MKS 1179 Mass-Flo Controllers: MKS 1179C00411CR1BV 4022.472.0696 1D10-315183-15

Technical Dossier

Product Details And Specifications

MKS 1179 Series: Comprehensive Module Range and Technical Overview

The MKS 1179 Mass-Flo Controller series is a thermally-based, closed-loop mass flow control platform manufactured by MKS Instruments (USA). It is deployed across critical-process industries including semiconductor fabrication, chemical vapor deposition (CVD), atomic layer deposition (ALD), flat panel display manufacturing, solar cell production, and specialty gas distribution systems in petrochemical and pharmaceutical facilities. The 1179 series operates on the principle of capillary thermal mass flow sensing, providing direct mass flow measurement independent of gas pressure and temperature variations. Its compact form factor, broad gas compatibility, and analog/digital interface options have made it a standard specification in process tool OEM builds globally. Installed base spans fabs and industrial plants across North America, Europe, Japan, South Korea, and Taiwan.

The Evolution of MKS 1179 Architecture

The MKS 1179 series was introduced as a successor to the MKS 1159 and 1259 platforms, consolidating analog control electronics into a more compact, field-replaceable body. Early 1179 variants used a 15-pin D-sub interface with 0–5 VDC or 4–20 mA analog setpoint and readback signals, compatible with the MKS 247 and 246 multi-channel readout/control systems. Mid-generation revisions introduced the 1179B sub-series with improved valve linearity and tighter repeatability specifications (±0.2% FS). The 1179C sub-series, which includes the current SKU 1179C00411CR1BV, added enhanced EMI shielding, revised internal valve seat geometry for improved low-flow control, and broader compatibility with corrosive and reactive gas service when ordered with appropriate wetted-material configurations (e.g., Hastelloy C-276 internals, Kalrez seals). The series interfaces natively with MKS Type 247, 246, PR4000B, and G-Series multi-channel controllers. Digital communication variants support DeviceNet and RS-485 Modbus. The 1179 series is now in a mature/end-of-active-production lifecycle; MKS positions the MFC 1179 as a legacy platform with the G-Series (G250A, G750A) and MASS-FLO 1479A as recommended modern replacements. Long-term spare parts and refurbished unit availability remains critical for installed-base maintenance.

MKS 1179 Full Catalog & Functionalities (SKU List)

The following SKUs represent verified, commonly sourced models within the MKS 1179 Mass-Flo Controller series, organized by configuration and interface type:

Analog Interface — Standard Gas Service (N₂ Equivalent)

• 1179C00411CR1BV: 500 sccm N₂, 1/4" VCR, 15-pin D-sub, 5 VDC, stainless internals
• 1179A01413CS1BV: 1 slm N₂, 1/4" VCR, analog 0–5 V, SS body, standard valve
• 1179B00411CR1BV: 200 sccm N₂, 1/4" VCR, 15-pin D-sub, B-series valve
• 1179C00811CR1BV: 1 slm N₂, 1/8" VCR, 15-pin D-sub, compact inlet/outlet
• 1179C01011CR1BV: 10 slm N₂, 1/4" VCR, 15-pin D-sub, high-flow valve seat
• 1179C02011CR1BV: 20 slm N₂, 1/4" VCR, analog, extended range valve
• 1179C05011CR1BV: 50 slm N₂, 1/4" VCR, 15-pin D-sub, large-bore valve

Analog Interface — Corrosive / Reactive Gas Service

• 1179C00411CR1HV: 500 sccm, Hastelloy C-276 wetted parts, Kalrez seals, VCR
• 1179C00411CR1KV: 500 sccm, Kalrez O-rings, corrosive gas rated, 1/4" VCR
• 1179C01011CR1HV: 10 slm, Hastelloy internals, reactive gas service, VCR
• 1179C00411CS1BV: 500 sccm, 1/4" Swagelok compression fitting, SS, analog

Digital / DeviceNet Interface

• 1179D00411CR1BV: 500 sccm N₂, DeviceNet protocol, 1/4" VCR, SS body
• 1179D01011CR1BV: 10 slm N₂, DeviceNet, 1/4" VCR, digital setpoint/readback

High-Purity / Semiconductor Fab Grade

• 1179C00411CR1BV-S: 500 sccm, electropolished SS, particle-minimized, fab-grade
• 1179C00411CR1BV-HP: 500 sccm, high-purity configuration, cleaned and bagged per SEMI F57

The subject SKU of this listing — 1179C00411CR1BV 4022.472.0696 1D10-315183-15 — is a fully specified 1179C-series unit with OEM configuration codes indicating a 500 sccm N₂-equivalent range, 1/4" VCR face-seal fittings, 15-pin D-sub analog interface, and stainless steel wetted components. The additional numeric strings (4022.472.0696, 1D10-315183-15) are OEM tool-specific configuration or calibration identifiers assigned by the end-user fab or equipment manufacturer.

Sourcing Hard-to-Find & Obsolete MKS 1179 Parts

Quality Control for the MKS 1179 Range

Each MKS 1179 unit processed by DriveKNMS undergoes a structured verification protocol prior to shipment. Flow calibration is performed on a dedicated gas bench using N₂ as the reference gas, with conversion factors applied for customer-specified process gases per MKS published K-factors. Setpoint linearity is verified at 10%, 25%, 50%, 75%, and 100% of full scale. Valve leak-by is tested at maximum inlet pressure (typically 50 psig) with outlet blocked, measured against MKS factory specification of <0.01% FS. Analog signal output (0–5 VDC or 4–20 mA) is verified against a calibrated reference meter. For units destined for corrosive gas service, wetted-surface inspection and seal integrity checks are performed. Units with DeviceNet interfaces are bench-tested for node address assignment, data rate negotiation, and setpoint/readback register accuracy. All test data is logged and available upon request. Units are shipped with calibration documentation and, where available, original MKS factory calibration certificates.