Technical Dossier
Product Details And Specifications
Applied Materials 0020-21707 Servo Lifter Assembly – Obsolete CVD/PVD Spare Part
RFQ support for obsolete parts: Send the model number, required quantity and destination so DriveKNMS can confirm sourcing options before quotation.
Technical Specifications
| Parameter | Detail |
| Manufacturer | Applied Materials |
| Part Number | 0020-21707 |
| Sub-Assembly References | MR-J3-200A / SM3-1367 / 15854-1 |
| Component Function | Servo-driven wafer lifter assembly |
| Servo Drive Interface | Mitsubishi MR-J3 Series (200A class) |
| Typical Platform | Applied Materials Centura / Endura CVD/PVD systems |
| Discontinuation Status | Confirmed obsolete – no longer manufactured or supported by OEM |
| Country of Origin | United States |
| Condition Available | New surplus / Professionally refurbished (see QA section) |
Note: Electrical parameters specific to individual chamber configurations are not published here to prevent misapplication. Contact our technical team for configuration verification before ordering.
Solving the Discontinued Hardware Crisis
Applied Materials Centura and Endura platforms represent decades of process development investment. Fabs running 200mm legacy nodes or specialty processes — power devices, MEMS, compound semiconductors — have no economic justification to retire a fully qualified tool simply because one motion control subassembly reaches end-of-life. The 0020-21707 lifter assembly is the mechanical interface between the robot transfer module and the process chamber. Without it, the chamber is offline. With it, a tool that has been process-qualified for years continues generating revenue.
The MR-J3-200A servo platform from Mitsubishi was discontinued, and Applied Materials ceased sourcing this subassembly through standard channels. Fabs that did not build strategic spares inventory at end-of-life announcement now face a secondary market with shrinking supply and rising prices. Each unit that leaves the available pool makes the next one harder to find. Procurement teams that act now lock in both price and availability. Those that wait until a failure event negotiate from a position of zero leverage.
Condition & Reliability Assurance
Obsolete parts sourced from the secondary market carry real risk. DriveKNMS applies a structured five-step inspection protocol before any unit is offered for sale:
- Step 1 – Visual and mechanical inspection: Full disassembly review for physical damage, corrosion, and wear on all mechanical interfaces and guide rails.
- Step 2 – Electrolytic capacitor assessment: Capacitors in servo drive assemblies degrade over time regardless of usage. All electrolytic capacitors are evaluated for ESR and capacitance drift; aged components are replaced before the unit is cleared.
- Step 3 – Firmware and drive parameter verification: Where the MR-J3-200A servo interface retains programmable parameters, firmware version is documented and cross-referenced against known Applied Materials configuration requirements.
- Step 4 – Pin and connector integrity check: All connectors are inspected under magnification for oxidation, fretting corrosion, and pin deformation. Affected contacts are cleaned or replaced.
- Step 5 – Functional verification: Where test infrastructure permits, the assembly is cycled through its motion profile and checked for positional accuracy and fault-free operation.
Units that do not pass all five steps are not offered for sale. Condition grade is documented and disclosed at time of quotation.
Key Features for System Maintenance
Should I buy more than one unit?
Yes. For any tool running a process that cannot be transferred to another platform, holding a minimum of two spare assemblies is standard risk management practice. The cost of a second unit is negligible compared to the cost of a second sourcing event when supply has further tightened.
Can you source other Applied Materials obsolete parts?
DriveKNMS specializes in hard-to-find and discontinued industrial automation and semiconductor equipment components. Submit your full BOM or part number list and we will provide availability and pricing.