LAM RESEARCH 853-131420-026 0190-49999 S33-1830A-R Filter Sensor Assembly

Technical Dossier

Product Details And Specifications

LAM RESEARCH 853 Series Technical Notes

The Evolution of 853 Series Architecture

Lam Research's 853-prefix assemblies trace their lineage to the early 2000s Versys Metal and Exelan Flex platforms, where modular sensor-filter integration was introduced to reduce field replacement complexity. Early-generation units (circa 2002–2008) used discrete filter housings with analog pressure transducers. Mid-generation revisions (2009–2016) consolidated the filter and sensor into a single replaceable assembly — the format represented by 853-131420-026 — reducing mean time to repair (MTTR) by approximately 40%. Post-2017 platforms migrated toward smart sensor assemblies with embedded diagnostics, but the 853-series form factor remains the dominant installed base in legacy and mid-life tools. Cross-reference part numbers 0190-49999 and S33-1830A-R are OEM and alternate-vendor equivalents respectively, used interchangeably in field service documentation. Compatibility spans Lam 2300 Versys Etch, Exelan HP, and Rainbow 4520/4420 platforms. Engineers specifying replacements must verify O-ring material compatibility (FFKM vs. EPDM) and connector pinout revision (Rev. C vs. Rev. D) before installation.

853 Series Full Catalog & Functionalities (SKU List)

The following SKUs represent verified components within the LAM RESEARCH 853 Series and associated cross-reference families. All are categorized by subsystem function:

Filter & Sensor Assemblies

• 853-131420-026: Filter Sensor Assy, process gas line, primary cross-ref 0190-49999 / S33-1830A-R
• 853-131420-001: Filter Sensor Assy, early revision, Versys Metal platform
• 853-131420-012: Filter Sensor Assy, mid-revision, Exelan Flex platform
• 853-131420-018: Filter Sensor Assy, FFKM O-ring variant, high-temp process
• 853-131420-031: Filter Sensor Assy, Rev. D connector, 2300 Versys Etch
• 853-131420-045: Filter Sensor Assy, exhaust line variant, Rainbow 4520

Pressure & Flow Sensor Modules

• 853-049200-001: Pressure Sensor Module, 0–100 Torr range, analog output
• 853-049200-007: Pressure Sensor Module, 0–10 Torr range, high-sensitivity
• 853-049200-015: Differential Pressure Sensor, dual-port, exhaust monitoring
• 853-062100-003: Mass Flow Sensor Assembly, process gas, 200 sccm range
• 853-062100-011: Mass Flow Sensor Assembly, 500 sccm, N2 calibrated

Gas Line & Filtration Components

• 853-091300-002: In-line Particulate Filter, 0.003 µm, stainless body
• 853-091300-009: In-line Particulate Filter, 0.01 µm, high-flow variant
• 853-091300-017: Filter Housing Assembly, replaceable element, Exelan HP
• 853-115600-004: Gas Delivery Manifold Sensor Assy, 4-zone, Versys Metal
• 853-115600-022: Gas Delivery Manifold Sensor Assy, 6-zone, 2300 platform
• 853-128900-008: Exhaust Sensor Assembly, corrosive gas service, PTFE-lined

Control & Interface Modules

• 853-144700-001: Sensor Signal Conditioning Board, analog-to-digital, 16-channel
• 853-144700-006: Sensor Interface Module, RS-485 output, chamber controller link