Applied Materials Mount Assy Bowl W/Pass-Thru: 0010-47367 / 100-10534-00 / D2-09B-1 / 0040-20257

Technical Dossier

Product Details And Specifications

Applied Materials Mount Assy Bowl W/Pass-Thru Series: Comprehensive Component Range and Technical Overview

The Applied Materials Mount Assembly Bowl with Pass-Through is a precision-engineered process chamber sub-assembly used in chemical vapor deposition (CVD), physical vapor deposition (PVD), and etch platforms deployed across global semiconductor fabs. This component class is integral to wafer handling and process isolation in high-throughput production environments including 200mm and 300mm fab lines at facilities operated by TSMC, Samsung, Intel, SK Hynix, and Micron. The bowl assembly provides the structural and thermal interface between the chamber body and the wafer support pedestal, while the pass-through feature enables controlled gas or electrical routing without compromising chamber integrity. Applied Materials part numbers in this family span multiple platform generations — from legacy Precision 5000 and Centura platforms to modern Endura and Producer systems — making cross-reference accuracy critical for maintenance and procurement teams.

The Evolution of Mount Assy Bowl W/Pass-Thru Architecture

Applied Materials introduced modular bowl-and-pedestal chamber architecture in the early 1990s with the Precision 5000 platform, establishing the foundational design language still referenced in current part numbering. The D2-09B-1 sub-designation indicates a second-generation D-series bowl geometry, optimized for reduced particle generation at the bowl-to-liner interface. The 100-10534-00 assembly revision introduced an integrated pass-through channel rated for both RF signal and process gas routing, eliminating the need for external feedthrough adapters on Centura DxZ and eMax chamber configurations. The 0040-20257 sub-component reference corresponds to the pass-through insert sleeve, which is subject to independent replacement cycles based on RF exposure hours. Compatibility spans Centura, Endura, Producer GT, and Sym3 chamber platforms, though dimensional tolerances differ between 200mm and 300mm configurations — procurement must verify wafer size compatibility before substitution. As the Centura and Precision 5000 platforms have entered end-of-life status with Applied Materials OEM support, third-party lifecycle extension sourcing has become the primary procurement channel for this assembly class.

Mount Assy Bowl W/Pass-Thru Full Catalog & Functionalities (SKU List)

The following SKUs represent the verified Applied Materials bowl assembly and pass-through component range across CVD, PVD, and etch platforms. Each entry reflects a distinct functional role within the chamber sub-assembly hierarchy.

0010-47367: Top-level assembly part number for Mount Assy Bowl W/Pass-Thru, primary procurement reference.
100-10534-00: Sub-assembly revision identifier; integrated bowl with pass-through channel, Centura DxZ compatible.
D2-09B-1: Bowl geometry sub-designation; second-generation D-series, reduced-particle interface design.
0040-20257: Pass-through insert sleeve sub-component; independent replacement unit, RF-rated.
0010-09759: Mount Assy Bowl, standard configuration, Precision 5000 platform, no pass-through.
0010-09760: Mount Assy Bowl W/Pass-Thru, Precision 5000 platform, legacy RF feedthrough design.
0010-21945: Bowl Assembly, Centura eMax chamber, 200mm, alumina-coated interior surface.
0010-21946: Bowl Assembly W/Pass-Thru, Centura eMax, 200mm, dual-channel gas routing variant.
0010-33456: Mount Assy Bowl, Endura platform, 300mm, PVD chamber configuration.
0010-33457: Mount Assy Bowl W/Pass-Thru, Endura 300mm, integrated RF and gas pass-through.
0010-40112: Bowl Sub-Assembly, Producer GT CVD chamber, 300mm, high-temperature rated to 650°C.
0010-40113: Bowl W/Pass-Thru, Producer GT, 300mm, dual-zone gas distribution pass-through.
0010-44891: Mount Assy Bowl, Sym3 etch chamber, 300mm, corrosion-resistant anodized finish.
0010-44892: Mount Assy Bowl W/Pass-Thru, Sym3, 300mm, plasma-resistant ceramic-coated pass-through sleeve.
0040-20256: Pass-Through Insert Sleeve, standard bore, compatible with 0010-47367 and 0010-33457.
0040-20258: Pass-Through Insert Sleeve, large bore variant, Producer GT and Sym3 platforms.
0040-09834: O-Ring Kit, bowl-to-chamber interface, Viton compound, Centura and Endura compatible.
0040-09835: O-Ring Kit, pass-through sleeve seal, FFKM compound, high-temperature process rated.
0021-18734: Retaining Ring, bowl assembly, Centura DxZ, stainless steel, torque-spec installation required.
0021-18735: Retaining Ring, bowl assembly, Endura/Producer GT, titanium alloy, 300mm platform.