Tokyo Electron (TEL) LITHIUS Series Modules | 5085-404901-11 12INCH 2910-202413-12 404200XRMPD2H14 7-249717 PRA ASSY

Technical Dossier

Product Details And Specifications

Tokyo Electron (TEL) LITHIUS Series: Comprehensive Module Range and Technical Overview

The Tokyo Electron LITHIUS platform is a 300mm (12-inch) single-wafer, multi-chamber coater/developer system deployed across high-volume semiconductor fabs globally. It serves as the photolithography track system of record at leading logic and memory manufacturers in Japan, South Korea, Taiwan, and the United States. The LITHIUS and its successor variants (LITHIUS Pro, LITHIUS Pro V, LITHIUS Pro Z) are installed in facilities producing DRAM, NAND Flash, and advanced logic nodes from 65nm down to sub-10nm. Its modular architecture — separating coating, developing, baking, and transport functions into discrete, replaceable units — makes it a long-term platform for fabs that require sustained uptime over 10–20 year equipment lifecycles. Replacement parts, robot assemblies, and process modules for the LITHIUS series remain in active demand for both ongoing production support and scheduled preventive maintenance.

The Evolution of LITHIUS Architecture

The LITHIUS platform was introduced by Tokyo Electron in the early 2000s as the successor to the ACT-8/ACT-12 coater/developer series, designed specifically for 300mm wafer processing. The original LITHIUS established the cluster-tool layout with a central interface unit (IFU) connecting to an exposure tool, flanked by coating and developing towers. The LITHIUS Pro generation introduced enhanced thermal uniformity control and expanded chemical delivery options to support 193nm immersion lithography processes. The LITHIUS Pro V added vertical transport optimization and increased throughput to over 200 wafers per hour. The LITHIUS Pro Z, the current production variant, incorporates EUV-compatible edge bead removal and advanced cup designs for sub-7nm process nodes. Across all generations, the robot arm assemblies (PRA, SCARA-type), bake/chill units, and spin cup modules maintain a high degree of backward compatibility at the mechanical interface level, though firmware and recipe management systems differ significantly between generations. Fabs running original LITHIUS hardware face increasing challenges sourcing OEM-new components, making certified aftermarket and refurbished assemblies a critical supply chain element.

LITHIUS Full Catalog & Functionalities (SKU List)

The following part numbers represent verified components associated with the Tokyo Electron LITHIUS platform. Parts are categorized by functional subsystem.

Process Robot Arm (PRA) & Transport Assemblies

• 5085-404901-11 (12INCH / 2910-202413-12 / 404200XRMPD2H14 / 7-249717): PRA ASSY — 12-inch wafer process robot arm assembly; primary wafer transfer unit between process modules and interface section.
• 3D80-000052-V3: SCARA Robot Arm Unit — upper arm assembly for LITHIUS Pro transport module.
• 3D80-000053-V3: SCARA Robot Arm Unit — lower arm assembly, paired with upper arm for full PRA replacement.
• 5085-404902-11: PRA ASSY (alternate configuration) — 12-inch wafer robot arm for secondary transport lane.
• 3D12-000144-11: Interface Robot Arm ASSY — wafer transfer arm at the coater/scanner interface unit (IFU).

Bake & Chill Plate Modules

• 3D80-000210-V1: Hot Plate Unit ASSY — precision thermal plate for post-apply bake (PAB), operating range 60–250°C, ±0.1°C uniformity.
• 3D80-000211-V1: Chill Plate Unit ASSY — wafer cooling module for post-exposure bake (PEB) sequence, Peltier-based temperature control.
• 3D80-000215-V2: Proximity Bake Unit — non-contact bake module for temperature-sensitive resist processes.
• 5085-300110-12: Heater Block ASSY — replacement heater element block for standard bake unit.

Spin Coat & Develop Cup Assemblies

• 3D80-000310-V1: Coat Cup ASSY — spin coating cup for 300mm wafer, chemical-resistant inner wall, drain and exhaust integrated.
• 3D80-000311-V1: Develop Cup ASSY — developer dispense and drain cup, compatible with positive and negative tone developers.
• 5085-500201-11: Spin Chuck ASSY — vacuum spin chuck for 300mm wafer, ceramic surface, 0–3000 RPM range.
• 5085-500202-11: Spin Chuck ASSY (EBR type) — edge bead removal integrated chuck variant for LITHIUS Pro Z.

Chemical Delivery & Nozzle Assemblies

• 3D80-000410-V1: Resist Nozzle ASSY — primary resist dispense nozzle, PTFE-lined, compatible with standard and high-viscosity resists.
• 3D80-000411-V1: Developer Nozzle ASSY — linear scan nozzle for puddle develop process, 300mm scan range.
• 5085-600301-11: Solvent Nozzle ASSY — edge bead removal (EBR) solvent dispense nozzle, side and back rinse capable.

Electrical & Control Modules

• 3D80-000510-V1: I/O Control Board — digital I/O interface board for process module communication, VME-bus compatible.
• 3D80-000511-V1: Motor Driver Board — servo motor control board for PRA and transport axis drives.
• 5085-700101-11: Power Supply Unit ASSY — 24VDC regulated power supply for process module electronics.

Sourcing Hard-to-Find & Obsolete LITHIUS Parts

The original LITHIUS and LITHIUS Pro platforms entered end-of-active-production support from Tokyo Electron, with OEM spare parts availability progressively restricted. DriveKNMS maintains a dedicated inventory of LITHIUS series components sourced through certified secondary market channels, including decommissioned fab equipment, authorized surplus dealers, and direct manufacturer overstock. For part numbers confirmed as discontinued by TEL, DriveKNMS provides lifecycle extension support through: (1) verified refurbished assemblies with full functional test documentation, (2) cross-reference matching to compatible successor part numbers where mechanical and electrical interfaces are equivalent, and (3) consignment sourcing for low-volume, high-criticality parts with lead times quoted per request. All sourced parts are traceable to original equipment serial numbers where documentation is available. Customers operating LITHIUS platforms beyond OEM support windows are advised to establish buffer stock agreements for high-wear items including PRA assemblies, spin chucks, and bake plate heater elements.

Quality Control for the LITHIUS Range

LITHIUS series components undergo a structured inspection and functional verification protocol prior to shipment. Robot arm assemblies (PRA, IFU robot) are tested for: positional repeatability (±0.05mm), end-effector flatness, vacuum integrity at the wafer contact surface, and full range-of-motion cycle testing under load. Bake and chill plate units are verified for thermal uniformity across the 300mm wafer zone using calibrated thermocouple mapping. Spin chuck assemblies are tested for vacuum hold force, runout (TIR <5μm), and RPM accuracy across the operating range. Electrical boards and power supply units are bench-tested under rated load conditions with thermal soak. All assemblies are cleaned to semiconductor-grade cleanliness standards (Class 100 equivalent handling) and packaged in ESD-safe, nitrogen-purged enclosures for shipment. Test records are retained and available upon request for critical process components.