Applied Materials Ceramic DOM Modules: 0200-18062 / 93199-236 / A93199.12236 / 1105-300589-13 / DS1105-300589-13

Technical Dossier

Product Details And Specifications

Applied Materials Ceramic DOM Series Technical Notes

The Applied Materials Ceramic DOM (Ceramic Dome / Disk-on-Module) series represents a critical class of consumable and semi-consumable components deployed across Applied Materials' CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), and Etch process chambers. These ceramic-based components are installed in high-vacuum, high-temperature process environments found in semiconductor fabs, flat-panel display manufacturing lines, and advanced packaging facilities worldwide. The Ceramic DOM series is integral to chamber integrity, plasma confinement, and process repeatability in tools such as the Centura, Endura, Producer, and DPS platforms. Their deployment spans Tier-1 foundries, IDMs, and logic/memory fabs operating at nodes from 28nm down to advanced sub-7nm geometries.

Cross-reference part numbers for this listing: 0200-18062 | 93199-236 | A93199.12236 | 1105-300589-13 | DS1105-300589-13

The Evolution of Ceramic DOM Architecture

Applied Materials' ceramic process components have undergone multiple generational revisions since the early 1990s, driven by the transition from aluminum-based chamber liners to high-purity alumina (Al₂O₃) and yttria-coated (Y₂O₃) ceramic formulations. Early Ceramic DOM designs used sintered alumina with relatively low plasma resistance, suitable for 200mm wafer processes. As 300mm platforms (Centura, Producer GT) became dominant, Applied Materials introduced denser, higher-purity ceramic bodies with tighter dimensional tolerances (±0.005") to maintain process uniformity across larger wafer surfaces.

The DS-prefix part numbering convention (e.g., DS1105-300589-13) denotes Drawing Specification revisions, indicating dimensional or material specification changes from the base part (1105-300589-13). The A-prefix cross-reference (A93199.12236) maps to Applied Materials' internal assembly drawing system, while the 93199-series numbers (93199-236) represent the legacy catalog numbering used in older BOM documentation. The 0200-series number (0200-18062) is the current active procurement part number used in AMAT's global supply chain.

Compatibility considerations: Ceramic DOM components are chamber-specific and revision-sensitive. Substitution between revision levels requires engineering validation. Components from the DS1105 revision series are not interchangeable with pre-DS baseline parts without chamber qualification.

Ceramic DOM Full Catalog & Functionalities (SKU List)

The following SKUs represent the broader Applied Materials Ceramic DOM and related ceramic chamber component family. Each entry reflects a distinct part with a defined functional role within AMAT process chambers:

0200-18062: Ceramic dome assembly, primary cross-reference procurement number, CVD/PVD chamber application.
93199-236: Legacy catalog number for ceramic dome, used in older Centura platform BOMs.
A93199.12236: Assembly drawing reference, maps to ceramic dome dimensional specification.
1105-300589-13: Base drawing specification number, ceramic dome body, revision 13.
DS1105-300589-13: Drawing specification revision of 1105-300589-13, updated material or dimensional tolerance.
0200-09947: Ceramic dome, upper, Centura DPS chamber, alumina body, 200mm platform.
0200-09948: Ceramic dome, lower, Centura DPS chamber, paired with 0200-09947.
0200-35391: Ceramic dome assembly, Producer SE chamber, 300mm, high-purity alumina.
0200-40084: Ceramic dome, yttria-coated, enhanced plasma resistance, Centura AdvantEdge.
0200-76500: Ceramic dome insert, quartz-alternative, high-temperature CVD application.
0200-18063: Ceramic dome, adjacent revision to 0200-18062, dimensional variant for chamber fit.
0200-09946: Ceramic liner, dome-type, Centura HDP-CVD chamber, 200mm.
0200-35392: Ceramic dome, Producer GT platform, 300mm, updated sealing geometry.
0200-40085: Ceramic dome, yttria-stabilized zirconia (YSZ) body, advanced etch resistance.
0200-76501: Ceramic dome, top electrode variant, capacitively coupled plasma (CCP) chamber.
0200-18064: Ceramic dome, revision C, updated O-ring groove geometry, Centura platform.
0200-09950: Ceramic dome, DPS II chamber, 200mm, alumina, high-density plasma application.
0200-35394: Ceramic dome, Producer XP platform, 300mm, extended service life formulation.

Sourcing Hard-to-Find & Obsolete Ceramic DOM Parts

The Applied Materials Ceramic DOM series spans components from platforms that entered end-of-life (EOL) status as early as 2005 (200mm Centura DPS) through currently active 300mm Producer and Centura AdvantEdge platforms. DriveKNMS maintains a dedicated inventory of both active and obsolete ceramic chamber components to support fabs operating legacy equipment beyond AMAT's standard service window.

For EOL part numbers such as 0200-09947, 0200-09948, and 0200-09946, DriveKNMS sources from decommissioned tool teardowns, certified refurbishment programs, and qualified third-party ceramic manufacturers capable of producing to AMAT drawing specifications. All sourced parts are accompanied by dimensional inspection reports and material certification documentation.

Quality Control for the Ceramic DOM Range

Ceramic DOM components present specific inspection challenges due to their complex geometries, tight dimensional tolerances, and sensitivity to micro-cracking from thermal cycling. DriveKNMS applies the following quality control protocols to all Ceramic DOM parts prior to shipment:

Dimensional Verification: Full CMM (Coordinate Measuring Machine) inspection against AMAT drawing specifications, including dome radius, O-ring groove depth, and seating surface flatness (tolerance: ±0.005").
Visual and Dye Penetrant Inspection: 100% visual inspection under 10x magnification for surface cracks, chips, and porosity. Dye penetrant testing (DPT) applied to all refurbished or previously-installed units to detect sub-surface fractures.
Material Verification: XRF (X-ray fluorescence) analysis to confirm alumina purity (≥99.5% Al₂O₃) or yttria coating composition where specified.
Cleanliness Protocol: Ultrasonic cleaning in DI water followed by cleanroom packaging (ISO Class 5 equivalent) to prevent particle contamination in process-critical environments.
Functional Cross-Check: Part number cross-reference validation against AMAT BOM databases to confirm correct revision and application compatibility before dispatch.