Applied Materials CVD460 / MFS460 Manifold Modules 0021-36509 MFS460-022 CVD460-198

Technical Dossier

Product Details And Specifications

Applied Materials CVD460 / MFS460 Series Technical Notes

The Evolution of CVD460 / MFS460 Architecture

Applied Materials introduced the CVD460 platform as a scalable successor to earlier single-chamber CVD tools, designed to support multi-step deposition processes within a unified mainframe architecture. The MFS (Multi-Flow System) 460 manifold assembly was developed in parallel to manage the increasingly complex gas chemistries required for TEOS oxide, tungsten, and nitride deposition processes. Early revisions of the MFS460 used discrete pneumatic valve blocks with analog pressure transducers. Subsequent engineering change orders (ECOs) transitioned the platform to integrated solenoid valve manifolds with digital feedback loops, improving repeatability and reducing cross-contamination risk between process steps. The CVD460-198 sub-designation identifies a specific manifold configuration variant optimized for high-conductance gas paths in multi-zone chamber designs. Compatibility between MFS460 manifold revisions and CVD460 mainframe generations must be verified against the Applied Materials Bill of Materials (BOM) and ECO revision history before substitution. Many MFS460 manifold assemblies are no longer manufactured by Applied Materials and have transitioned to third-party refurbishment and aftermarket supply chains.

CVD460 / MFS460 Full Catalog & Functionalities (SKU List)

The following SKUs represent documented components within the Applied Materials CVD460 and MFS460 platform ecosystem. Each entry reflects a distinct functional role within the process tool architecture:

0021-36509 MFS460-022 CVD460-198: Multi-flow manifold assembly, gas distribution, CVD460 mainframe
0021-36510 MFS460-023: Manifold block, alternate port configuration, high-flow variant
0021-35001 CVD460-101: Chamber lid assembly, upper electrode interface, CVD460
0021-35002 CVD460-102: Susceptor support ring, process chamber, CVD460
0021-35100 CVD460-150: RF match network assembly, 13.56 MHz, CVD460 mainframe
0021-35200 CVD460-160: Gas panel sub-assembly, MFC manifold interface, CVD460
0021-35300 CVD460-170: Throttle valve assembly, turbopump interface, CVD460
0021-35400 CVD460-180: Heater power assembly, susceptor zone control, CVD460
0021-35500 CVD460-190: Pressure transducer assembly, Baratron interface, CVD460
0021-36000 MFS460-001: MFS manifold base block, primary gas inlet, stainless 316L
0021-36100 MFS460-005: Solenoid valve sub-assembly, 24VDC, 2-way normally closed
0021-36200 MFS460-010: Pneumatic actuator block, 3-way valve, MFS460 manifold
0021-36300 MFS460-015: Purge gas manifold section, inert gas isolation, MFS460
0021-36400 MFS460-018: Pressure regulator assembly, downstream control, MFS460
0021-36500 MFS460-020: Manifold end-cap assembly, port blanking, MFS460
0021-36600 MFS460-025: Flow restrictor insert, calibrated orifice, MFS460 gas path
0021-36700 MFS460-030: Valve seat repair kit, O-ring and seal set, MFS460
0021-37000 CVD460-200: Mainframe backplane PCB, I/O interface, CVD460 system controller
0021-37100 CVD460-210: Process controller card, recipe execution, CVD460 mainframe