MKS 852B12PCJ2GC E3S-LS5C4S 2B FTP B/T SC3000-030 Pressure Transducer

Technical Dossier

Product Details And Specifications

MKS Instruments SC3000 Series Technical Notes

The MKS Instruments SC3000 series of pressure transducers occupies a well-established position in global heavy industry, with documented installations across semiconductor fabrication facilities, chemical processing plants, oil refineries, and nuclear utility support systems. These capacitance manometer-based instruments are engineered for high-accuracy, process-stable pressure measurement in corrosive and ultra-high-purity gas environments. The SC3000 platform is recognized for its compatibility with MKS 670/672 signal conditioners and its role as a primary sensing element in distributed control system (DCS) loops where measurement integrity is non-negotiable.

SC3000 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified, commonly referenced configurations within the MKS SC3000 pressure transducer family. Each entry reflects a distinct combination of pressure range, output type, process connection, and sensor material.

852B12PCJ2GC E3S-LS5C4S 2B FTP B/T SC3000-030: 30 Torr full-scale, 4–20 mA output, Inconel diaphragm, heated sensor body, 2-inch body, FTP signal interface — the specific unit indexed on this page.

852B12PCJ2GC SC3000-001: 1 Torr full-scale capacitance manometer, ultra-high-purity gas service, Inconel diaphragm, 0–10 VDC output.

852B12PCJ2GC SC3000-002: 2 Torr full-scale, standard process connection, analog voltage output, compatible with MKS 670 signal conditioner.

852B12PCJ2GC SC3000-010: 10 Torr full-scale, 4–20 mA current loop output, heated body variant, corrosive gas rated.

852B12PCJ2GC SC3000-100: 100 Torr full-scale, Inconel diaphragm, 2-inch body, FTP interface, suitable for semiconductor etch process chambers.

852B12PCJ2GC SC3000-200: 200 Torr full-scale, dual-range output option, compatible with MKS 672 signal conditioner.

852B12PCJ2GC SC3000-1000: 1000 Torr (atmospheric) full-scale, stainless steel diaphragm, general industrial process gas measurement.

852B12PCJ2GC SC3000-030 B/T: 30 Torr, heated body (B/T) configuration, designed for condensable gas service, maintains sensor at 45°C above ambient.

852B12PCJ2GC SC3000-010 FTP: 10 Torr, FTP (4–20 mA) output variant, loop-powered, HART-compatible signal conditioning.

852B12PCJ2GC SC3000-100 FTP B/T: 100 Torr, heated body, 4–20 mA output, corrosive and condensable gas service.

852B12PCJ2GC SC3000-002 B/T: 2 Torr, heated body, ultra-high-purity diaphragm, semiconductor fab process control.

852B12PCJ2GC SC3000-500: 500 Torr full-scale, Inconel diaphragm, analog output, refinery and chemical plant service.

852B12PCJ2GC SC3000-050: 50 Torr full-scale, standard body, 0–10 VDC output, compatible with legacy DCS analog input cards.

852B12PCJ2GC SC3000-020: 20 Torr full-scale, Inconel diaphragm, FTP output, heated body option available.

852B12PCJ2GC SC3000-005: 5 Torr full-scale, ultra-high-purity configuration, Inconel diaphragm, 0–10 VDC output, low-pressure process gas measurement.

852B12PCJ2GC SC3000-750: 750 Torr full-scale, stainless steel diaphragm, general industrial gas, 4–20 mA output.

Quality Control for the SC3000 Range

SC3000 series pressure transducers present specific verification challenges due to their capacitance sensing element, heated body circuitry, and precision analog output stages. DriveKNMS applies a structured test protocol to all SC3000 units prior to shipment. Each unit undergoes powered functional verification at rated supply voltage, with output signal checked at zero-pressure and at a minimum of three calibrated reference pressures across the full-scale range. Heated body (B/T) variants are verified for correct thermal regulation, confirming that the body temperature stabilizes within the specified setpoint range. The 15-pin D-sub connector and cable interface are inspected for pin integrity and continuity. Units with FTP (4–20 mA) output are verified against a calibrated loop current meter. Zero and span drift are assessed against the original factory specification where reference data is available. Units that do not meet output linearity and repeatability criteria are quarantined and not offered for sale.