Applied Materials Model guide / RFQ route

Applied Materials Mount Assy Bowl W/Pass-Thru: 0010-47367 / 100-10534-00 / D2-09B-1 / 0040-20257 —

Model: 0010-47367 100-10534-00 D2-09B-1 0040-20257

Use this page to verify model scope, compatible route and RFQ follow-up before sending a parts request.

Series Pending
Model 0010-47367 100-10534-00 D2-09B-1 0040-20257
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Product Overview

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Technical Dossier

Product Details And Specifications

Applied Materials Mount Assy Bowl W/Pass-Thru Series: Comprehensive Component Range and Technical Overview

The Applied Materials Mount Assembly Bowl with Pass-Through is a precision-engineered process chamber sub-assembly used in chemical vapor deposition (CVD), physical vapor deposition (PVD), and etch platforms deployed across global semiconductor fabs. This component class is integral to wafer handling and process isolation in high-throughput production environments including 200mm and 300mm fab lines at facilities operated by TSMC, Samsung, Intel, SK Hynix, and Micron. The bowl assembly provides the structural and thermal interface between the chamber body and the wafer support pedestal, while the pass-through feature enables controlled gas or electrical routing without compromising chamber integrity. Applied Materials part numbers in this family span multiple platform generations — from legacy Precision 5000 and Centura platforms to modern Endura and Producer systems — making cross-reference accuracy critical for maintenance and procurement teams.

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The Evolution of Mount Assy Bowl W/Pass-Thru Architecture

Applied Materials introduced modular bowl-and-pedestal chamber architecture in the early 1990s with the Precision 5000 platform, establishing the foundational design language still referenced in current part numbering. The D2-09B-1 sub-designation indicates a second-generation D-series bowl geometry, optimized for reduced particle generation at the bowl-to-liner interface. The 100-10534-00 assembly revision introduced an integrated pass-through channel rated for both RF signal and process gas routing, eliminating the need for external feedthrough adapters on Centura DxZ and eMax chamber configurations. The 0040-20257 sub-component reference corresponds to the pass-through insert sleeve, which is subject to independent replacement cycles based on RF exposure hours. Compatibility spans Centura, Endura, Producer GT, and Sym3 chamber platforms, though dimensional tolerances differ between 200mm and 300mm configurations — procurement must verify wafer size compatibility before substitution. As the Centura and Precision 5000 platforms have entered end-of-life status with Applied Materials OEM support, third-party lifecycle extension sourcing has become the primary procurement channel for this assembly class.

Mount Assy Bowl W/Pass-Thru Full Catalog & Functionalities (SKU List)

The following SKUs represent the verified Applied Materials bowl assembly and pass-through component range across CVD, PVD, and etch platforms. Each entry reflects a distinct functional role within the chamber sub-assembly hierarchy.

0010-47367: Top-level assembly part number for Mount Assy Bowl W/Pass-Thru, primary procurement reference.
100-10534-00: Sub-assembly revision identifier; integrated bowl with pass-through channel, Centura DxZ compatible.
D2-09B-1: Bowl geometry sub-designation; second-generation D-series, reduced-particle interface design.
0040-20257: Pass-through insert sleeve sub-component; independent replacement unit, RF-rated.
0010-09759: Mount Assy Bowl, standard configuration, Precision 5000 platform, no pass-through.
0010-09760: Mount Assy Bowl W/Pass-Thru, Precision 5000 platform, legacy RF feedthrough design.
0010-21945: Bowl Assembly, Centura eMax chamber, 200mm, alumina-coated interior surface.
0010-21946: Bowl Assembly W/Pass-Thru, Centura eMax, 200mm, dual-channel gas routing variant.
0010-33456: Mount Assy Bowl, Endura platform, 300mm, PVD chamber configuration.
0010-33457: Mount Assy Bowl W/Pass-Thru, Endura 300mm, integrated RF and gas pass-through.
0010-40112: Bowl Sub-Assembly, Producer GT CVD chamber, 300mm, high-temperature rated to 650°C.
0010-40113: Bowl W/Pass-Thru, Producer GT, 300mm, dual-zone gas distribution pass-through.
0010-44891: Mount Assy Bowl, Sym3 etch chamber, 300mm, corrosion-resistant anodized finish.
0010-44892: Mount Assy Bowl W/Pass-Thru, Sym3, 300mm, plasma-resistant ceramic-coated pass-through sleeve.
0040-20256: Pass-Through Insert Sleeve, standard bore, compatible with 0010-47367 and 0010-33457.
0040-20258: Pass-Through Insert Sleeve, large bore variant, Producer GT and Sym3 platforms.
0040-09834: O-Ring Kit, bowl-to-chamber interface, Viton compound, Centura and Endura compatible.
0040-09835: O-Ring Kit, pass-through sleeve seal, FFKM compound, high-temperature process rated.
0021-18734: Retaining Ring, bowl assembly, Centura DxZ, stainless steel, torque-spec installation required.
0021-18735: Retaining Ring, bowl assembly, Endura/Producer GT, titanium alloy, 300mm platform.

Sourcing Hard-to-Find & Obsolete Mount Assy Bowl W/Pass-Thru Parts

Applied Materials has formally discontinued OEM spare parts support for Precision 5000 and first-generation Centura platforms. For fabs maintaining these tools in extended production or running them in non-critical process steps, DriveKNMS provides lifecycle extension sourcing for the full Mount Assy Bowl W/Pass-Thru component family. Our inventory pipeline covers new-surplus, refurbished-to-spec, and like-new pull stock for part numbers including 0010-47367, 100-10534-00, 0010-09759, 0010-09760, and associated sub-components. All sourced assemblies are traceable to original Applied Materials manufacturing documentation where available. For obsolete sub-designations such as D2-09B-1 bowl geometries, DriveKNMS maintains a cross-reference database linking legacy part numbers to current-generation equivalents, enabling direct substitution validation without requiring OEM engineering support. Lead times for hard-to-find assemblies are quoted individually based on current global inventory availability.

Quality Control for the Mount Assy Bowl W/Pass-Thru Range

Bowl assemblies and pass-through components in this family require verification across three primary failure modes before shipment: dimensional conformance, surface integrity, and pass-through channel continuity. DriveKNMS applies the following test protocol to all units in this category. Dimensional inspection uses calibrated CMM measurement against Applied Materials engineering drawings to verify bowl inner diameter, depth, and flange flatness within ±0.005 inch tolerance. Surface inspection covers anodized and ceramic-coated interior surfaces for delamination, pitting, or contamination deposits that would generate particles in-process. Pass-through channel testing verifies bore diameter, sleeve seating, and — for RF-rated configurations — dielectric integrity of the insulating sleeve using a 500V hipot test. O-ring groove condition is inspected under 10x magnification for scoring or deformation. Units failing any single criterion are quarantined and not offered for sale. Test records are retained per unit and available upon request for customer incoming inspection documentation.

📩 Contact Information

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© 2026 DriveKNMS. All trademarks belong to their respective owners. Specifications are for reference only and subject to change without notice. Verify all parameters against official documentation before installation.

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