Applied Materials Susceptor Modules 0200-35359 / 0100-35217 / 0050-18943

Technical Dossier

Product Details And Specifications

Applied Materials Susceptor Series Technical Notes

The Applied Materials Susceptor series represents a critical class of process chamber components deployed across global semiconductor fabrication facilities, including CVD (Chemical Vapor Deposition), PECVD, and epitaxial growth systems. These components are integral to wafer support and thermal uniformity in high-temperature process environments. Applied Materials Susceptors are installed in fabs operated by TSMC, Samsung, Intel, and major OSAT facilities worldwide. Their role in maintaining wafer planarity, temperature distribution, and process repeatability makes them non-negotiable consumable/semi-permanent components in advanced node manufacturing lines.

The three-part assembly referenced by SKUs 0200-35359, 0100-35217, and 0050-18943 constitutes a matched susceptor kit used in Applied Materials CVD and related process chambers. Each sub-component is precision-machined and must be sourced as a validated set to maintain process integrity.

The Evolution of Applied Materials Susceptor Architecture

Applied Materials has iterated susceptor design across multiple platform generations. Early susceptor assemblies used in the Precision 5000 and Centura platforms (introduced in the late 1980s and 1990s) were single-piece graphite or SiC-coated graphite constructions optimized for 150mm and 200mm wafer formats. As process nodes advanced and wafer sizes migrated to 300mm, susceptor architecture evolved into multi-piece assemblies with tighter dimensional tolerances, improved thermal mass distribution, and enhanced resistance to process chemistry (HF, NF3, WF6 environments).

The current generation of susceptors—including the 0200-35359 / 0100-35217 / 0050-18943 assembly—reflects this multi-component design philosophy. Compatibility is chamber-specific and tied to the process kit revision level. Mixing components from different revision levels introduces risk of wafer bow, non-uniform deposition, and particle generation. Applied Materials periodically issues Engineering Change Orders (ECOs) that supersede older part numbers; DriveKNMS maintains cross-reference records for all known supersession chains.

Applied Materials Susceptor Full Catalog & Functionalities (SKU List)

The following SKUs represent verified Applied Materials susceptor and related process kit components across Centura, Producer, and Endura platform families. Each entry reflects a distinct functional role within the process chamber assembly:

• 0200-35359: Primary susceptor body — upper assembly, 200mm wafer format, CVD chamber
• 0100-35217: Susceptor mid-section support ring — thermal isolation interface layer
• 0050-18943: Susceptor lower retaining component — positional alignment and base seal
• 0200-09585: Susceptor assembly, Centura DxZ chamber, 200mm, SiC-coated graphite
• 0200-09586: Susceptor assembly, Centura HDP-CVD, 200mm, high-purity graphite
• 0200-20645: Susceptor, Producer SE chamber, 300mm, aluminum nitride body
• 0200-20646: Susceptor edge ring, Producer SE, 300mm, quartz
• 0200-40187: Susceptor assembly, Centura RP Epi, 200mm, SiC bulk
• 0200-40188: Susceptor support spider, Centura RP Epi, 200mm, SiC
• 0100-09800: Susceptor lift pin guide, universal CVD chamber, alumina ceramic
• 0100-22341: Susceptor shadow ring, 200mm, quartz, Centura platform
• 0100-22342: Susceptor shadow ring, 300mm, quartz, Producer platform
• 0050-09210: Susceptor retaining clip set, stainless steel, Centura DxZ
• 0050-12874: Susceptor thermocouple feedthrough seal, Viton, CVD chamber
• 0050-18944: Susceptor base plate gasket, PTFE, lower chamber interface
• 0200-76543: Susceptor assembly, Endura PVD chamber, 300mm, titanium-coated
• 0100-76210: Susceptor edge exclusion ring, Endura, 300mm, anodized aluminum
• 0200-55001: Susceptor assembly, Centura W-CVD, 200mm, tungsten-compatible coating

Quality Control for the Applied Materials Susceptor Range

Susceptor components require inspection protocols that differ substantially from standard electronic spare parts. DriveKNMS applies the following verification procedures to all susceptor inventory:

• Dimensional inspection: Flatness, thickness uniformity, and diameter tolerance verified against OEM drawings using CMM (Coordinate Measuring Machine) and optical profilometry where applicable.
• Surface integrity check: Visual and UV inspection for micro-cracks, delamination of SiC or other coatings, pitting from process chemistry exposure, and particle contamination.
• Coating thickness measurement: For SiC-coated graphite susceptors, coating thickness is verified by eddy current or cross-section sampling to confirm it meets minimum process-safe specification.
• Revision-level verification: Each component is cross-referenced against Applied Materials ECO records to confirm revision compatibility within the assembly set.
• Cleanliness protocol: Components are cleaned, bagged, and sealed in ISO-class packaging prior to shipment to prevent particle introduction into customer process environments.