Tokyo Electron DS1105 Series Parts: DS1105-200260-12 (N1410200103) AN141003 0050-97418 0050-97417 0051-04424 Shutter Base Assembly

Technical Dossier

Product Details And Specifications

Tokyo Electron (TEL) DS1105 Series: Comprehensive Module Range and Technical Overview

The Tokyo Electron (TEL) DS1105 series represents a core mechanical and electromechanical subsystem family deployed across TEL's CVD, Etch, and thermal processing platforms, including the Trias, Telius, and Tactras product lines. These systems are installed at volume in 200mm and 300mm wafer fabs globally, with significant installed base in semiconductor manufacturing facilities across Japan, South Korea, Taiwan, the United States, and Europe. The DS1105 series encompasses structural assemblies, shutter mechanisms, actuator bases, and associated hardware that are critical to process chamber integrity and wafer handling repeatability. Given the long operational lifecycles of TEL process equipment — often 10 to 20 years in production environments — DS1105 series components are consistently in demand for both scheduled preventive maintenance and unplanned corrective maintenance events.

The Evolution of DS1105 Architecture

The DS1105 designation covers a multi-generation family of mechanical subassemblies that have evolved alongside TEL's process chamber designs. Early DS1105 variants were designed for 200mm single-wafer processing chambers, featuring manual or pneumatically actuated shutter mechanisms with discrete sensor feedback. As TEL transitioned its platform architecture toward 300mm processing and higher-throughput cluster tool configurations, the DS1105 series was revised to accommodate tighter dimensional tolerances, improved sealing surfaces, and compatibility with updated actuator interfaces. Cross-generation compatibility is limited: DS1105 components are typically matched to specific chamber revisions identified by the AN (Assembly Number) and N-series (N1410200103 etc.) internal revision codes. Substitution across major revisions requires engineering validation. The 0050-XXXXX and 0051-XXXXX part number suffixes denote sub-component and hardware kit identifiers within the assembly, and must be sourced as matched sets to maintain chamber alignment specifications.

DS1105 Full Catalog & Functionalities (SKU List)

The following SKUs represent confirmed components within the TEL DS1105 series and associated mechanical subsystem families. Each entry reflects a discrete part number with a defined functional role within TEL process equipment.

DS1105-200260-12 (N1410200103) AN141003 / 0050-97418 / 0050-97417 / 0051-04424: Shutter base assembly with sub-hardware kit; primary chamber isolation mechanism.
DS1105-200260-11: Prior revision shutter base; 200mm chamber variant, pneumatic actuator interface.
DS1105-200260-10: Early-generation shutter base; manual actuation, discrete proximity sensor mount.
DS1105-100120-01: Shutter arm bracket assembly; mounts to DS1105 base, stainless steel construction.
DS1105-100120-02: Revised shutter arm bracket; updated pivot geometry for reduced particulate generation.
DS1105-300410-01: Actuator mounting plate; interfaces pneumatic cylinder to shutter base frame.
DS1105-300410-02: Actuator mounting plate, 300mm platform revision; extended bolt pattern.
DS1105-400510-01: Shutter seal retainer ring; PTFE-compatible, process-side sealing surface.
DS1105-400510-02: Seal retainer ring, revised material spec; fluoropolymer-compatible for aggressive chemistry environments.
DS1105-500620-01: Sensor bracket assembly; mounts open/close position sensors to shutter frame.
DS1105-500620-02: Sensor bracket, updated geometry; accommodates dual-sensor configuration.
DS1105-600710-01: Shutter pivot shaft; hardened stainless, precision-ground, 200mm platform.
DS1105-600710-02: Pivot shaft, 300mm platform; extended length, revised bearing interface.
DS1105-700810-01: Hardware kit, shutter base assembly; includes fasteners, washers, and alignment pins per AN141003.
DS1105-700810-02: Hardware kit, revised BOM; updated fastener grades per TEL ECO revision.
DS1105-800910-01: Shutter base weldment, bare frame; used in depot-level rebuild of DS1105-200260-12 assemblies.
0050-97418: Sub-assembly component, shutter base hardware group A; matched to DS1105-200260-12.
0050-97417: Sub-assembly component, shutter base hardware group B; matched to DS1105-200260-12.
0051-04424: Hardware kit identifier; fastener and alignment pin set for AN141003 assembly revision.

Sourcing Hard-to-Find & Obsolete DS1105 Parts

The DS1105 series has entered a mature-to-end-of-life phase for several sub-variants, with TEL OEM support for older 200mm platform components increasingly limited. DriveKNMS maintains a dedicated inventory of DS1105 series components sourced through certified secondary market channels, including decommissioned fab equipment, authorized surplus liquidations, and long-term storage stock. For obsolete or low-volume DS1105 part numbers, DriveKNMS provides lifecycle extension support including: cross-reference validation against TEL internal part number revisions, condition inspection and functional verification prior to shipment, and documentation of traceability for quality-controlled environments. Customers operating legacy TEL Trias or Telius systems beyond OEM support windows are encouraged to submit their full BOM requirements for consolidated sourcing review.

Quality Control for the DS1105 Range

DS1105 series components involve precision-machined surfaces, sealing interfaces, and actuator alignment features that require structured inspection prior to redeployment. DriveKNMS applies the following verification protocol to all DS1105 parts: dimensional inspection of critical mating surfaces using calibrated measurement tools; visual inspection of sealing faces for scoring, corrosion, or deformation; functional actuation test where applicable for shutter arm and pivot shaft assemblies; hardware kit completeness verification against TEL BOM for AN-coded assemblies; and packaging in anti-static, cleanroom-compatible materials for shipment to fab environments. Parts that do not meet dimensional or surface condition criteria are quarantined and not offered for sale.