Lam Research SI 716 Chamber Components SI 716-230577-384 / SI 716-230577-941 / 0020-22585 Ring Assy

Technical Dossier

Product Details And Specifications

Lam Research SI 716 Series: Comprehensive Chamber Component Range and Technical Overview

The Lam Research SI 716 platform is a process chamber architecture deployed across high-volume semiconductor fabrication facilities globally, including 200mm and 300mm wafer fabs engaged in plasma etch, CVD, and surface treatment processes. SI 716 chamber components — including ring assemblies, focus rings, confinement rings, and liner kits — are critical consumable and semi-permanent parts that directly govern plasma uniformity, etch selectivity, and chamber-to-chamber matching. These parts are installed in facilities operated by leading IDMs and foundries across the United States, Japan, South Korea, Taiwan, and Europe. The SI 716 series maintains a significant installed base in mature nodes (90nm–350nm) where long-term production continuity depends on reliable spare parts sourcing.

The Evolution of SI 716 Architecture

The SI 716 chamber design traces its lineage to Lam Research's Rainbow and TCP (Transformer Coupled Plasma) etch platforms introduced in the early 1990s. The SI 716 designation encompasses a family of chamber hardware revisions that evolved through multiple generations of process node requirements. Early SI 716 configurations used alumina-based ceramic rings with relatively wide process windows suited to 0.35µm–0.25µm geometries. As device scaling progressed into the 130nm–90nm range, Lam introduced revised ring geometries and yttria-coated (Y₂O₃) components to improve plasma resistance and extend mean time between cleans (MTBC). The SI 716-230577 sub-series — which includes the SI 716-230577-384 and SI 716-230577-941 variants — represents a specific revision level of the ring assembly, differentiated by dimensional tolerances, material grade, or compatibility with specific chamber body revisions. Cross-reference part 0020-22585 is the Lam internal catalog number used in BOM documentation and service manuals. Compatibility between SI 716-230577-384 and SI 716-230577-941 must be verified against the specific chamber serial number and process kit revision before installation.

SI 716 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified components within the Lam Research SI 716 and associated chamber hardware ecosystem. Parts are categorized by function:

Ring Assemblies & Process Kit Components

• SI 716-230577-384: Ring assembly, primary revision 384, plasma-facing chamber component for etch process chambers.
• SI 716-230577-941: Ring assembly, alternate revision 941, dimensional variant for specific chamber body configurations.
• 0020-22585: Lam Research internal BOM cross-reference for SI 716-230577 ring assembly family.
• 0020-22584: Ring assembly, adjacent revision, used in matched process kit configurations alongside 0020-22585.
• 0020-22586: Confinement ring, SI 716 chamber, controls plasma boundary and gas flow uniformity.
• 0020-22587: Focus ring, electrostatic chuck (ESC) compatible, governs ion bombardment angle at wafer edge.
• 0020-22590: Upper electrode assembly component, SI 716 TCP chamber, quartz or silicon material grade.
• 0020-22591: Lower liner, SI 716 chamber body, alumina or yttria-coated variant for fluorine-chemistry processes.
• 0020-22600: Chamber liner kit, SI 716, full set including upper and lower liner segments.
• 0020-22610: Dielectric window, TCP coil-side, quartz grade for high-power plasma coupling.
• 0020-22615: ESC (Electrostatic Chuck) cover ring, SI 716, ceramic grade, wafer edge protection.
• 0020-22620: Gas distribution ring, SI 716, controls process gas injection symmetry.
• 0020-22625: Baffle plate assembly, SI 716, pumping port flow control component.
• 0020-22630: Chamber body O-ring kit, SI 716, fluoroelastomer (FKM/FFKM) grade for vacuum integrity.
• 0020-22635: Lift pin assembly, SI 716, wafer handling interface, ceramic-tipped stainless steel construction.
• 0020-22640: RF match network coupling component, SI 716, used in bias power delivery path.
• 0020-22645: Throttle valve seal kit, SI 716 exhaust system, high-temperature fluoropolymer grade.
• 0020-22650: Showerhead assembly, SI 716 CVD variant, uniform precursor gas distribution plate.

Quality Control for the SI 716 Range

SI 716 ring assemblies and chamber components require specialized inspection protocols due to the precision tolerances governing plasma confinement geometry. DriveKNMS applies the following quality control procedures to all SI 716 parts prior to shipment: dimensional verification using calibrated CMM (Coordinate Measuring Machine) equipment against Lam Research engineering drawing tolerances; surface finish inspection (Ra measurement) for plasma-facing surfaces to confirm coating integrity on yttria or alumina-coated components; visual inspection under UV and white light for micro-cracks, delamination, or contamination on ceramic and quartz parts; helium leak testing for O-ring groove geometry on vacuum-sealing components; and ESD-safe packaging with nitrogen purge for electrostatic-sensitive components including ESC cover rings and RF-path parts. Parts that do not meet dimensional or surface specifications are quarantined and not released to inventory.