Applied Materials 0050-90526 DBL4N00260-0002000000000-00301R 0190-17601 800-5748-10 5-Way Manifold

Technical Dossier

Product Details And Specifications

Applied Materials DBL4N Series Technical Notes

The Applied Materials DBL4N series of process gas delivery and manifold assemblies represents a critical infrastructure layer in semiconductor fabrication equipment, including CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), and etch platforms deployed globally in high-volume fabs. These assemblies are integral to systems such as the Centura, Producer, and Endura platforms, which are installed in leading-edge fabs across the United States, Taiwan, South Korea, Japan, and Europe. The 5-Way Manifold configuration — as represented by part number 0050-90526 / DBL4N00260-0002000000000-00301R / 0190-17601 / 800-5748-10 — is a multi-port gas distribution block used to route and isolate process gases to individual chamber zones with precision. These components are subject to strict cleanliness and leak-integrity standards (SEMI F1, SEMI F20) and are typically constructed from electropolished 316L stainless steel with VCR or W-Seal face-seal fittings.

The Evolution of DBL4N Architecture

Applied Materials' gas delivery manifold architecture has evolved across multiple platform generations. Early Centura systems (circa 1993–2000) used discrete manual valve manifolds with limited integration. The DBL4N series introduced modular, surface-mount valve body designs compatible with automated mass flow controller (MFC) arrays, enabling higher-density gas panel configurations. The transition from 200mm to 300mm wafer processing drove a redesign of manifold port geometry and flow coefficients (Cv values) to accommodate higher volumetric throughput requirements. The DBL4N00260 sub-assembly designation indicates a 260-series manifold block, which is associated with the second-generation gas panel architecture used in Producer SE and Centura XT platforms. Cross-compatibility with the 0190-17601 and 800-5748-10 reference numbers confirms this part spans multiple internal Applied Materials BOM revisions, a common characteristic of long-lifecycle process components that remain in service across tool refurbishment cycles. Fabs operating legacy 200mm equipment lines continue to require these assemblies as OEM replacements are no longer manufactured, making aftermarket sourcing and certified refurbishment the primary supply channel.

DBL4N Full Catalog & Functionalities (SKU List)

The following SKUs represent the documented range of Applied Materials DBL4N-series manifold assemblies and associated gas delivery components. Each entry reflects a distinct functional configuration within the gas panel or process module architecture:

0050-90526: 5-Way gas distribution manifold block, 316L SS, VCR fittings, Centura/Producer platform
DBL4N00260-0002000000000-00301R: Manifold sub-assembly, 260-series block, 2-position valve configuration, revision R
0190-17601: Cross-reference assembly number for 0050-90526 manifold in Producer SE BOM
800-5748-10: Alternate part reference, 10th revision, used in Endura platform gas panel documentation
0050-09728: 3-Way inline manifold block, manual isolation, 316L SS, W-Seal face-seal
0050-76543: 4-Way manifold assembly, pneumatic actuated valves, Centura XT gas panel
0050-88102: 6-Way manifold block, high-flow configuration, Producer CVD platform
0050-91034: 2-Way isolation manifold, purge line service, 200mm tool gas panel
DBL4N00180-0001000000000-00201R: 180-series manifold block, single-zone delivery, revision 1
DBL4N00320-0003000000000-00401R: 320-series manifold, 3-zone delivery, high-purity process gas service
0190-14322: Manifold body only (no valves), spare/replacement for DBL4N260 series
0190-15887: Valve seat insert kit, compatible with DBL4N 260/320 series manifold blocks
800-5748-08: Revision 8 manifold assembly, predecessor to 800-5748-10, Endura platform
800-5748-12: Revision 12 manifold assembly, updated port geometry, 300mm tool service
0050-92411: 5-Way manifold, extended-length configuration, dual-chamber gas delivery
0050-87654: Manifold purge block, inert gas service, N2/Ar compatible, Centura platform
0190-18844: Replacement manifold assembly, Producer NXT platform, updated seal specification