MKS EVS9322-ES Transducer Modules: DA01A12TGAS20A00 CP4010 FC-226-02 2709-75313 13190869

Technical Dossier

Product Details And Specifications

MKS EVS9322-ES Series: Comprehensive Module Range and Technical Overview

The MKS EVS9322-ES is a precision gas pressure transducer assembly deployed across critical process control environments including semiconductor fabrication, chemical processing plants, oil refineries, and nuclear facility gas management systems. MKS Instruments, headquartered in Andover, Massachusetts, USA, has supplied pressure and flow measurement instrumentation to heavy industry since 1961. The EVS9322-ES series occupies a well-established position in distributed control system (DCS) architectures where accurate, repeatable gas pressure measurement is a process-safety requirement. The assembly integrates sensing elements, signal conditioning electronics, and process-wetted components into a single field-replaceable unit, reducing mean time to repair (MTTR) in high-uptime facilities.

The specific unit referenced on this page carries the following cross-reference identifiers: DA01A12TGAS20A00, CP4010, FC-226-02, 2709-75313, 13190869, EVS9322-ES. These part numbers appear across OEM documentation, plant maintenance management systems (CMMS), and procurement databases. DriveKNMS maintains verified stock and sourcing channels for this assembly and its functional equivalents.

The Evolution of EVS9322-ES Architecture

MKS Instruments developed the EVS (Enhanced Vacuum/pressure Sensor) platform as a successor to earlier capacitance manometer and Baratron-only configurations. The EVS9322-ES represents a mature generation within this lineage, incorporating stainless-steel wetted surfaces, temperature-compensated signal conditioning, and compatibility with both analog (4–20 mA) and digital (RS-485 / DeviceNet) output protocols depending on configuration suffix.

Early MKS pressure transducers required separate signal conditioners and were not field-configurable. The EVS9322 generation consolidated these functions, enabling direct integration with Yokogawa, Honeywell, Emerson DeltaV, and ABB DCS platforms without external signal conversion. The -ES suffix designates an enhanced-sensitivity variant optimized for low-differential-pressure measurement in gas distribution manifolds. Cross-compatibility with CP4010 controller platforms and FC-226-02 flow controller assemblies confirms this unit's role in multi-instrument process loops rather than standalone measurement.

As the EVS9322-ES series has entered the mature/end-of-active-production phase, MKS has transitioned new designs toward the 910 DualTrans and 925 MicroPirani platforms. However, installed base volumes in long-lifecycle facilities (refineries, nuclear, specialty chemical) ensure continued demand for EVS9322-ES assemblies and sub-components through at least 2035 under standard 20-year plant lifecycle models.

EVS9322-ES Full Catalog & Functionalities (SKU List)

The following SKUs represent verified models within the MKS EVS9322-ES transducer and associated assembly ecosystem. Each entry reflects a distinct configuration, range, or interface variant.

EVS9322-ES: Enhanced-sensitivity gas pressure transducer assembly, primary unit, analog output.
DA01A12TGAS20A00: Full assembly part number; designates gas-service, 20 psia range, stainless wetted parts, 0–10 V output.
CP4010: Controller/power supply module cross-reference; paired signal conditioning platform for EVS9322 series.
FC-226-02: Flow controller sub-assembly reference; integrates with EVS9322-ES in gas panel configurations.
2709-75313: OEM plant maintenance cross-reference number; used in CMMS and SAP PM modules at refinery installations.
13190869: Secondary OEM cross-reference; appears in Emerson and Yokogawa DCS spare parts catalogs.
EVS9322-A: Standard-sensitivity variant, 0–1000 Torr range, 4–20 mA output, general process gas service.
EVS9322-B: High-pressure variant, 0–3000 psia, flanged process connection, refinery hydrogen service.
EVS9322-C: Corrosive-gas variant, Hastelloy C-276 wetted parts, HCl / Cl₂ compatible.
EVS9322-D: Differential pressure variant, ±100 inH₂O range, HVAC and clean-room air balance applications.
EVS9322-ES-485: RS-485 digital output variant; Modbus RTU protocol, DCS direct integration.
EVS9322-ES-DN: DeviceNet fieldbus variant; Allen-Bradley PLC network compatible.
EVS9322-ES-LP: Low-pressure variant, 0–10 Torr range, semiconductor process chamber monitoring.
EVS9322-ES-HT: High-temperature variant, process temperature up to 150 °C, insulated body.
EVS9322-ES-SS316: 316L stainless steel wetted parts, pharmaceutical and food-grade gas service.
EVS9322-ES-ATEX: ATEX Zone 1 / IECEx certified variant, hazardous area gas detection loops.
EVS9322-ES-CSA: CSA/UL certified variant, North American hazardous location compliance.
EVS9322-ES-CAL: Factory-calibrated variant shipped with NIST-traceable calibration certificate.
EVS9322-ES-KIT: Field rebuild kit; includes sensing diaphragm, O-ring set, and terminal board.
EVS9322-ES-CBL: Mating cable assembly, 5-pin M12 connector, 3-meter standard length.

Sourcing Hard-to-Find & Obsolete EVS9322-ES Parts

DriveKNMS operates a global procurement network specifically structured to support instrumentation assemblies that have exited active OEM production. For the EVS9322-ES series, this includes direct sourcing from decommissioned plant inventories, authorized surplus distributors, and cross-reference matching against functional equivalents within the MKS 9000-series and 910-series platforms.

For assemblies identified by plant cross-reference numbers such as 2709-75313 or 13190869, DriveKNMS performs part number validation against OEM documentation before shipment. Customers operating under ISO 55000 asset management frameworks or NRC-regulated maintenance programs receive full traceability documentation including country of origin (USA), manufacturer date codes where available, and functional test records.

Lead times for EVS9322-ES assemblies vary by configuration. Standard variants (EVS9322-A, EVS9322-ES) typically ship within 5–10 business days from verified stock. Specialty variants (ATEX, HT, corrosive-gas) may require 3–8 weeks sourcing lead time. Emergency AOG (aircraft-on-ground equivalent) procurement support is available for critical process shutdowns.

Quality Control for the EVS9322-ES Range

Each EVS9322-ES assembly processed through DriveKNMS undergoes a structured inspection and functional verification protocol before dispatch:

Visual Inspection: Process connection threads, electrical connector pins, body markings, and label integrity are verified against OEM specifications.
Electrical Continuity: All signal, power, and shield conductors are tested for continuity and isolation resistance (>100 MΩ at 500 VDC).
Zero and Span Verification: Output signal at 0% and 100% of rated pressure range is measured against factory calibration tolerances (±0.25% FS typical).
Pressure Leak Test: Wetted cavity is pressurized to 1.5× rated working pressure and held for 5 minutes; zero leakage acceptance criterion.
Digital Interface Check (where applicable): RS-485 and DeviceNet variants are polled via protocol analyzer to confirm register map integrity and baud rate compliance.
Thermal Cycling (on request): High-temperature variants (EVS9322-ES-HT) undergo 3-cycle thermal soak at rated maximum temperature prior to shipment.