Lam Research RF Generator Cable 2M 684-013298-003 0020-32117 1D10-101567-12
Lam Research 2M 684-013298-003 0020-32117 1D10-101567-12 is listed for Controller Cards RFQ review. Confirm quantity, condition and destination before quotation.
Model: UI/FIB JTS SIH4 W/ BD 24 810-111093-100 C1848 , TVB41D-1/TMP 1D81-000140 853-250063-007
Product Overview
Commercial availability is handled through direct RFQ, model verification and export-oriented follow-up rather than public cart checkout.
Datasheet Preview
Use attached product manuals when available. If the manual is not public yet, request the full file directly through RFQ.
Commercial Path
Product pages on DRIVEKNMS are designed to verify model, brand and series first, then move the buyer into one clean quotation path.
Technical Dossier
The TVB41D-1 lineage traces to Lam Research's transition from analog process control to fully digital, bus-based distributed control systems in the mid-1990s. Early Lam platforms used discrete relay logic and analog signal conditioning boards. The introduction of the TMP (Tool Management Processor) architecture standardized inter-board communication via a proprietary backplane bus, enabling modular replacement of individual PCB assemblies without full system reconfiguration.
The following SKUs represent verified assemblies within the Lam Research TVB41D-1 and TMP 1D81 control board ecosystem, organized by functional category:
UI / FIB Interface Boards
810-111093-100: UI/FIB JTS SiH4 interface board, 24V logic, primary process gas signal routing
853-250063-007: PCB assembly, TVB41D-1 variant, fiber-optic isolated I/O, 300mm platform
TMP 1D81-000140: TMP sub-assembly rev -000140, ECO-updated FPGA firmware, backplane bus interface
810-111093-101: UI/FIB JTS SiH4 interface board, rev 101, updated component BOM for RoHS compliance
810-111093-200: UI/FIB JTS SiH4 interface board, 24V, extended temperature range variant
TMP Processor & Control Modules
TMP 1D81-000100: TMP base assembly, initial production revision, 200mm platform compatible
TMP 1D81-000120: TMP assembly rev -000120, revised power regulation section, reduced thermal dissipation
TMP 1D81-000160: TMP assembly rev -000160, expanded diagnostic register map, enhanced fault logging
TMP 1D81-000180: TMP assembly rev -000180, FPGA firmware v3.x, 300mm process recipe support
TMP 1D81-000200: TMP assembly rev -000200, final production ECO, component substitution for obsolete ICs
Backplane & Bus Interface Boards
853-250063-001: PCB backplane interface, TVB series, early revision, 200mm tool configuration
853-250063-003: PCB backplane interface, rev 003, revised connector pinout, improved signal integrity
853-250063-005: PCB backplane interface, rev 005, added ESD protection on all I/O lines
853-250063-009: PCB backplane interface, rev 009, final production revision, full 300mm compatibility
Power & Signal Conditioning
TVB41D-1-PWR: Power conditioning sub-assembly, 24VDC input, regulated 5V/3.3V outputs for TVB41D-1 logic
810-111093-PWR-A: Auxiliary power board, JTS SiH4 subsystem, overcurrent protection, field-replaceable fuse array
The TVB41D-1 and TMP 1D81 series are no longer manufactured by Lam Research. OEM support for these assemblies has been discontinued, and replacement units are not available through authorized Lam Research service channels for most end-users outside of active service contracts. DriveKNMS maintains a dedicated inventory of refurbished, tested, and serialized TVB41D-1 / TMP 1D81 assemblies sourced from decommissioned tools, fab equipment auctions, and controlled surplus channels.
PCB assemblies in the TVB41D-1 / TMP 1D81 series present specific test challenges due to their fiber-optic I/O interfaces, FPGA-based logic, and proprietary Lam Research backplane bus protocol. DriveKNMS applies the following test procedures to all units prior to shipment:
Continue The Model Path
Move from this exact model into the matching system hub, brand archive, model-family archive or lifecycle sourcing route before sending a final RFQ list.