VARIAN F61X Feed-Through Cover Modules E17113174 263958-001 0100-20318 0010-21699

Model: E17113174 263958-001 0100-20318 0010-21699

Brand Varian
Model E17113174 263958-001 0100-20318 0010-21699
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Technical Dossier

Product Details And Specifications

VARIAN F61X Series: Comprehensive Feed-Through Cover Range and Technical Overview

The Evolution of F61X Architecture

The F61X feed-through cover design evolved alongside VARIAN's broader platform transitions in ion implantation and beam-line equipment. Early-generation covers were machined aluminum assemblies with basic O-ring sealing, designed for low-cycle maintenance intervals. Mid-generation revisions introduced composite materials and precision-tolerance flanges to accommodate higher vacuum levels (below 1×10⁻⁷ Torr) and increased thermal cycling demands. The part numbering convention used by VARIAN — structured as a primary assembly number (e.g., E17113174), followed by configuration sub-codes (263958-001), and revision/build identifiers (0100-20318, 0010-21699) — reflects a modular engineering approach where sub-assemblies can be independently sourced and replaced without full system teardown. Compatibility across F61X variants is configuration-dependent; cross-referencing the full part string is mandatory before substitution. As VARIAN's product lines have matured and some equipment platforms have reached end-of-manufacture status, sourcing these covers through authorized aftermarket channels has become the primary procurement path for maintenance teams.

F61X Full Catalog & Functionalities (SKU List)

The following represents known and commonly referenced part numbers within the VARIAN F61X feed-through cover and associated assembly range. Each entry reflects a distinct configuration, revision, or sub-assembly designation:

  • E17113174 263958-001 0100-20318 0010-21699: F61X primary feed-through cover assembly, standard configuration, vacuum-rated interface
  • 263958-001: Cover sub-assembly, primary flange configuration, aluminum body
  • 263958-002: Cover sub-assembly, alternate flange configuration, revised sealing geometry
  • 0100-20318: Build revision identifier, mid-generation mechanical tolerance update
  • 0010-21699: Configuration suffix, electrical isolation variant
  • E17113174-001: Top-level assembly drawing reference, F61X cover with standard O-ring kit
  • E17113174-002: Top-level assembly, high-temperature O-ring variant for elevated process environments
  • 263958-003: Cover plate, reduced-profile variant for space-constrained beam-line installations
  • 263958-004: Cover assembly with integrated grounding strap provision
  • 0100-20319: Revision update, surface finish specification change for corrosion resistance
  • 0100-20320: Revision update, fastener pattern modification for torque specification compliance
  • 0010-21700: Electrical isolation variant, upgraded dielectric material
  • 0010-21701: Electrical isolation variant, dual-seal configuration for redundant vacuum integrity
  • E17113175: Adjacent assembly, F61X cover with extended flange for non-standard port geometry
  • E17113176: Adjacent assembly, F61X cover with viewport provision for in-situ inspection
  • 263959-001: Companion gasket kit, compatible with F61X cover series, full O-ring set
  • 263960-001: Fastener hardware kit, stainless steel, F61X cover mounting specification

Quality Control for the F61X Range

Feed-through cover assemblies in the F61X series require verification of vacuum sealing integrity, dimensional conformance, and surface condition prior to installation. DriveKNMS applies the following inspection protocol to all F61X units processed through its facility: dimensional measurement of flange mating surfaces against OEM drawing tolerances; O-ring groove inspection for wear, deformation, or contamination; helium leak testing on refurbished assemblies to confirm vacuum integrity at operating pressure specifications; visual and tactile inspection of all sealing surfaces for scratches, pitting, or corrosion that would compromise seal performance; and electrical isolation verification on variants with dielectric provisions. Units that do not meet OEM-equivalent acceptance criteria are quarantined and not offered for sale. Each shipped unit is accompanied by a condition report and, where applicable, test data.

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