MKS TYPE 626 Baratron Capacitance Manometer: TYPE 626, 133.32PA 626B01TBE 1345720-01 2305437-B 713-412196-001 —

Technical Dossier

Product Details And Specifications

MKS TYPE 626 Baratron Series: Comprehensive Module Range and Technical Overview

The MKS TYPE 626 Baratron Capacitance Manometer is a precision absolute pressure transducer deployed across semiconductor fabrication, chemical vapor deposition (CVD), thin-film deposition, and high-vacuum process systems. Its capacitance-sensing diaphragm technology delivers temperature-compensated, gas-independent pressure measurement from sub-Torr to atmospheric ranges. The TYPE 626 series is a standard reference instrument in semiconductor fabs, petrochemical reactors, nuclear fuel processing facilities, and pharmaceutical vacuum systems globally. Its long production lifecycle — spanning multiple decades — has resulted in a large installed base requiring ongoing spare parts support, calibration services, and drop-in replacement sourcing.

The Evolution of TYPE 626 Architecture

The MKS TYPE 626 was introduced as part of the Baratron product family, which MKS Instruments developed to address the need for gas-composition-independent pressure measurement in process control environments. Early variants used Inconel or Hastelloy C-22 sensor diaphragms to resist corrosive process gases. Subsequent generations introduced heated sensor heads (TYPE 626H) to prevent condensation in reactive gas environments, and high-accuracy variants with ±0.15% full-scale accuracy for critical process control loops.

The TYPE 626 architecture uses a capacitance bridge circuit: the process-side diaphragm deflects under pressure differential against a reference vacuum cavity, and the resulting capacitance change is converted to a 0–10 VDC or 4–20 mA analog output signal. Later revisions incorporated digital signal conditioning and RS-232/RS-485 communication options. The TYPE 626 has been succeeded in new designs by the MKS TYPE 628, TYPE 631, and TYPE 722 series, but the TYPE 626 remains in active service across legacy process tools where form-factor and connector compatibility are critical constraints.

TYPE 626 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified, commonly sourced models within the MKS TYPE 626 Baratron series. Each unit is classified by measurement range, diaphragm material, output signal, and process connection type.

626B01TBE: 1 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626B1TBE: 10 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626B10TBE: 100 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626B100TBE: 1000 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626A01TBE: 1 Torr FS, Inconel diaphragm, 4–20 mA output, 1/4 in. VCR male fitting
626A1TBE: 10 Torr FS, Inconel diaphragm, 4–20 mA output, 1/4 in. VCR male fitting
626A10TBE: 100 Torr FS, Inconel diaphragm, 4–20 mA output, 1/4 in. VCR male fitting
626B01TBF: 1 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. Swagelok fitting
626B1TBF: 10 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. Swagelok fitting
626B10TBF: 100 Torr FS, Inconel diaphragm, 0–10 VDC output, 1/4 in. Swagelok fitting
626B01HBE: 1 Torr FS, Hastelloy C-22 diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626B1HBE: 10 Torr FS, Hastelloy C-22 diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626B10HBE: 100 Torr FS, Hastelloy C-22 diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626B100HBE: 1000 Torr FS, Hastelloy C-22 diaphragm, 0–10 VDC output, 1/4 in. VCR male fitting
626DHS10TBE: 100 Torr FS, heated sensor head 45°C, Inconel diaphragm, 0–10 VDC output
626DHS1TBE: 10 Torr FS, heated sensor head 45°C, Inconel diaphragm, 0–10 VDC output
1345720-01: OEM assembly reference — TYPE 626 transducer sub-assembly, 133.32 Pa (1 Torr) range
2305437-B: Replacement sensor board assembly for TYPE 626 series, revision B
713-412196-001: OEM integration part number — TYPE 626 transducer with custom connector harness

Sourcing Hard-to-Find & Obsolete TYPE 626 Parts

The MKS TYPE 626 series has entered the mature-to-end-of-life phase of its product lifecycle. MKS Instruments has transitioned new tool designs to the TYPE 628 and TYPE 722 platforms. However, the TYPE 626 remains embedded in a large installed base of Applied Materials, Lam Research, Novellus, and TEL process tools where direct replacement with a newer model requires re-qualification — a process that can take months and significant engineering resources.

DriveKNMS maintains a dedicated inventory of TYPE 626 units, including new-old-stock (NOS), refurbished, and tested-used condition units. Our sourcing network covers original MKS distribution channels as well as secondary market recovery from decommissioned semiconductor fabs. We support the following lifecycle scenarios: emergency replacement for unplanned downtime, scheduled preventive maintenance stock replenishment, and long-term service contract inventory for facilities with multi-year maintenance agreements.

Quality Control for the TYPE 626 Range

Each TYPE 626 unit processed by DriveKNMS undergoes a structured verification protocol before shipment. Electrical continuity and insulation resistance are verified on the signal conditioning PCB. Zero-point offset and full-scale span are checked against a NIST-traceable reference standard at the unit's rated full-scale pressure. Diaphragm integrity is confirmed by leak-down test at 1.5× rated pressure. Heated-head variants (626DHS series) are thermally cycled to verify heater element continuity and thermostat setpoint accuracy. Output signal linearity is recorded across five calibration points (0%, 25%, 50%, 75%, 100% FS) and documented in a calibration certificate shipped with each unit. Connector and fitting condition is inspected for thread damage, contamination, and seal-surface integrity.