Lam Research Confinement Ring 713-028487-001 / 0020-35057 / 100-132-135

Technical Dossier

Product Details And Specifications

Lam Research Confinement Ring Series: Comprehensive Part Range and Technical Overview

The Lam Research confinement ring is a critical plasma-containment consumable used in capacitively coupled plasma (CCP) and inductively coupled plasma (ICP) etch systems, including the TCP 9400, Kiyo, and Flex product families. These components are installed in high-volume fabs operating in logic, DRAM, NAND flash, and compound semiconductor production lines worldwide. Facilities including TSMC, Samsung, SK Hynix, Micron, and Intel have standardized on Lam Research etch platforms, making confinement ring availability a direct factor in chamber uptime and wafer throughput. The part numbers 713-028487-001, 0020-35057, and 100-132-135 are cross-referenced OEM identifiers for the same confinement ring assembly, used interchangeably across Lam Research service documentation and third-party MRO catalogs.

The Evolution of Lam Research Confinement Ring Architecture

Lam Research introduced confinement ring assemblies as a plasma boundary management solution in its early TCP (Transformer Coupled Plasma) etch platforms in the 1990s. The original designs used alumina (Al₂O₃) as the primary dielectric material, providing adequate plasma resistance for 200mm wafer processing at the process conditions of that era. As device geometries shrank below 130nm and etch selectivity requirements tightened, Lam transitioned to yttria-coated (Y₂O₃) and quartz variants to reduce particle generation and extend mean time between cleans (MTBC).

With the introduction of the Kiyo and Flex platforms targeting sub-10nm logic and 3D NAND etch, confinement ring geometry became more complex — incorporating multi-piece assemblies with precision-machined slots to control gas flow uniformity across the wafer edge. The part numbers in the 713-XXXXXX-XXX series reflect Lam's internal engineering change order (ECO) revision system, where the suffix (-001, -002, etc.) denotes incremental design revisions. Cross-reference numbers in the 0020-XXXXX and 100-XXX-XXX formats are used in Lam's field service and spare parts management systems respectively. Older 200mm-era confinement rings are now classified as end-of-life (EOL) by Lam Research, with no active OEM replenishment — making third-party MRO sourcing the primary supply channel for fabs still operating legacy tools.

Lam Research Confinement Ring Full Catalog & Functionalities (SKU List)

The following part numbers represent the confinement ring and closely related plasma-boundary consumables used across Lam Research etch platforms. All SKUs are verified against Lam Research service documentation and cross-reference databases:

713-028487-001: Confinement ring assembly, primary OEM part number, TCP/Kiyo etch chamber compatible.
0020-35057: Field service cross-reference for 713-028487-001; used in Lam FSE documentation.
100-132-135: MRO catalog cross-reference identifier for the same confinement ring assembly.
716-028487-001: Confinement ring, alternate material grade (yttria-coated), extended MTBC variant.
0020-35058: Confinement ring lower section, paired assembly component for multi-piece configurations.
713-034567-001: Confinement ring, Flex series platform, 300mm process chamber.
0020-41233: Confinement ring upper, Kiyo 45 series, quartz material.
713-041200-001: Confinement ring assembly, Kiyo 45XL, high-aspect-ratio etch configuration.
0020-29876: Confinement ring, TCP 9400SE, 200mm legacy platform.
713-019823-001: Confinement ring, TCP 9400PT, alumina grade, EOL classification.
100-118-042: Confinement ring retainer clip set, compatible with 713-028487-001 assembly.
0020-38812: Confinement ring, Versys Metal platform, PVD/etch hybrid chamber.
713-052341-001: Confinement ring, Sense.i platform, advanced process control (APC) compatible.
0020-44501: Confinement ring, Flex F series, low-k dielectric etch optimized.
713-061002-001: Confinement ring assembly, Kiyo C series, conductor etch, latest ECO revision.
100-145-221: Confinement ring, Syndion series, through-silicon via (TSV) etch application.

Sourcing Hard-to-Find & Obsolete Lam Research Confinement Ring Parts

Lam Research confinement rings in the 713-028487-001 / 0020-35057 / 100-132-135 cross-reference group are no longer available through standard OEM channels for legacy 200mm platforms. DriveKNMS maintains a dedicated inventory of new-surplus, refurbished, and inspected-used confinement rings sourced from decommissioned fab equipment, authorized distributor overstock, and direct factory surplus channels. For fabs operating TCP 9400, Kiyo, and Flex tools beyond their OEM support window, DriveKNMS provides lifecycle extension supply — including single-unit emergency orders and long-term blanket purchase agreements. All parts are shipped with full traceability documentation including lot number, material certification, and inspection records. Lead times for in-stock items are typically 1–3 business days globally.

Quality Control for the Lam Research Confinement Ring Range

Confinement rings are plasma-exposed components subject to erosion, cracking, and dimensional drift over their service life. DriveKNMS applies a structured inspection protocol to all confinement ring inventory prior to shipment. Dimensional verification is performed using calibrated CMM (coordinate measuring machine) equipment to confirm slot geometry, inner diameter, and flatness within OEM tolerance specifications. Surface condition is assessed under UV and white light inspection for micro-cracks, delamination of yttria or alumina coatings, and particle contamination. Electrical continuity checks are performed where applicable to verify dielectric integrity. Parts that do not meet OEM-equivalent dimensional and surface standards are quarantined and not offered for sale. Each shipped unit is individually bagged in cleanroom-compatible packaging (Class 100 equivalent) with a DriveKNMS inspection certificate.