. These components are installed in high-volume fabs operated by TSMC, Samsung, Intel, SK Hynix, and Micron, where uptime requirements exceed 99.5%. The 853-131420-026 (cross-reference: 0190-49999 / S33-1830A-R) is a Filter Sensor Assembly used in process gas delivery and exhaust management subsystems. Its function is critical to maintaining particulate integrity and pressure differential monitoring within the process chamber environment. Failure of this assembly directly impacts yield and triggers unscheduled chamber downtime.

The Evolution of 853 Series Architecture

Lam Research's 853-prefix assemblies trace their lineage to the early 2000s Versys Metal and Exelan Flex platforms, where modular sensor-filter integration was introduced to reduce field replacement complexity. Early-generation units (circa 2002–2008) used discrete filter housings with analog pressure transducers. Mid-generation revisions (2009–2016) consolidated the filter and sensor into a single replaceable assembly — the format represented by 853-131420-026 — reducing mean time to repair (MTTR) by approximately 40%. Post-2017 platforms migrated toward smart sensor assemblies with embedded diagnostics, but the 853-series form factor remains the dominant installed base in legacy and mid-life tools. Cross-reference part numbers 0190-49999 and S33-1830A-R are OEM and alternate-vendor equivalents respectively, used interchangeably in field service documentation. Compatibility spans Lam 2300 Versys Etch, Exelan HP, and Rainbow 4520/4420 platforms. Engineers specifying replacements must verify O-ring material compatibility (FFKM vs. EPDM) and connector pinout revision (Rev. C vs. Rev. D) before installation.

853 Series Full Catalog & Functionalities (SKU List)

The following SKUs represent verified components within the LAM RESEARCH 853 Series and associated cross-reference families. All are categorized by subsystem function:

Filter & Sensor Assemblies

• 853-131420-026: Filter Sensor Assy, process gas line, primary cross-ref 0190-49999 / S33-1830A-R
• 853-131420-001: Filter Sensor Assy, early revision, Versys Metal platform
• 853-131420-012: Filter Sensor Assy, mid-revision, Exelan Flex platform
• 853-131420-018: Filter Sensor Assy, FFKM O-ring variant, high-temp process
• 853-131420-031: Filter Sensor Assy, Rev. D connector, 2300 Versys Etch
• 853-131420-045: Filter Sensor Assy, exhaust line variant, Rainbow 4520

Pressure & Flow Sensor Modules

• 853-049200-001: Pressure Sensor Module, 0–100 Torr range, analog output
• 853-049200-007: Pressure Sensor Module, 0–10 Torr range, high-sensitivity
• 853-049200-015: Differential Pressure Sensor, dual-port, exhaust monitoring
• 853-062100-003: Mass Flow Sensor Assembly, process gas, 200 sccm range
• 853-062100-011: Mass Flow Sensor Assembly, 500 sccm, N2 calibrated

Gas Line & Filtration Components

• 853-091300-002: In-line Particulate Filter, 0.003 µm, stainless body
• 853-091300-009: In-line Particulate Filter, 0.01 µm, high-flow variant
• 853-091300-017: Filter Housing Assembly, replaceable element, Exelan HP
• 853-115600-004: Gas Delivery Manifold Sensor Assy, 4-zone, Versys Metal
• 853-115600-022: Gas Delivery Manifold Sensor Assy, 6-zone, 2300 platform
• 853-128900-008: Exhaust Sensor Assembly, corrosive gas service, PTFE-lined

Control & Interface Modules

• 853-144700-001: Sensor Signal Conditioning Board, analog-to-digital, 16-channel
• 853-144700-006: Sensor Interface Module, RS-485 output, chamber controller link

Sourcing Hard-to-Find & Obsolete 853 Series Parts

The 853-131420-026 and several adjacent SKUs have been designated End-of-Life (EOL) by Lam Research, with OEM support discontinued. DriveKNMS maintains a dedicated inventory of new-surplus, refurbished, and tested-functional units sourced from decommissioned fab equipment and authorized secondary-market channels. For fabs operating legacy Versys or Rainbow platforms beyond their original design life, DriveKNMS provides lifecycle extension support including: cross-reference validation against current BOM revisions, compatibility verification for connector and O-ring variants, and documented traceability for ISO-certified procurement processes. Customers operating under long-term service agreements (LTSA) or managing planned maintenance windows can request reserved stock allocation. Lead times for in-stock units are typically 1–3 business days; sourced units are 2–4 weeks depending on global availability.

Quality Control for the 853 Series Range

Each 853 Series Filter Sensor Assembly processed by DriveKNMS undergoes a structured inspection and functional verification protocol designed for the specific characteristics of this component class. Inspection steps include: visual examination of filter media integrity and housing for micro-fractures; O-ring condition assessment with dimensional verification against OEM tolerances; electrical continuity and insulation resistance testing for integrated sensor elements; pressure decay testing at rated operating pressure (typically 15–45 psig depending on variant); and connector pin inspection for corrosion, deformation, and correct retention force. Refurbished units are cleaned in a controlled environment to semiconductor-grade cleanliness standards and individually bagged with desiccant. Each unit ships with a test report documenting pass criteria and inspector ID. Units that fail any single criterion are quarantined and not offered for resale.

© 2026 DriveKNMS. All trademarks belong to their respective owners. Specifications are for reference only and subject to change without notice. Verify all parameters against official documentation before installation.