Novellus 16-167627-00 Filter – Obsolete CVD Chamber Spare Part

Technical Dossier

Product Details And Specifications

Novellus 16-167627-00 Filter – Obsolete CVD Chamber Spare Part

When a Novellus CVD process chamber goes down due to a failed filter assembly, the consequences extend far beyond a single tool. In a 200mm or 300mm fab environment, an unplanned chamber outage can idle an entire process module, disrupting wafer throughput and triggering cascading schedule delays. Sourcing a replacement through OEM channels is no longer straightforward: Novellus Systems was acquired by Lam Research in 2012, and legacy consumable and filter part numbers such as 16-167627-00 are no longer actively manufactured or stocked through standard distribution. The cost of a full chamber retrofit or tool replacement runs into the hundreds of thousands of dollars. DriveKNMS maintains verified inventory of this filter assembly specifically to protect facilities that continue to operate Novellus-platform equipment and cannot justify a capital replacement cycle.

RFQ support for obsolete parts: Send the model number, required quantity and destination so DriveKNMS can confirm sourcing options before quotation.

Technical Specifications

Note: Electrical and dimensional parameters are not published here to prevent specification errors. Confirmed data is provided upon request with your chamber model and serial number.

Solving the Discontinued Hardware Crisis

Q: How are RFQ terms confirmed?
A: Quantity, required condition, documentation needs, destination and sourcing route are confirmed during RFQ review before quotation.

How to extend your Novellus tool life by 5–10 years without a capital replacement:

Key Features for System Maintenance

Q: How is condition confirmed before quotation?
A: Available condition, photos, test records and documentation are checked according to the requested model and sourcing channel before a formal RFQ response.

Q: How do I know the unit is genuine and not a counterfeit?
A: All units are sourced through documented secondary market channels. We provide traceability documentation including source records and inspection reports. We do not source from unverified brokers or markets with known counterfeit exposure.

Q: Can you support multi-unit or repeat RFQ requests?
A: Yes. Send the model list, target quantity and destination so DRIVEKNMS can review sourcing options and quote the requirement as a project RFQ.

Q: Can export requirements be reviewed?
A: Destination, documentation and routing requirements are confirmed during RFQ review.