Applied Materials 0190-21067 ALD1244 PTC0200 3520784 Modules

Technical Dossier

Product Details And Specifications

Applied Materials ALD1244 / PTC0200 Series Technical Notes

The Applied Materials ALD1244 and PTC0200 series encompasses loadlock chamber assemblies, filter/diffuser modules, and associated process kit components deployed across atomic layer deposition (ALD) and chemical vapor deposition (CVD) platforms. These assemblies are installed in high-volume semiconductor fabs globally, including facilities operating 200mm and 300mm wafer processes in petrochemical-adjacent cleanroom environments, advanced logic foundries, and memory device manufacturers. The loadlock filter/diffuser assembly (part number 0190-21067, cross-referenced as ALD1244, PTC0200, and assembly code 3520784) serves as a critical gas distribution and particulate control component within the loadlock chamber, directly affecting wafer transfer integrity and process gas purity.

The Evolution of ALD1244 / PTC0200 Architecture

Applied Materials introduced the ALD1244 platform as part of its modular loadlock architecture designed to support rapid wafer transfer under controlled atmospheric conditions. Early iterations of the PTC0200 series used sintered metal filter elements with fixed diffuser geometry, optimized for nitrogen purge cycles at pressures between 1 mTorr and 760 Torr. Subsequent revisions introduced ceramic diffuser inserts with tighter pore size tolerances (typically 2–10 µm) to reduce particle generation during high-frequency pump/vent cycles. The 3520784 assembly designation reflects a later-generation build incorporating an integrated O-ring seal carrier and revised filter retainer clip, improving field serviceability. As Applied Materials transitioned its ALD platforms toward the Centura and Producer series architectures, the ALD1244/PTC0200 loadlock components entered a maintenance-phase lifecycle. Compatibility with legacy Precision 5000, Endura, and early Centura chambers remains a primary driver of ongoing demand for these assemblies. Cross-platform interchangeability between 0190-21067 and related diffuser assemblies (0190-xxxxx range) requires verification against chamber revision level and loadlock door configuration.

ALD1244 / PTC0200 Full Catalog & Functionalities (SKU List)

The following SKUs represent the core and adjacent components within the Applied Materials ALD1244 / PTC0200 loadlock and process kit range. All part numbers are verified against Applied Materials field service documentation and industry spare parts databases:

0190-21067: Assy Filter/Diffuser Loadlock — primary gas diffusion and particulate filtration assembly for ALD1244 loadlock chamber.
0190-20456: Assy Filter Loadlock Upper — upper-stage sintered filter element, 200mm loadlock configuration.
0190-20457: Assy Filter Loadlock Lower — lower-stage filter assembly, paired with 0190-20456 in dual-stage configurations.
0190-22134: Diffuser Plate Loadlock — ceramic diffuser plate, 10 µm pore size, nitrogen purge service.
0190-19876: Assy Loadlock Door Seal Kit — O-ring and seal carrier assembly for loadlock door interface.
0190-21100: Filter Element Sintered SS 5µm — replacement sintered stainless steel filter element, 5 µm rating.
0190-21101: Filter Element Sintered SS 10µm — replacement sintered stainless steel filter element, 10 µm rating.
0190-18543: Assy Loadlock Purge Manifold — gas distribution manifold for loadlock purge circuit.
0190-18544: Fitting Compression 1/4in SS — compression fitting, stainless steel, loadlock purge line.
0190-20001: Assy Loadlock Chamber Body — main chamber body casting, ALD1244 platform.
0190-20002: Assy Loadlock Lid — loadlock lid assembly with integrated sensor port.
0190-21500: Sensor Pressure Loadlock 10 Torr — capacitance manometer, 10 Torr full scale, loadlock pressure monitoring.
0190-21501: Sensor Pressure Loadlock 1000 Torr — capacitance manometer, 1000 Torr full scale, vent cycle monitoring.
0190-17890: Valve Gate Loadlock 8in — gate valve assembly, 8-inch wafer transfer port, loadlock-to-transfer chamber interface.
0190-17891: Actuator Pneumatic Gate Valve — pneumatic actuator for 0190-17890 gate valve, double-acting cylinder.
0190-22000: Assy Loadlock Heater 200W — resistive heater assembly for loadlock bakeout, 200W, 240VAC.
0190-22001: Thermocouple Type K Loadlock — Type K thermocouple, loadlock wall-mount, bakeout temperature monitoring.
0190-19000: O-Ring Kit Loadlock Full Service — complete O-ring kit for full loadlock PM, all elastomer interfaces.