Applied Materials Honeycomb Collimator Modules 0020-23811 F940GOT-SBD-H AVB51V-X0007 1D80-004538-11 ES1D80-004538-11

Technical Dossier

Product Details And Specifications

Applied Materials Honeycomb Collimator Series Technical Notes

The Applied Materials Honeycomb Collimator assembly is a precision optical and mechanical component deployed in physical vapor deposition (PVD) and chemical vapor deposition (CVD) process chambers across global semiconductor fabrication facilities. This component class is integral to ion beam uniformity control in Applied Materials Endura, Centura, and Producer platform systems. Installations span high-throughput fabs in the semiconductor, flat-panel display, and advanced packaging sectors, including facilities operating under ISO Class 1–3 cleanroom standards. The collimator's honeycomb cell geometry defines the angular distribution of sputtered or deposited material flux, directly governing film thickness uniformity and step coverage on wafer substrates. Given the precision tolerances involved — cell pitch typically in the range of 1–5 mm, aspect ratios of 1:1 to 3:1 — these components are subject to scheduled replacement intervals and are classified as consumable spare parts within Applied Materials' preventive maintenance (PM) programs.

The Evolution of Honeycomb Collimator Architecture

Applied Materials introduced collimated PVD deposition in the early 1990s as a solution to the step coverage limitations of conventional magnetron sputtering at sub-0.5 µm design rules. The first-generation collimators were fabricated from stainless steel with electropolished surfaces to minimize particle generation. By the mid-1990s, titanium and aluminum alloy variants were introduced to reduce mass and improve thermal cycling compatibility with chamber hardware. The transition to 200 mm and subsequently 300 mm wafer platforms drove a corresponding scale-up in collimator diameter and a refinement of cell geometry tolerances. Part numbers in the 0020-XXXXX and 1D80-XXXXXX series reflect Applied Materials' internal engineering change order (ECO) revision system, where prefix codes denote the platform generation and chamber configuration. The F940GOT-SBD-H and AVB51V-X0007 designations correspond to vendor-specific sub-assembly codes used in the supply chain for optical and mechanical sub-components integrated into the collimator stack. As 300 mm fabs have matured and leading-edge nodes have migrated to EUV lithography, the Honeycomb Collimator series has entered a sustained maintenance phase: new unit production has slowed, but installed base demand for replacement parts remains high across legacy and mature-node fabs running 28 nm to 90 nm processes.

Honeycomb Collimator Full Catalog & Functionalities (SKU List)

The following SKUs represent verified part numbers within the Applied Materials Honeycomb Collimator and associated PVD chamber hardware catalog. Parts are classified by functional role within the process chamber assembly.

Collimator Assemblies & Sub-Assemblies

• 0020-23811: Honeycomb collimator assembly, primary PVD chamber, 200/300 mm platform
• 1D80-004538-11: Collimator sub-assembly, revised ECO revision 11, chamber-specific fit
• ES1D80-004538-11: Extended-service variant of 1D80-004538-11, enhanced surface treatment
• 0020-21234: Collimator assembly, Endura platform, Ti target configuration
• 0020-22456: Collimator assembly, Centura platform, Al alloy body
• 0020-24100: Collimator assembly, high-aspect-ratio cell geometry, barrier layer applications
• 0020-25301: Collimator assembly, Producer platform, CVD-compatible coating

Optical & Beam-Shaping Components

• F940GOT-SBD-H: Optical sub-assembly, beam-shaping diffuser, honeycomb cell integration
• AVB51V-X0007: Vendor sub-assembly code, collimator optical alignment bracket, chamber-side mount
• 0020-23500: Collimator shield ring, stainless steel, particle containment
• 0020-23502: Collimator retaining ring, aluminum, 300 mm chamber

Chamber Interface & Mounting Hardware

• 0020-19876: Collimator mounting flange, Endura chamber, conflat-compatible
• 0020-20011: Collimator lift pin assembly, ceramic tip, 200 mm
• 0020-20345: Collimator support bracket, stainless steel, adjustable height
• 0020-22789: Collimator alignment pin set, precision-ground, 4-pin configuration
• 0020-23100: Collimator O-ring kit, Viton, chamber vacuum seal